1. Analysis of High-Purity Silane of Natural and Isotopically Enriched Composition by Gas Chromatography–Mass-Spectrometry
- Author
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T. G. Sorochkina, O. Yu. Chernova, V. A. Krylov, A. Yu. Sozin, O. Yu. Troshin, A. D. Bulanov, N. D. Grishnova, A. P. Kotkov, and A. I. Skosyrev
- Subjects
chemistry.chemical_classification ,010401 analytical chemistry ,Inorganic chemistry ,010402 general chemistry ,Magnesium silicide ,01 natural sciences ,Silane ,0104 chemical sciences ,Analytical Chemistry ,law.invention ,chemistry.chemical_compound ,chemistry ,Impurity ,law ,Carbon dioxide ,Silicon tetrafluoride ,Gas chromatography–mass spectrometry ,Distillation ,Alkyl - Abstract
The impurity composition of natural and isotopically enriched silane obtained from magnesium silicide and silicon tetrafluoride is studied by gas chromatography–mass-spectrometry. The impurities characteristic of silane with natural and isotopically enriched composition are atmospheric gases; carbon dioxide; hydrides; saturated, unsaturated, and aromatic hydrocarbons; halogenated hydrocarbons; alkyl derivatives and silane homologues, siloxanes. The impurity content of high-purity silane does not exceed 10–7–10–5 mol % After synthesis, the concentrations of impurities in the silane and fractions isolated by its distillation purification lie in the range n × 10–6 − n × 10 mol % The limits of detection for impurities are 1 × 10–8–9 × 10–4 mol %
- Published
- 2020