1. Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar.
- Author
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Wei Li, Zhilin Feng, Enwen Dai, Jie Xu, and Gang Bai
- Subjects
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NANOSILICON , *GAS analysis , *FABRICATION (Manufacturing) , *ETHANOL , *GAS detectors , *PERMITTIVITY - Abstract
Here, a silicon nanopillar array (Si-NPA)was fabricated. Itwas studied as a room-temperature organic vapour sensor, and the ethanol and acetone gas sensing properties were detected with I-V curves. I-V curves show that these Si-NPA gas sensors are sensitive to ethanol and acetone organic vapours. The turn-on threshold voltage is about 0.5 V and the operating voltage is 3 V. With 1% ethanol gas vapour, the response time is 5 s, and the recovery time is 15 s. Furthermore, an evaluation of the gas sensor stability for Si-NPA was performed. The gas stability results are acceptable for practical detections. These excellent sensing characteristics can mainly be attributed to the change of the overall dielectric constant of Si-NPA caused by the physisorption of gas molecules on the pillars, and the filling of the gas vapour in the voids. [ABSTRACT FROM AUTHOR]
- Published
- 2016
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