1. Effect of interface on oxidation behavior and tribological properties of CrAlN/SiNx multilayer films.
- Author
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He, Youxing, Wang, Xiaobo, Guo, Tao, Gao, Kewei, and Pang, Xiaolu
- Subjects
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CRYSTALLINE interfaces , *INTERFACE structures , *MULTILAYERED thin films , *OXIDATION - Abstract
The oxidation resistance and tribological behavior of CrAlN/SiN x multilayer films with different interface structures were investigated. The multilayer film exhibited better oxidation resistance than the monolithic CrAlN film after oxidation at 900 °C and 1000 °C for 10 h. The crystalline SiN x sublayer was beneficial to oxidation resistance at 900 °C in contrast to the trend observed after oxidation at 1000 °C. The stacking faults generated in the multilayer film were induced by the oxidation of SiN x. The diffusion mechanism changed from the outward diffusion of cations to an inward diffusion of anions when the temperature was increased to 1000 °C. The multilayer film with a crystalline interface exhibited lower coefficient of friction (COF) and better tribological properties than the CrAlN film and multilayer with an amorphous interface. [ABSTRACT FROM AUTHOR]
- Published
- 2023
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