Author: "Tseng, S.-T." / Publisher: association for computing machinery - Searchworks@Jio Institute Digital Library Search Results

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Start Over Author "Tseng, S.-T." Publisher association for computing machinery

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1. Systematic applications of multivariate analysis to monitoring of equipment health in semiconductor manufacturing.

Author: Chao, A. G., Tseng, S. T., Wong, D. S. H., Jang, S. S., and Lee, S. P.
Published: 2008

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