Applications of diffractive optical elements for optical measurement techniques

Diffractive optical elements offer a high degree of freedom for controlling phase and spectral behavior in optical designs. This enables new and compact optical sensors and measurement systems. We show several recent applications which bene t from unique properties of diffractive optical elements. The applications include: field aberration correction e.g. for microscopic projection applications through microscope objective lenses, a 200 channel microscope objective integrated optical addressing system, diffractive/refractive hybrid optics for high efficiency beam shaping and deflection angle enlargement of spatial light modulators.