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Start Over Author "Tseng, Y.D." Publisher american institute of physics
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1. Substitutional carbon reduction in SiGeC alloys grown by rapid thermal chemical vapor deposition.

Author

Liu, C.W. and Tseng, Y.D.

Subjects
*CHEMICAL reduction, *CARBON, *CHEMICAL vapor deposition, *ALLOYS
Abstract

Studies the substitutional carbon reduction in SiGeC alloys grown by rapid thermal chemical vapor deposition. Increases in the compressive strain in the originally strain-compensated alloys; Maximum amount of carbon reduction; Enhancement of the reduction of substitutional carbon.

Published
1999
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