1. The impact of nitrogen plasma treatments on SixNyHz moisture sensitivity
- Author
-
Cazako, Catheline, Inal, Karim, Burr, Alain, Georgi, Frédéric, Centre de Mise en Forme des Matériaux (CEMEF), MINES ParisTech - École nationale supérieure des mines de Paris, and Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)
- Subjects
[SPI.MECA.MEMA]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Mechanics of materials [physics.class-ph] ,[CHIM.CRIS]Chemical Sciences/Cristallography ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,[SPI.GPROC]Engineering Sciences [physics]/Chemical and Process Engineering ,[PHYS.PHYS.PHYS-CHEM-PH]Physics [physics]/Physics [physics]/Chemical Physics [physics.chem-ph] ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,ComputingMilieux_MISCELLANEOUS ,[SPI.MAT]Engineering Sciences [physics]/Materials - Abstract
International audience
- Published
- 2017