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Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar.
- Source :
-
Sensors (14248220) . Nov2016, Vol. 16 Issue 11, p1880. 8p. - Publication Year :
- 2016
-
Abstract
- Here, a silicon nanopillar array (Si-NPA)was fabricated. Itwas studied as a room-temperature organic vapour sensor, and the ethanol and acetone gas sensing properties were detected with I-V curves. I-V curves show that these Si-NPA gas sensors are sensitive to ethanol and acetone organic vapours. The turn-on threshold voltage is about 0.5 V and the operating voltage is 3 V. With 1% ethanol gas vapour, the response time is 5 s, and the recovery time is 15 s. Furthermore, an evaluation of the gas sensor stability for Si-NPA was performed. The gas stability results are acceptable for practical detections. These excellent sensing characteristics can mainly be attributed to the change of the overall dielectric constant of Si-NPA caused by the physisorption of gas molecules on the pillars, and the filling of the gas vapour in the voids. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 14248220
- Volume :
- 16
- Issue :
- 11
- Database :
- Academic Search Index
- Journal :
- Sensors (14248220)
- Publication Type :
- Academic Journal
- Accession number :
- 119760728
- Full Text :
- https://doi.org/10.3390/s16111880