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Start Over Author "Cheng, H.C." Topic annealing of crystals
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1. Formation of p[sup +]n junctions by Si[sup +]+B[sup +] implantation and laser annealing.

Author

Juang, M.H. and Cheng, H.C.

Subjects
*SEMICONDUCTOR junctions, *ION implantation, *ANNEALING of crystals
Abstract

Investigates the formation of p[sub +]n junctions by ion implantation and laser annealing. Presentation of the implants and anneal regimes; Effect of rapid thermal annealing on boron implanted silicon pre-amorphized samples; Role of laser annealing in dopant activation and anomalous diffusion suppression.

Published
1992
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