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Your search keyword '"Chern, M.Y."' showing total 1 results
Start Over Author "Chern, M.Y." Publisher american institute of physics, inc.
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1. Thermal stability of Si/Si(sub 1-x-y)Ge(sub x)C(sub y)/Si quantum wells grown by rapid thermal chemical vapor deposition

Author

Liu, C.W., Tseng, Y.D., Chern, M.Y, Chang, C.L., and Sturm, J.C.

Subjects
Quantum wells -- Research, Chemical vapor deposition -- Usage, Physics
Abstract

Research was conducted to examine the thermal stability of Si/Si(1-x-y)Ge(sub x)C(sub y)/Si quantum wells grown by rapid thermal chemical vapor deposition. High resolution x-ray diffraction, defect etching and Fourier transform infrared spectroscopic studies were performed at various annealing temperatures. Results show that the Si(sub 1-x-y)Ge(sub x)C(sub y) layer with an initial thickness below the critical thickness shows misfit dislocation formation after annealing at 1000 degrees C for 2 h which may be due to the strain compensation decrease by SiC precipitates.

Published
1999

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