Search

Your search keyword '"CAPRES - A KLA Company"' showing total 2 results
Start Over Author "CAPRES - A KLA Company" Search Limiters Available in Library Collection
2 results on '"CAPRES - A KLA Company"'

1. Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy

Author

Frederik Westergaard Østerberg, Stiven Forti, Clifford McAleese, Kenneth B. K. Teo, Binbin Zhou, Iwona Pasternak, Haofei Shi, Da Luo, Steven Brems, Odile Bezencenet, Camilla Coletti, Cedric Huyghebaert, Pierre Legagneux, Neeraj Mishra, Ben R. Conran, Timothy J. Booth, Bruno Dlubak, Abhay Shivayogimath, Alexandre Jouvray, Amaia Zurutuza, Cunzhi Sun, Birong Luo, Jie Ji, David M. A. Mackenzie, Qian Shen, Wlodek Strupinski, Dirch Hjorth Petersen, Peter Bøggild, Bjarke Sørensen Jessen, Ilargi Napal, Peter Uhd Jepsen, Alba Centeno, Patrick Rebsdorf Whelan, Deping Huang, Meihui Wang, Pierre Seneor, Rodney S. Ruoff, Danmarks Tekniske Universitet (DTU), Thales Research and Technology [Palaiseau], THALES, Center for Nanotechnology Innovation, @NEST (CNI), National Enterprise for nanoScience and nanoTechnology (NEST), Scuola Normale Superiore di Pisa (SNS)-Scuola Universitaria Superiore Sant'Anna [Pisa] (SSSUP)-Istituto Italiano di Tecnologia (IIT)-Consiglio Nazionale delle Ricerche [Pisa] (CNR PISA)-Scuola Normale Superiore di Pisa (SNS)-Scuola Universitaria Superiore Sant'Anna [Pisa] (SSSUP)-Istituto Italiano di Tecnologia (IIT)-Consiglio Nazionale delle Ricerche [Pisa] (CNR PISA), IIT Graphene Labs, Istituto Italiano di Tecnologia (IIT), Nanchang University, Zhejiang University of Technology, Columbia University [New York], Warsaw University of Technology [Warsaw], Vigo System S.A., Aalto University, Unité mixte de physique CNRS/Thales (UMPhy CNRS/THALES), Centre National de la Recherche Scientifique (CNRS)-THALES, Institute for Basic Science (IBS) - Ulsan, CAPRES - A KLA Company, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences (CIGIT), Center for Multidimensional Carbon Materials, Institute for Basic Science (IBS) (CMCM), Ulsan National Institute of Science and Technology (UNIST), AIXTRON SE, IMEC (IMEC), Catholic University of Leuven - Katholieke Universiteit Leuven (KU Leuven), Graphenea S.A., Virgo System S.A., Thales Research and Technologies [Orsay] (TRT), Technical University of Denmark, Thales, Italian Institute of Technology, Warsaw University of Technology, Department of Electronics and Nanoengineering, Université Paris-Saclay, Tianjin Normal University, Chinese Academy of Sciences, Institute for Basic Science, Aixtron SE, IMEC Vzw, Graphenea, and Aalto-yliopisto

Subjects
large-scale graphene, Materials science, Terahertz radiation, Nanotechnology, 02 engineering and technology, terahertz spectroscopy, 01 natural sciences, law.invention, CVD graphene, law, 0103 physical sciences, General Materials Science, Process optimization, [PHYS.COND]Physics [physics]/Condensed Matter [cond-mat], 010306 general physics, Spectroscopy, Terahertz time-domain spectroscopy, ComputingMilieux_MISCELLANEOUS, large-scale grapheme, Graphene, Mechanical Engineering, General Chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Terahertz spectroscopy and technology, Metrology, Characterization (materials science), CVD grapheme, Mechanics of Materials, 0210 nano-technology, electrical mapping
Abstract

Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.

Published
2021
Full Text
View/download PDF

2. Wafer-scale graphene quality assessment using micro four-point probe mapping

Author

Mackenzie, D., Kalhauge, K., Whelan, P., Østergaard, F., Pasternak, I., Strupinski, W., Bøggild, P., Jepsen, P., Petersen, D., Harri Lipsanen Group, Danmarks Tekniske Universitet, CAPRES—A KLA Company, Warsaw University of Technology, ENT SA, Department of Electronics and Nanoengineering, Aalto-yliopisto, and Aalto University

Subjects
SiC, metrology, micro four-point probe, Mapping, Conductance, graphene, Micro four-point probes, mapping, Graphene, terahertz spectroscopy, Terahertz spectroscopy, Metrology, conductance
Abstract

openaire: EC/H2020/785219/EU//GrapheneCore2 Micro four-point probes (M4PP) provide rapid and automated lithography-free transport properties of planar surfaces including two-dimensional materials. We perform sheet conductance wafer maps of graphene directly grown on a 100 mm diameter SiC wafer using a multiplexed seven-point probe with minor additional measurement time compared to a four-point probe. Comparing the results of three subprobes we find that compared to a single-probe result, our measurement yield increases from 72%-84% to 97%. The additional data allows for correlation analysis between adjacent subprobes, that must measure the same values in case the sample is uniform on the scale of the electrode pitch. We observe that the relative difference in measured sheet conductance between two adjacent subprobes increase in the transition between large and low conductance regions. We mapped sheet conductance of graphene as it changed over several weeks. Terahertz time-domain spectroscopy conductivity maps both before and after M4PP mapping showed no significant change due to M4PP measurement, with both methods showing the same qualitative changes over time.

Published
2020
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results