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1. Flexibility and Rapid Measurement: Asphere and Freeform Metrology with Tilted Wave Interferometry

Author

Christof Pruss, Woflgang Osten, Johannes Schindler, and Goran Baer

Subjects
Flexibility (engineering), Interferometry, Materials science, Optics, business.industry, Astrophysics::Instrumentation and Methods for Astrophysics, Calibration, High resolution, business, Laser beams, Metrology
Abstract

The challenge to bring together flexibility, accuracy, high resolution and a short measurement time lead to the invention of the tilted wave interferometry, a metrology approach for asphere and freeform surfaces.

Published
2014
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