Back to Search
Start Over
Impurity composition of monoisotopic 28SiF4 silicon tetrafluoride
- Source :
- Inorganic Materials. 53:1300-1306
- Publication Year :
- 2017
- Publisher :
- Pleiades Publishing Ltd, 2017.
-
Abstract
- The impurity composition of 28SiF4 has been studied for the first time by gas chromatography/mass spectrometry using gas-adsorption capillary columns. For identification and determination of impurity substances by gas chromatography/mass spectrometry, we have proposed using cryogenic preconcentration of the impurities from 28SiF4. The presence of C2–C4 hydrocarbon impurities and sulfur hexafluoride has been confirmed. We have identified 35 impurity substances in 28SiF4, including linear and branched C5–C8 saturated hydrocarbons, aromatic hydrocarbons, chlorine- and fluorine-containing hydrocarbons, and silicon- and sulfur-containing substances, of which 28 have been detected for the first time.
- Subjects :
- chemistry.chemical_classification
Silicon
Chemistry
General Chemical Engineering
Inorganic chemistry
Metals and Alloys
Analytical chemistry
chemistry.chemical_element
02 engineering and technology
010402 general chemistry
021001 nanoscience & nanotechnology
Mass spectrometry
01 natural sciences
0104 chemical sciences
Inorganic Chemistry
chemistry.chemical_compound
Hydrocarbon
Impurity
Materials Chemistry
Silicon tetrafluoride
Gas chromatography
Monoisotopic mass
Gas chromatography–mass spectrometry
0210 nano-technology
Subjects
Details
- ISSN :
- 16083172 and 00201685
- Volume :
- 53
- Database :
- OpenAIRE
- Journal :
- Inorganic Materials
- Accession number :
- edsair.doi...........b9b1f730c5b97db3f4dce2008b84f154