7 results on '"Hwang, Helen H."'
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2. Evidence for inelastic processes for N+3 and N+4 from ion energy distributions in He/N2 radio frequency glow discharges.
3. Fluorocarbon impurities in KrF lasers.
4. Simulations and experiments of etching of silicon in HBr plasmas for high aspect ratio features.
5. Consequences of three-dimensional physical and electromagnetic structures on dust particle trapping in high plasma density material processing discharges.
6. A model for transport and agglomeration of particles in reactive ion etching plasma reactors.
7. Regimes of particle trapping in inductively coupled plasma processing reactors.
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