Analysis of High-Purity Silane of Natural and Isotopically Enriched Composition by Gas Chromatography–Mass-Spectrometry.

The impurity composition of natural and isotopically enriched silane obtained from magnesium silicide and silicon tetrafluoride is studied by gas chromatography–mass-spectrometry. The impurities characteristic of silane with natural and isotopically enriched composition are atmospheric gases; carbon dioxide; hydrides; saturated, unsaturated, and aromatic hydrocarbons; halogenated hydrocarbons; alkyl derivatives and silane homologues, siloxanes. The impurity content of high-purity silane does not exceed 10–7–10–5 mol % After synthesis, the concentrations of impurities in the silane and fractions isolated by its distillation purification lie in the range n × 10–6 − n × 10 mol % The limits of detection for impurities are 1 × 10–8–9 × 10–4 mol % [ABSTRACT FROM AUTHOR]