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The design of the capacitive motors that are based on the electrostatic rolling of the thin metallic film on the ferroelectric surface is analyzed. The use of the ferroelectric materials with high dielectric constant in the electrostatic motor (EM) construction has allowed moving the main stage of the electromechanical energy conversion into the range of nanometer operating gaps, which improves the parameters of the micromotors.

The analysis of electromechanical energy converters based on metal-thin film ferroelectric (with a large specific capacitance)-nanogap-moving electrode structures was performed. It was shown that the density of the energy being converted and its absolute value increase with the decreasing gap value between the surfaces of the ferroelectric and the metallic moving electrode up to nanometer values. The effects limiting the growth of this energy were established, and the limiting value of the energy density transformed in the nanogap of these structures was determined to be about 1.6 × 1010 J/m3, which is 4 orders of magnitude higher than the energy density in inductive converters. The experimental verification of this model based on the data for micromotors fabricated on these structures is given. [ABSTRACT FROM AUTHOR]