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Long-Term Reliability Degradation of Ultrathin Dielectric Films Due to Heavy-Ion Irradiation.
- Source :
- IEEE Transactions on Nuclear Science; Dec2002 Part 1 of 2, Vol. 49 Issue 6, p3045, 6p, 1 Diagram, 1 Chart, 12 Graphs
- Publication Year :
- 2002
-
Abstract
- Presents a study that examined the mechanism of the reliability degradation of dielectric films due to high-energy ion irradiation using a percolation approach. Analysis of parameters that affect postirradiation reliability degradation; Investigation of the enhancement of the reliability of degradation due to increasing ion fluence incident; Results and implications.
- Subjects :
- DIELECTRIC films
IONS
IRRADIATION
Subjects
Details
- Language :
- English
- ISSN :
- 00189499
- Volume :
- 49
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- IEEE Transactions on Nuclear Science
- Publication Type :
- Academic Journal
- Accession number :
- 8857766
- Full Text :
- https://doi.org/10.1109/TNS.2002.805389