1. LiGA Research and Service at CAMD
- Author
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Zhong Geng Ling, Yohannes M. Desta, Yoonyoung Jin, Varshni Singh, Jost Goettert, and Proyag Datta
- Subjects
History ,Engineering drawing ,Service (systems architecture) ,Materials science ,Precision engineering ,Resist ,LIGA ,Manufacturing engineering ,Computer Science Applications ,Education - Abstract
Since 1995 CAMD has been offering exposure services, so called print shop for a variety of users interested in making precision High-Aspect-Ratio Microstructures (HARMST) for various application. Services have been expanded beyond only the print shop service in recent years and now include x-ray mask fabrication, substrate preparation for PMMA and SU- 8 resists, electroplating, finishing and molding. Metallic and polymeric parts are now routinely fabricated for precision engineering, micro-fluidic and micro-optic applications. This paper presents a brief overview of the actual status of LiGA services provided at CAMD including ongoing research efforts and examples of LiGA components for different applications.
- Published
- 2006
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