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Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy

Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy

Authors :
Frederik Westergaard Østerberg
Stiven Forti
Clifford McAleese
Kenneth B. K. Teo
Binbin Zhou
Iwona Pasternak
Haofei Shi
Da Luo
Steven Brems
Odile Bezencenet
Camilla Coletti
Cedric Huyghebaert
Pierre Legagneux
Neeraj Mishra
Ben R. Conran
Timothy J. Booth
Bruno Dlubak
Abhay Shivayogimath
Alexandre Jouvray
Amaia Zurutuza
Cunzhi Sun
Birong Luo
Jie Ji
David M. A. Mackenzie
Qian Shen
Wlodek Strupinski
Dirch Hjorth Petersen
Peter Bøggild
Bjarke Sørensen Jessen
Ilargi Napal
Peter Uhd Jepsen
Alba Centeno
Patrick Rebsdorf Whelan
Deping Huang
Meihui Wang
Pierre Seneor
Rodney S. Ruoff
Danmarks Tekniske Universitet (DTU)
Thales Research and Technology [Palaiseau]
THALES
Center for Nanotechnology Innovation, @NEST (CNI)
National Enterprise for nanoScience and nanoTechnology (NEST)
Scuola Normale Superiore di Pisa (SNS)-Scuola Universitaria Superiore Sant'Anna [Pisa] (SSSUP)-Istituto Italiano di Tecnologia (IIT)-Consiglio Nazionale delle Ricerche [Pisa] (CNR PISA)-Scuola Normale Superiore di Pisa (SNS)-Scuola Universitaria Superiore Sant'Anna [Pisa] (SSSUP)-Istituto Italiano di Tecnologia (IIT)-Consiglio Nazionale delle Ricerche [Pisa] (CNR PISA)
IIT Graphene Labs
Istituto Italiano di Tecnologia (IIT)
Nanchang University
Zhejiang University of Technology
Columbia University [New York]
Warsaw University of Technology [Warsaw]
Vigo System S.A.
Aalto University
Unité mixte de physique CNRS/Thales (UMPhy CNRS/THALES)
Centre National de la Recherche Scientifique (CNRS)-THALES
Institute for Basic Science (IBS) - Ulsan
CAPRES - A KLA Company
Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences (CIGIT)
Center for Multidimensional Carbon Materials, Institute for Basic Science (IBS) (CMCM)
Ulsan National Institute of Science and Technology (UNIST)
AIXTRON SE
IMEC (IMEC)
Catholic University of Leuven - Katholieke Universiteit Leuven (KU Leuven)
Graphenea S.A.
Virgo System S.A.
Thales Research and Technologies [Orsay] (TRT)
Technical University of Denmark
Thales
Italian Institute of Technology
Warsaw University of Technology
Department of Electronics and Nanoengineering
Université Paris-Saclay
Tianjin Normal University
Chinese Academy of Sciences
Institute for Basic Science
Aixtron SE
IMEC Vzw
Graphenea
Aalto-yliopisto
Source :
2D Materials, 2D Materials, IOP Publishing, 2021, ⟨10.1088/2053-1583/abdbcb⟩, Whelan, P R, Zhou, B, Bezencenet, O, Shivayogimath, A, Mishra, N, Shen, Q, Jessen, B S, Pasternak, I, Mackenzie, D M A, Ji, J, Sun, C, Seneor, P, Dlubak, B, Luo, B, Østerberg, F W, Huang, D, Shi, H, Luo, D, Wang, M, Ruoff, R S, Conran, B R, McAleese, C, Huyghebaert, C, Brems, S, Booth, T, Napal, I, Strupinski, W, Petersen, D H, Forti, S, Coletti, C, Jouvray, A, Teo, K B K, Centeno, A, Zurutuza, A, Legagneux, P, Jepsen, P U & Bøggild, P 2021, ' Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy ', 2D materials, vol. 8, no. 2, 022003 . https://doi.org/10.1088/2053-1583/abdbcb
Publication Year :
2021

Abstract

Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.

Details

ISSN :
20531583
Database :
OpenAIRE
Journal :
2D Materials
Accession number :
edsair.doi.dedup.....520430e160148c99129cea18cd899f41
Full Text :
https://doi.org/10.1088/2053-1583/abdbcb