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Your search keyword '"Microelectromechanical systems -- Research -- Usage"' showing total 2 results
Start Over Descriptor "Microelectromechanical systems -- Research -- Usage" Topic chemicals, plastics and rubber industries
2 results on '"Microelectromechanical systems -- Research -- Usage"'

1. Usage of 'all-oxide' thin films in MEMS fabrication

Author

Pellegrino, Luca

Subjects
Thin films -- Usage, Dielectric films -- Usage, Microelectromechanical systems -- Research -- Usage, Research institutes -- Research -- Usage, Oxides -- Usage, Business, Chemicals, plastics and rubber industries, High technology industry, Metals, metalworking and machinery industries
Abstract

Many oxide materials are strongly correlated systems exhibiting a broad spectrum of physical properties such as superconductivity, ferromagnetic order, ferroelectricity, transparency to visible light, semiconducting behavior (often associated with transparency [...]

Published
2009

2. SU8 nanocomposite coating for MEMS

Subjects
Coatings industry -- Research agreements, Coating processes -- Research -- Usage, Nanotechnology -- Usage -- Research, Universities and colleges -- Research agreements -- Research -- Switzerland, Microelectromechanical systems -- Research -- Usage, Business, Chemicals, plastics and rubber industries, High technology industry, Metals, metalworking and machinery industries, Research agreements, Usage, Research
Abstract

Photoresist is an organic polymer, which on exposure to ultraviolet light becomes soluble. The photoresist contains a light-sensitive substance (photoinitiator) whose properties enable transfer of image onto a substrate such [...]

Published
2006

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