1. Analysis of High-Purity Silane of Natural and Isotopically Enriched Composition by Gas Chromatography–Mass-Spectrometry.
- Author
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Sozin, A. Yu., Krylov, V. A., Chernova, O. Yu., Sorochkina, T. G., Bulanov, A. D., Troshin, O. Yu., Kotkov, A. P., Grishnova, N. D., and Skosyrev, A. I.
- Subjects
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SILANE , *ATMOSPHERIC carbon dioxide , *HALOCARBONS , *ATMOSPHERIC composition , *AROMATIC compounds , *DETECTION limit - Abstract
The impurity composition of natural and isotopically enriched silane obtained from magnesium silicide and silicon tetrafluoride is studied by gas chromatography–mass-spectrometry. The impurities characteristic of silane with natural and isotopically enriched composition are atmospheric gases; carbon dioxide; hydrides; saturated, unsaturated, and aromatic hydrocarbons; halogenated hydrocarbons; alkyl derivatives and silane homologues, siloxanes. The impurity content of high-purity silane does not exceed 10–7–10–5 mol % After synthesis, the concentrations of impurities in the silane and fractions isolated by its distillation purification lie in the range n × 10–6 − n × 10 mol % The limits of detection for impurities are 1 × 10–8–9 × 10–4 mol % [ABSTRACT FROM AUTHOR]
- Published
- 2020
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