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Long-Term Reliability Degradation of Ultrathin Dielectric Films Due to Heavy-Ion Irradiation.

Authors :
Choi, B. K.
Fleetwood, D. M.
Schrimpf, R. D.
Massengill, Lloyd W.
Galloway, K. F.
Shaneyfelt, M. R.
Meisenheimer, T. L.
Dodd, P. E.
Schwank, J. R.
Lee, Y. M.
John, R. S.
Lucovsky, G.
Source :
IEEE Transactions on Nuclear Science; Dec2002 Part 1 of 2, Vol. 49 Issue 6, p3045, 6p, 1 Diagram, 1 Chart, 12 Graphs
Publication Year :
2002

Abstract

Presents a study that examined the mechanism of the reliability degradation of dielectric films due to high-energy ion irradiation using a percolation approach. Analysis of parameters that affect postirradiation reliability degradation; Investigation of the enhancement of the reliability of degradation due to increasing ion fluence incident; Results and implications.

Subjects

Subjects :
DIELECTRIC films
IONS
IRRADIATION

Details

Language :
English
ISSN :
00189499
Volume :
49
Issue :
6
Database :
Complementary Index
Journal :
IEEE Transactions on Nuclear Science
Publication Type :
Academic Journal
Accession number :
8857766
Full Text :
https://doi.org/10.1109/TNS.2002.805389