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Usage of 'all-oxide' thin films in MEMS fabrication

Authors :
Pellegrino, Luca
Source :
Advanced Coatings & Surface Technology. August, 2009, Vol. 22 Issue 8, p11, 2 p.
Publication Year :
2009

Abstract

Many oxide materials are strongly correlated systems exhibiting a broad spectrum of physical properties such as superconductivity, ferromagnetic order, ferroelectricity, transparency to visible light, semiconducting behavior (often associated with transparency [...]

Subjects

Subjects :
Thin films -- Usage
Dielectric films -- Usage
Microelectromechanical systems -- Research -- Usage
Research institutes -- Research -- Usage
Oxides -- Usage
Business
Chemicals, plastics and rubber industries
High technology industry
Metals, metalworking and machinery industries

Details

Language :
English
ISSN :
0896422X
Volume :
22
Issue :
8
Database :
Gale General OneFile
Journal :
Advanced Coatings & Surface Technology
Publication Type :
Academic Journal
Accession number :
edsgcl.206958684

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