1. Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy
- Author
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Frederik Westergaard Østerberg, Stiven Forti, Clifford McAleese, Kenneth B. K. Teo, Binbin Zhou, Iwona Pasternak, Haofei Shi, Da Luo, Steven Brems, Odile Bezencenet, Camilla Coletti, Cedric Huyghebaert, Pierre Legagneux, Neeraj Mishra, Ben R. Conran, Timothy J. Booth, Bruno Dlubak, Abhay Shivayogimath, Alexandre Jouvray, Amaia Zurutuza, Cunzhi Sun, Birong Luo, Jie Ji, David M. A. Mackenzie, Qian Shen, Wlodek Strupinski, Dirch Hjorth Petersen, Peter Bøggild, Bjarke Sørensen Jessen, Ilargi Napal, Peter Uhd Jepsen, Alba Centeno, Patrick Rebsdorf Whelan, Deping Huang, Meihui Wang, Pierre Seneor, Rodney S. Ruoff, Danmarks Tekniske Universitet (DTU), Thales Research and Technology [Palaiseau], THALES, Center for Nanotechnology Innovation, @NEST (CNI), National Enterprise for nanoScience and nanoTechnology (NEST), Scuola Normale Superiore di Pisa (SNS)-Scuola Universitaria Superiore Sant'Anna [Pisa] (SSSUP)-Istituto Italiano di Tecnologia (IIT)-Consiglio Nazionale delle Ricerche [Pisa] (CNR PISA)-Scuola Normale Superiore di Pisa (SNS)-Scuola Universitaria Superiore Sant'Anna [Pisa] (SSSUP)-Istituto Italiano di Tecnologia (IIT)-Consiglio Nazionale delle Ricerche [Pisa] (CNR PISA), IIT Graphene Labs, Istituto Italiano di Tecnologia (IIT), Nanchang University, Zhejiang University of Technology, Columbia University [New York], Warsaw University of Technology [Warsaw], Vigo System S.A., Aalto University, Unité mixte de physique CNRS/Thales (UMPhy CNRS/THALES), Centre National de la Recherche Scientifique (CNRS)-THALES, Institute for Basic Science (IBS) - Ulsan, CAPRES - A KLA Company, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences (CIGIT), Center for Multidimensional Carbon Materials, Institute for Basic Science (IBS) (CMCM), Ulsan National Institute of Science and Technology (UNIST), AIXTRON SE, IMEC (IMEC), Catholic University of Leuven - Katholieke Universiteit Leuven (KU Leuven), Graphenea S.A., Virgo System S.A., Thales Research and Technologies [Orsay] (TRT), Technical University of Denmark, Thales, Italian Institute of Technology, Warsaw University of Technology, Department of Electronics and Nanoengineering, Université Paris-Saclay, Tianjin Normal University, Chinese Academy of Sciences, Institute for Basic Science, Aixtron SE, IMEC Vzw, Graphenea, and Aalto-yliopisto
- Subjects
large-scale graphene ,Materials science ,Terahertz radiation ,Nanotechnology ,02 engineering and technology ,terahertz spectroscopy ,01 natural sciences ,law.invention ,CVD graphene ,law ,0103 physical sciences ,General Materials Science ,Process optimization ,[PHYS.COND]Physics [physics]/Condensed Matter [cond-mat] ,010306 general physics ,Spectroscopy ,Terahertz time-domain spectroscopy ,ComputingMilieux_MISCELLANEOUS ,large-scale grapheme ,Graphene ,Mechanical Engineering ,General Chemistry ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Terahertz spectroscopy and technology ,Metrology ,Characterization (materials science) ,CVD grapheme ,Mechanics of Materials ,0210 nano-technology ,electrical mapping - Abstract
Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.
- Published
- 2021
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