Ferroelectric-based electrostatic micromotors with nanometer gaps

The design of the capacitive motors that are based on the electrostatic rolling of the thin metallic film on the ferroelectric surface is analyzed. The use of the ferroelectric materials with high dielectric constant in the electrostatic motor (EM) construction has allowed moving the main stage of the electromechanical energy conversion into the range of nanometer operating gaps, which improves the parameters of the micromotors.