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Your search keyword '"Witters, Liesbeth"' showing total 2 results
Start Over Author "Witters, Liesbeth" Publisher institute of electrical and electronics engineers, inc.
2 results on '"Witters, Liesbeth"'

1. The influence of TiN thickness and Si[O.sub.2] formation method on the structural and electrical properties of TiN/Hf[O.sub.2]/Si[O.sub.2] gate stacks

Author

Vellianitis, Georgios, van Dal, Mark J.H., Boccardi, Guillaume, Duriez, Blandine, Voogt, Frans C., Kaiser, Monja, Witters, Liesbeth, and Lander, Robert J.P.

Subjects
Gates (Electronics) -- Analysis, Hafnium -- Electric properties, Silica -- Electric properties, Titanium compounds -- Electric properties, Titanium compounds -- Structure, Business, Electronics, Electronics and electrical industries
Abstract

The effect of controllable process parameters such as metal-gate physical thickness and interfacial-layer-formation method on the electrical and structural properties of TiN/Hf[O.sub.2]/Si[O.sub.2] gate stacks is studied. Hf-rich chemical interfacial oxides have not degraded the device performance and a small reduction in transconductance is seen for physically thinner interfacial layers.

Published
2009

2. Experimental investigation of optimum gate workfunction for CMOS four-terminal multigate MOSFETs (MUGFETs)

Author

Masahara, Meishoku, Surdeanu, Radu, Witters, Liesbeth, Doornbos, Gerben, Nguyen, Vet H., Bosch, Geert Van den, Vrancken, Christa, Jurczak, Malgorzata, and Biesemans, Serge

Subjects
Metal oxide semiconductor field effect transistors -- Design and construction, Complementary metal oxide semiconductors -- Design and construction, Complementary metal oxide semiconductors -- Electric properties, Gates (Electronics) -- Design and construction, Business, Electronics, Electronics and electrical industries
Abstract

The optimum gate workfunction (GWF) for four-terminal-driven multigate MOSFETs (4T-MUGFETs) is examined. The optimum GWF for the NMOS 4T-MUGFETs is found to be around 4.32eV, whereas 5.17 eV is the optimum GWP for PMOS 4T-MUGFETs.

Published
2007

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