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Your search keyword '"Olga Proshina"' showing total 3 results
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3 results on '"Olga Proshina"'

2. Pore sealing mechanism in OSG low‐ k films under ion bombardment

Author

Ekaterina N. Voronina, Yuri A. Mankelevich, Dmitry Lopaev, A I Zotovich, A. A. Sycheva, A. T. Rakhimov, Olga Proshina, Tatyana Rakhimova, S M Zyryanov, and D. G. Voloshin

Subjects
Molecular dynamics, Materials science, Polymers and Plastics, Chemical physics, Condensed Matter Physics, Ion bombardment, Mechanism (sociology)
Published
2019
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3. Modeling of Single and Dual Frequency Capacitive Discharge in Argon Hydrogen Mixture − Dynamic Effects and Ion Energy Distribution Functions

Author

Yuri A. Mankelevich, Olga Proshina, Tatyana Rakhimova, and D. G. Voloshin

Subjects
010302 applied physics, Argon, Polymers and Plastics, Hydrogen, Chemistry, Monte Carlo method, Analytical chemistry, chemistry.chemical_element, 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Ion, Distribution function, 0103 physical sciences, Dual frequency, Capacitively coupled plasma, Atomic physics, 0210 nano-technology, Voltage
Abstract

Single (SF) and dual frequency capacitively coupled plasma (DF CCP) in (0–50%) H2/Ar mixtures was studied numerically with 1D hybrid (Particle-in-cell with Monte Carlo Collision + fluid) model. In SF (81 MHz) discharge the effect of hydrogen dilution is studied for the fixed discharge input power. Mechanisms of the plasma density decrease and variation of ions composition with H2 percentage are discussed. The effect of low-frequency voltage on plasma density, ions composition, ions fluxes, and ions energy was studied in DF CCP (1.76–81 MHz) discharge in 5% H2/Ar gas mixture at low (20 mTorr) and high (100 mTorr) pressures.

Published
2016
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