1. The NPMM-200: large area high resolution for freeform surface measurement
- Author
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Christof Pruss, Wolfgang Osten, Christian Schober, and Alois Herkommer
- Subjects
Materials science ,Optics ,Scale (ratio) ,business.industry ,Surface measurement ,Frame (networking) ,Resolution (electron density) ,High resolution ,Nanometre ,Focus (optics) ,business ,Metrology - Abstract
Nanometer resolution metrology is a significant topic in the development and production of complex shaped high precision optics. The Nanopositioning and Nanomeasuring Machine NPMM-200 at ITO is built for nanometer scale positioning in a large scale measurement volume of 200 mm x 200 mm x 25 mm. The concept of the machine is based on a high precision interferometrically controlled stage in a stable metrological frame made of glass-ceramic. In this frame, different types of sensors can be attached for measurement of surface topographies. In this contribution, we present the use of optical sensors, such as a fixed focus probe, for measuring of high precision aspheric and freeform optics with this new machine.
- Published
- 2020
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