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Your search keyword '"Stefan Detterbeck"' showing total 2 results
Start Over Author "Stefan Detterbeck" Publisher trans tech publications, ltd.
2 results on '"Stefan Detterbeck"'

1. All-Wet Stripping of FEOL Photoresist Using Mixtures of Sulphuric Acid

Author

Sally Ann Henry, Stefan Detterbeck, Thomas Hellweg, Michael Kagerer, Mauro Alessandri, Ladislaus Brilz, Leo Archer, and Enrico Bellandi

Subjects
chemistry.chemical_compound, chemistry, Inorganic chemistry, General Materials Science, Sulfuric acid, Photoresist, Condensed Matter Physics, Hydrogen peroxide, Stripping (fiber), Atomic and Molecular Physics, and Optics
Published
2007
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2. New Single Wafer Double Sided Spin Cleaning Method

Author

Hans-Jürgen Dipl.-Ing. Kruwinus, Reinhard Sellmer, Alfred Lechner, Jörg Leberzammer, Walter Starflinger, and Stefan Detterbeck

Subjects
Materials science, business.industry, Optoelectronics, General Materials Science, Nanotechnology, Wafer, Condensed Matter Physics, business, Atomic and Molecular Physics, and Optics, Spin-½
Published
2001
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