1. Monolithic Integration of Surface Plasmon Detector and Metal–Oxide–Semiconductor Field-Effect Transistors
- Author
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Takuma Aihara, Masashi Fukuhara, Ayumi Takeda, Byounghyun Lim, Masato Futagawa, Yuya Ishii, Kazuaki Sawada, and Mitsuo Fukuda
- Subjects
Surface plasmon polariton ,Schottky barrier ,diffraction grating ,nano-slit ,metal-oxide-semiconductor field-effect transistor ,Applied optics. Photonics ,TA1501-1820 ,Optics. Light ,QC350-467 - Abstract
The monolithic integration of a silicon-based plasmonic detector with metal- oxide-semiconductor field-effect transistors (MOSFETs) was demonstrated. The plasmonic detector consisted of a gold film with a nanoslit grating on a silicon substrate and was operated at a free-space wavelength of 1550 nm. The structure of the nanoslit grating was optimized by using the finite-difference time-domain method. The output current from the plasmonic detector was amplified by ~14 000 times using the monolithically integrated MOSFETs. In addition, dynamic operation of the integrated circuit was demonstrated by modulation of the intensity of a beam that was incident to the plasmonic detector.
- Published
- 2013
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