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One of the most frequent malignant tumors seen in clinics is primary liver cancer, also referred to as the "king of cancers." Therefore, the necessity for an effective and precise detection technique is urgent. Compared with the cantilever beam, the double-ended clamped beam has the characteristics of higher resonance frequency and stronger noise immunity, so it has a good application prospect as a biosensor. This paper takes the double-ended clamped beam biosensor as the object and focuses on the method that can be applied to the early diagnosis and detection of liver cancer. The manufacturing process of the double-ended clamped beam and the biofunctional modification of the beam surface were introduced. Meantime, this paper introduces the integration of the composite double-ended clamped beam biosensor system. As a result, a high-sensitivity, high-reliability in situ real-time monitoring technology for early-stage liver cancer is proposed. A composite double-ended clamped beam made of silicon and silicon nitride is used. The size of the double-ended clamped beam is 280 µm × 50µm × 5µm. This paper provides a low-cost, portable, and rapid early diagnosis method for liver cancer, which has very significant application value in the field of early cancer screening. [ABSTRACT FROM AUTHOR]

A novel cantilever array-based biosensor was batch-fabricated with IC compatible MEMS technology for precise liver cancer biomarker detection. A microcavity was designed in the free end of the cantilever for local antibody-immobilization using the micro-printing system, which can dramatically reduce the effect of adsorption-induced stiffness coefficient k variation. These structural features offer several advantages: high sensitivity, high throughput, high mass detection accuracy, and high specification. In addition, the surface biofunctionalization methods were commonly used in biological detection devices are mainly introduced, and the optimal biofunctionalization scheme for silicon-based microcantilever is proposed. The modification procedure of APTES-GA was characterized by cantilever, and the uniform aldehyde surface of the microcantilever was obtained. The immobilization time and culture method of the microcantilever antibodies were optimized to obtain localized, dense and highly active antibody surfaces. Which provides an excellent surface functionalization method for the cantilever biosensor. [ABSTRACT FROM AUTHOR]