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Systematic applications of multivariate analysis to monitoring of equipment health in semiconductor manufacturing.

Authors :
Chao, A. G.
Tseng, S. T.
Wong, D. S. H.
Jang, S. S.
Lee, S. P.
Source :
Proceedings of the 40th Conference Winter Simulation; 12/7/2008, p2330-2334, 5p
Publication Year :
2008

Details

Language :
English
ISBNs :
9781424427086
Database :
Complementary Index
Journal :
Proceedings of the 40th Conference Winter Simulation
Publication Type :
Conference
Accession number :
101492750

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