1. Switching Kinetics in Nanoscale Hafnium Oxide Based Ferroelectric Field-Effect Transistors
- Author
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Uwe Schroeder, Stefan Müller, Halid Mulaosmanovic, P. Polakowski, J. Ocker, Stefan Slesazeck, Ralf van Bentum, Johannes Müller, Stefan Flachowsky, Thomas Mikolajick, and Publica
- Subjects
010302 applied physics ,Materials science ,Field (physics) ,business.industry ,Kinetics ,Nucleation ,Nanotechnology ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Ferroelectricity ,Non-volatile memory ,0103 physical sciences ,Optoelectronics ,General Materials Science ,Field-effect transistor ,0210 nano-technology ,Polarization (electrochemistry) ,business ,Nanoscopic scale - Abstract
The recent discovery of ferroelectricity in thin hafnium oxide films has led to a resurgence of interest in ferroelectric memory devices. Although both experimental and theoretical studies on this new ferroelectric system have been undertaken, much remains to be unveiled regarding its domain landscape and switching kinetics. Here we demonstrate that the switching of single domains can be directly observed in ultrascaled ferroelectric field effect transistors. Using models of ferroelectric domain nucleation we explain the time, field and temperature dependence of polarization reversal. A simple stochastic model is proposed as well, relating nucleation processes to the observed statistical switching behavior. Our results suggest novel opportunities for hafnium oxide based ferroelectrics in nonvolatile memory devices.
- Published
- 2017