Search

Your search keyword '"Greene, J.E."' showing total 460 results
Start Over Author "Greene, J.E." Publication Year Range Last 50 years
460 results on '"Greene, J.E."'

29. Raman scattering from epitaxial HfN layers grown on MgO(001)

Author

Stoehr, M., Seo, H.-S., Petrov, I., and Greene, J.E.

Subjects
Raman effect -- Observations, Epitaxy -- Research, Magnesium oxide -- Atomic properties, Hafnium -- Atomic properties, Physics
Abstract

Stoichiometric single-crystal HfN layers grown on MgO(001) are analyzed by Raman spectroscopy. The observed first-order Raman scattering, as well as the width of the gap between the first-order acoustic and optical modes is in good agreement with the calculated HfN phonon density of states.

Published
2006

37. Epitaxial NaCl structure delta-TaN(sub x)(001): Electronic transport properties, elastic modulus, and hardness versus N/Ta ratio

Author

Shin, C.-S., Greene, J.E., Gall, D., Oden, M., Kim Y.-W., Hultman, L., Desjardins, P., and Petrov, I.

Subjects
Nitrogen compounds -- Electric properties, Physics
Abstract

Single-crystal metastable Bl-NaCl-structure delta-TaN(sub x) layers with x ranging from 0.94 to 1.37 were grown on MgO(001) at T(sub s)=600degreeC by UHV magnetically unbalanced reactive magnetron sputter deposition. All layers exhibited an epitaxial cube-on-cube relationship with the substrate: (001)(sub TaN)//(001)(sub MgO) and [100](sub TaN)//[100](sub MgO)

Published
2001

39. Epitaxial Sc(sub 1-x) Ti(sub x)N(001): Optical and electronic transport properties

Author

Gall, D., Petrov, I., and Greene, J.E.

Subjects
Titanium compounds -- Optical properties, Titanium compounds -- Atomic properties, Scandium -- Optical properties, Scandium -- Atomic properties, Physics
Abstract

The results of an investigation of the growth and optoelectronic properties of epitaxial Sc(sub 1-x) Ti(sub x)N(001) is presented. The composition dependence of tau is dominated by alloy scattering and agrees well with measured optical results.

Published
2001

40. Ultra-highly doped Si(sub 1-x)Ge(sub x)(001): B gas-source molecular-beam epitaxy: Boron surface segregation and its effect on film growth kinetics

Author

Kim, H., Glass, G., Desjardins, P., and Greene, J.E.

Subjects
Epitaxy -- Research, Germanium -- Spectra, Germanium -- Electric properties, Silicon compounds -- Electric properties, Physics
Abstract

Si(sub1-x)Ge(sub x)(001) layers doped with B concentrations C(sub B) between 2 x 10(super 16) and 2 x 10 (super 21) cm(super -3) are grown on Si(001)2x1 at T(sub s) = 500-700 degree C by gas-source molecular-beam epitaxy (GS-MBE) from Si2H6, Ge2H6, and B2H6. TPD experiments show that the Ultra high B doping leads to the appearance of the replica peaks, corresponding to B- backbonded surface species.

Published
2001

41. Microstructure and Materials Properties of Understoichiometric TiBx Thin Films Grown by HiPIMS

Author

Thörnberg, Jimmy, primary, Palisaitis, Justinas, primary, Hellgren, Niklas, primary, Klimashin, Fedor, primary, Ghafoor, Naureen, primary, Zhirkov, Igor, primary, Azina, Clio, primary, Battaglia, Jean-Luc, primary, Kusiak, Andrzej, primary, Sorica, Maurico A., primary, Greene, J.E., primary, Hultman, Lars, primary, Petrov, Ivan, primary, Persson, Per, primary, and Rosen, johanna, primary

Published
2020
Full Text
View/download PDF

43. Epitaxial metastable Ge1-yCy (y=0.002) alloys grown on Ge(001) from hyperthermal beams: C incorporation and lattice sites

Author

D'Arcy-Gall, J., Desjardins, P., Petrov, I., Greene, J.E., Paultre, J-E., Masut, R.A., Gujrathi. S.C., and Roorda, S.

Subjects
Condensed matter -- Research, Microelectronics -- Research, Semiconductors -- Research, Physics
Abstract

A new study investigates C incorporation and lattice sites on Ge1-yCy alloy layers (y< or = 0.02) grown on Ge(001) at temperatures between 200 and 550 deg C.

Published
2000

47. Dense fully 111-textured TiN diffusion barriers: enhanced lifetime through microstructure control during layer growth

Author

Chun, J.-S., Petrov, I., and Greene, J.E.

Subjects
Integrated circuit fabrication -- Methods, Integrated circuits -- Design and construction, Low temperature engineering -- Research, Physics
Abstract

The growth of low-temperature fully dense polycrystalline TiN layers having complete 111 texture characteristics has been accomplished. The technique, which used reactive magnetron sputter deposition, produces TiN films that were sightly overstoichiometric with a N/Ti ratio of 1.02 + or - 0.03. The increase of the onset temperature fr interfacial reaction to 610 degrees Celsius in bilayers with fully dense TiN led to the demonstration of complete 111 preferred orientation.

Published
1999

48. W deposition and titanium fluoride formation during WF6 reduction by Ti: reaction path and mechanisms

Author

Ramanath, G., Greene, J.E., Carlsson, J.R.A., Allen, L.H., Hornback, V.C., and Allman, D.J.

Subjects
Thin films -- Research, Spectrum analysis -- Methods, Physics
Abstract

Response of WF6 with air-subjected 27- and 250-nm-thick films is analyzed by employing Rutherford backscattering spectroscopy, x-ray photoelectron spectroscopy, electron and x-ray diffraction, and scanning and high-resolution transmission electron microscopy. To gain insight into the delamination process, the microchemical changes and phase formation taking place in the Ti layer are investigated, particularly in regions of poor TiN coverage in high-aspect ratio device features where Ti is directly subjected to the incoming flux of WF6 molecules. The results are discussed.

Published
1999

49. Growth of poly- and single-crystal ScN on MgO(001): role of low-energy N(super +)(sub 2) irradiation in determining texture, microstructure evolution, and mechanical properties

Author

Gall, D., Petrov, I., Hellgren, N., Hultman, L., Sundgren, J.E., and Greene, J.E.

Subjects
Nitrides -- Research, Semiconductors, Effect of radiation on -- Research, Ion bombardment -- Research, Semiconductor films -- Research, Physics
Abstract

A study was undertaken to determine the effects of low energy N(super +)(sub 2) ion irradiation on microstructural and texture evolution, including the mechanical properties of polycrystalline and epitaxial scandium nitrogen (ScN) film layers grown on MgO(001) by ultrahigh vacuum reactive magnetron sputtering in pure N2 discharges. The elastic moduli and the hardness of ScN layers were characterized from nanoindentation measurements. It was observed that film hardness and elastic moduli increased together with the ion energy EN(super +)(sub 2) caused by in-plane compressive strain.

Published
1998

50. Multimessenger science opportunities with mHz gravitational waves

Author

Baker, J., Haiman, Z., Rossi, E.M., Berger, E., Brandt, N., Breedt, E., Breivik, K., Charisi, M., Derdzinski, A., D'Orazio, D.J., Ford, S., Greene, J.E., Hill, J.C., Holley-Bockelmann, K., Key, J.S., Kocsis, B., Kupfer, T., Madau, P., Marsh, T., McKernan, B., McWilliams, S.T., Natarajan, P., Nissanke, S., Noble, S., Phinney, E.S., Ramsay, G., Schnittman, J., Sesana, A., Shoemaker, D., Stone, N., Toonen, S., Trakhtenbrot, B., Vikhlinin, A., and Volonteri, M.

Published
2019

Catalog

Books, media, physical & digital resources
See catalog results