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Having developed a transition-edge-sensor (TES) calorimeter design that enables high spectral resolution in high fill-factor arrays, we now present array-scale results from 32-pixel arrays of identical closely packed TES pixels. Each pixel in such an array contains a Mo/Au bilayer with a transition temperature of 0.1 K and an electroplated Au or Au/Bi xray absorber. The pixels in an array have highly uniform physical characteristics and performance. The arrays are easy to operate due to the range of bias voltages and heatsink temperatures over which solution better than 3 eV at 6 keV can be obtained. Resolution better than 3 eV has also been obtained with 2x8 time-division SQUID multiplexing. We will present the detector characteristics and show spectra acquired through the read-out chain from the multiplexer electronics through the demultiplexer software to real-time signal processing. We are working towards demonstrating this performance over the range of count rates expected in the observing program of the Constellation-X observatory. We mill discuss the impact of increased counting rate on spectral resolution, including the effects of crosstalk and optimal-filtering dead time.

Having already developed a transition-edge-sensor (TES) microcalorimeter design that enables uniform and reproducible high spectral resolution (routinely better than 3 eV resolution at 6 keV) and is compatible with high fill-factor arrays, we are now working towards demonstrating this performance at high count rates and with the multiplexed read-out needed for instrumenting the Constellation-X X-ray Microcalorimeter Spectrometer (XMS) focal plane array. Design changes that increase the speed of the individual XMS pixels, such as lowering the heat capacity or increasing the thermal conductance of the link to the 50-mK heatsink, result in larger, faster signals, thus the coupling to the multiplexer and the overall bandwidth of the electronics must accommodate this increase in slew rate. In order to operate the array with high incident x-ray flux without unacceptable degradation of the spectral resolution, the magnitude of thermal and electrical crosstalk must be controlled. We will discuss recent progress in the thermal and electrical designs of our close-packed TES arrays, and we will present spectra acquired through the read-out chain from the multiplexer electronics, through the demultiplexer software, to real-time signal processing.

We are developing arrays of position-sensitive transition-edge sensor (POST) X-ray detectors for future astronomy missions such as NASA's Constellation-X. The POST consists of multiple absorbers thermally coupled to one or more transition-edge sensor (TES). Each absorber element has a different thermal coupling to the TES. This results in a distribution of different pulse shapes and enables position discrimination between the absorber elements. POST'S are motivated by the desire to achieve the largest possible focal plane area with the fewest number of readout channels and are ideally suited to increasing the Constellation-X focal plane area, without comprising on spatial sampling. Optimizing the performance of POST'S requires careful design of key parameters such as the thermal conductances between the absorbers, TES and the heat sink. as well as the absorber heat capacities. Using recently developed signal processing algorithms we have investigated the trade-off between position-sensitivity, energy resolution and pulse decay time. based on different device design parameters for PoST's. Our new generation of PoST's utilize technology successfully developed on high resolution (approximately 2.5eV) single pixels arrays of Mo/Au TESs. also under development for Constellation-X. This includes noise mitigation features on the TES and low resistivity electroplated absorbers. We report on the first experimental results from these new one and two-channel PoST"s, consisting of all Au and composite Au/Bi absorbers, which are designed to achieve an energy resolution of < 10 eV. coupled with count-rates of 100's per pixel per second and position sensitivity over the energy range 0.3-10 keV.

We describe our current fabrication process for arrays of superconducting transition edge sensor microcalorimeters, which incorporates superconducting Mo/Au bilayers and micromachined silicon structures. We focus on materials and integration methods for array heatsinking with our bilayer and micromachining processes. The thin superconducting molybdenum bottom layer strongly influences the superconducting behavior and overall film characteristics of our molybdenum/gold transition-edge sensors (TES). Concurrent with our successful TES microcalorimeter array development, we have started to investigate the thin film properties of molybdenum monolayers within a given phase space of several important process parameters. The monolayers are sputtered or electron-beam deposited exclusively on LPCVD silicon nitride coated silicon wafers. In our current bilayer process, molybdenum is electron-beam deposited at high wafer temperatures in excess of 500 degrees C. Identifying process parameters that yield high quality bilayers at a significantly lower temperature will increase options for incorporating process-sensitive auxiliary array components (AAC) such as array heat sinking and electrical interconnects into our overall device process. We are currently developing two competing technical approaches for heat sinking large compact TES microcalorimeter arrays. Our efforts to improve array heat sinking and mitigate thermal cross-talk between pixels include copper backside deposition on completed device chips and copper-filled micro-trenches surface-machined into wafers. In addition, we fabricated prototypes of copper through-wafer microvias as a potential way to read out the arrays. We present an overview on the results of our molybdenum monolayer study and its implications concerning our device fabrication. We discuss the design, fabrication process, and recent test results of our AAC development.

We are developing arrays of superconducting transition-edge sensors (TES) for imaging spectroscopy telescopes such as the XMS on Constellation-X. While our primary focus has been on arrays that meet the XMS requirements (of which, foremost, is an energy resolution of 2.5 eV at 6 keV and a bandpass from approx. 0.3 keV to 12 keV), we have also investigated other optimizations that might be used to extend the XMS capabilities. In one of these optimizations, improved resolution below 1 keV is achieved by reducing the heat capacity. Such pixels can be based on our XMS-style TES's with the separate absorbers omitted. These pixels can added to an array with broadband response either as a separate array or interspersed, depending on other factors that include telescope design and science requirements. In one version of this approach, we have designed and fabricated a composite array of low-energy and broad-band pixels to provide high spectral resolving power over a broader energy bandpass than could be obtained with a single TES design. The array consists of alternating pixels with and without overhanging absorbers. To explore optimizations for higher count rates, we are also optimizing the design and operating temperature of pixels that are coupled to a solid substrate. We will present the performance of these variations and discuss other optimizations that could be used to enhance the XMS or enable other astrophysics experiments.

We present measurements of high fill-factor arrays of superconducting transition-edge x-ray microcalorimeters designed to provide rapid thermalization of the x-ray energy. We designed an x-ray absorber that is cantilevered over the sensitive part of the thermometer itself, making contact only at normal metal-features. With absorbers made of electroplated gold, we have demonstrated an energy resolution between 2.4 and 3.1 eV at 5.9 keV on 13 separate pixels. We have determined the thermal and electrical parameters of the devices throughout the superconducting transition, and, using these parameters, have modeled all aspects of the detector performance.

An ideal microcalorimeter is characterized by a constant energy resolution across the sensor's dynamic range. Any dependence of pulse shape on the position within the absorber where an event occurs leads to a degradation in resolution that is linear with event s energy (excess broadening). In this paper we present a numerical simulation that was developed to model the variation in pulse shape with position based on the thermal conductivity within the absorber and between the absorber, sensor, and heat bath, for arbitrarily shaped absorbers and sensors. All the parameters required for the simulation can be measured from actual devices. We describe how the thermal conductivity of the absorber material is determined by comparing the results of this model with data taken from a position sensitive detector in which any position dependent effect is purposely emphasized by making a long, narrow absorber that is read out by sensors on both end. Finally, we present the implications for excess broadening given the measured parameters of our X-ray microcalorimeters.

The proper understanding and modeling of a microcalorimeter s response requires the accurate knowledge of a handful of parameters, such as C, G, alpha, . . . . While a few of these, such 8s the normal state resistance and the total thermal conductance to the heat bath (G) are directly determined from the DC IV characteristics, some others, notoriously the heat capacity (C) and alpha, appear in degenerate combinations in most measurable quantities. The case of a complex microcalorimeter, i.e. one in which the absorber s heat capacity is connected by a finite thermal impedance to the sensor, and subsequently by another thermal impedance to the heat bath, results in an added ambiguity in the determination of the individual C's and G's. In general, the dependence of the microcalorimeter s complex impedance on these parameters varies with frequency. This variation allows us to determine the individual parameters by fitting the prediction of the microcalorimeter model to the impedance data. We describe in this paper our efforts at characterizing the Goddard X-ray microcalorimeters. Using the parameters determined with this method we them compare the pulse shape and noise spectra predicted by the microcalorimeter model to data taken with the same devices.

Recent ROSAT studies have identified a significant population of Active Galactic Nuclei (AGN) that are notably faint in soft X-rays relative to their optical fluxes. Are these AGN intrinsically X-ray weak or are they just highly absorbed? Brandt, Laor & Wills have systematically examined the optical and UV spectral properties of a well-defined sample of these soft X-ray weak (SXW) AGN drawn from the Boroson & Green sample of all the Palomar Green AGN 00 with z < 0.5. We present ASCA observations of three of these SXW AGN: PG 1011-040, PG 1535+547 (Mrk 486), and PG 2112+059. In general, our ASCA observations support the intrinsic absorption scenario for explaining soft X-ray weakness; both PG 1535+547 and PG 2112+059 show significant column densities (NH is approximately 10(exp 22) - 10(exp 23)/sq cm) of absorbing gas. Interestingly, PG 1011-040 shows no spectral evidence for X-ray absorption. The weak X-ray emission may result from very strong absorption of a partially covered source, or this AGN may be intrinsically X-ray weak. PG 2112+059 is a Broad Absorption Line (BAL) QSO, and we find it to have the highest X-ray flux known of this class. It shows a typical power-law X-ray continuum above 3 keV; this is the first direct evidence that BAL QSOs indeed have normal X-ray continua underlying their intrinsic absorption. Finally, marked variability between the ROSAT and ASCA observations of PG 1535+547 and PG 2112+059 suggests that the soft X-ray weak designation may be transient, and multi-epoch 0.1-10.0 KeV X-ray observations are required to constrain variability of the absorber and continuum.