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1. Correction: Integrated silicon photonic MEMS

Author

Quack, Niels, Takabayashi, Alain Yuji, Sattari, Hamed, Edinger, Pierre, Jo, Gaehun, Bleiker, Simon J., Errando-Herranz, Carlos, Gylfason, Kristinn B., Niklaus, Frank, Khan, Umar, Verheyen, Peter, Mallik, Arun Kumar, Lee, Jun Su, Jezzini, Moises, Zand, Iman, Morrissey, Padraic, Antony, Cleitus, O’Brien, Peter, and Bogaerts, Wim

Published
2024
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2. Integrated silicon photonic MEMS

Author

Quack, Niels, Takabayashi, Alain Yuji, Sattari, Hamed, Edinger, Pierre, Jo, Gaehun, Bleiker, Simon J., Errando-Herranz, Carlos, Gylfason, Kristinn B., Niklaus, Frank, Khan, Umar, Verheyen, Peter, Mallik, Arun Kumar, Lee, Jun Su, Jezzini, Moises, Zand, Iman, Morrissey, Padraic, Antony, Cleitus, O’Brien, Peter, and Bogaerts, Wim

Published
2023
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4. Scaling programmable silicon photonics circuits

Author

Bogaerts, Wim, Nagarjun, K. P., Van Iseghem, Lukas, Chen, Xiangfeng, Deng, Hong, Zand, Iman, Zhang, Yu, Liu, Yichen, Takabayashi, Alain Yuji, Sattari, Hamed, Quack, Niels, Edinger, Pierre, Jo, Gaehun, Bleiker, Simon J., Gylfason, Kristinn, Niklaus, Frank, Mallik, Arun Kumar, Jezzini, Moises, Antony, Cleitus, Talli, Giuseppe, Verheyen, Peter, Beeckman, Jeroen, Khan, Umar, Bogaerts, Wim, Nagarjun, K. P., Van Iseghem, Lukas, Chen, Xiangfeng, Deng, Hong, Zand, Iman, Zhang, Yu, Liu, Yichen, Takabayashi, Alain Yuji, Sattari, Hamed, Quack, Niels, Edinger, Pierre, Jo, Gaehun, Bleiker, Simon J., Gylfason, Kristinn, Niklaus, Frank, Mallik, Arun Kumar, Jezzini, Moises, Antony, Cleitus, Talli, Giuseppe, Verheyen, Peter, Beeckman, Jeroen, and Khan, Umar

Abstract

We give an overview the progress of our work in silicon photonic programmable circuits, covering the techn stack from the photonic chip over the driver electronics, packaging technologies all the way to the sof layers. On the photonic side, we show our recent results in large-scale silicon photonic circuits with diff tuning technologies, including heaters, MEMS and liquid crystals, and their respective electronic driving sch We look into the scaling potential of these different technologies as the number of tunable elements in a ci increases. Finally, we elaborate on the software routines for routing and filter synthesis to enable the pho programmer., Part of ISBN 9781510659575QC 20231023

Published
2023
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5. Low power actuators for programmable photonic processors

Author

Khan, Umar, Zand, Iman, Van Iseghem, Lukas, Edinger, Pierre, Jo, Gaehun, Bleiker, Simon J., Takabayashi, Alain Yuji, Antony, Cleitus, Jezzini, Moises, Talli, Giuseppe, Sattari, Hamed, Lee, Jun Su, Mallik, Arun Kumar, Verheyen, Peter, Arce, Cristina Lerma, Garcia, Marco, Jonuzi, Tigers, Picavet, Ewout, Nagarjun, K. P., Watte, Jan, Quack, Niels, Niklaus, Frank, Gylfason, Kristinn, De Buysser, Klaartje, Beeckman, Jeroen, Bogaerts, Wim, Khan, Umar, Zand, Iman, Van Iseghem, Lukas, Edinger, Pierre, Jo, Gaehun, Bleiker, Simon J., Takabayashi, Alain Yuji, Antony, Cleitus, Jezzini, Moises, Talli, Giuseppe, Sattari, Hamed, Lee, Jun Su, Mallik, Arun Kumar, Verheyen, Peter, Arce, Cristina Lerma, Garcia, Marco, Jonuzi, Tigers, Picavet, Ewout, Nagarjun, K. P., Watte, Jan, Quack, Niels, Niklaus, Frank, Gylfason, Kristinn, De Buysser, Klaartje, Beeckman, Jeroen, and Bogaerts, Wim

Abstract

The demand for efficient actuators in photonics has peaked with increasing popularity for large-scale general-purpose programmable photonics circuits. We present our work to enhance an established silicon photonics platform with low-power micro-electromechanical (MEMS) and liquid crystal (LC) actuators to enable large-scale programmable photonic integrated circuits (PICs)., Part of ISBN 9781510659810QC 20230801

Published
2023
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6. Low-power actuators for programmable photonic processors

Author

Khan, Muhammad Umar, primary, Zand, Iman, additional, Van Iseghem, Lukas, additional, Edinger, Pierre, additional, Jo, Gaehun, additional, Bleiker, Simon J., additional, Takabayashi, Alain Y., additional, Antony, Cleitus, additional, Jezzini, Moises, additional, Talli, Giuseppe, additional, Sattari, Hamed, additional, Lee, Jun Su, additional, Mallik, Arun Kumar, additional, Verheyen, Peter, additional, Arce, Cristina Lerma, additional, Garcia Porcel, Marco, additional, Jonuzi, Tigers, additional, Picavet, Ewout, additional, Nagarjun, K. P., additional, Watté, Jan, additional, Quack, Niels, additional, Niklaus, Frank, additional, Gylfason, K. B., additional, De Buysser, Klaartje, additional, Beeckman, Jeroen, additional, and Bogaerts, Wim, additional

Published
2023
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7. Scaling programmable silicon photonics circuits

Author

Bogaerts, Wim, primary, Nagarjun, K.P., additional, Van Iseghem, Lukas, additional, Chen, Xiangfeng, additional, Deng, Hong, additional, Zand, Iman, additional, Zhang, Yu, additional, Liu, Yichen, additional, Takabayashi, Alain Yuji, additional, Sattari, Hamed, additional, Quack, Niels, additional, Edinger, Pierre, additional, Jo, Gaehun, additional, Bleiker, Simon, additional, Gylfason, Kristinn B., additional, Niklaus, Frank, additional, Mallik, Arun Kumar, additional, Jezzini, Moises, additional, Antony, Cleitus, additional, Talli, Giuseppe, additional, Verheyen, Peter, additional, Beeckman, Jeroen, additional, and Khan, Umar, additional

Published
2023
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8. MORPHIC: MEMS enhanced silicon photonics for programmable photonics

Author

Khan, Muhammad Umar, primary, Zand, Iman, additional, Edinger, Pierre, additional, Jo, Gaehun, additional, Bleiker, Simon J., additional, Takabayashi, Alain Yuji, additional, Antony, Cleitus, additional, Jezzini, Moises, additional, Talli, Giuseppe, additional, Sattari, Hamed, additional, Lee, Jun Su, additional, Malik, Arun Kumar, additional, Verheyen, Peter, additional, Kumar, Saurav, additional, Arce, Cristina Lerma, additional, Garcia, Marco, additional, Jonuzi, Tigers, additional, Watte, Jan, additional, Quack, Niels, additional, Niklaus, Frank, additional, Gylfason, Kristinn B., additional, and Bogaerts, Wim, additional

Published
2022
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9. Wafer-level hermetically sealed silicon photonic MEMS

Author

Jo, Gaehun, Edinger, Pierre, Bleiker, Simon J., Wang, Xiaojing, Takabayashi, Alain Yuji, Sattari, Hamed, Quack, Niels, Jezzini, Moises, Lee, Jun Su, Verheyen, Peter, Zand, Iman, Khan, Umar, Bogaerts, Wim, Stemme, Göran, Gylfason, Kristinn, Niklaus, Frank, Jo, Gaehun, Edinger, Pierre, Bleiker, Simon J., Wang, Xiaojing, Takabayashi, Alain Yuji, Sattari, Hamed, Quack, Niels, Jezzini, Moises, Lee, Jun Su, Verheyen, Peter, Zand, Iman, Khan, Umar, Bogaerts, Wim, Stemme, Göran, Gylfason, Kristinn, and Niklaus, Frank

Abstract

The emerging fields of silicon (Si) photonic micro–electromechanical systems (MEMS) and optomechanics enable a wide range of novel high-performance photonic devices with ultra-low power consumption, such as integrated optical MEMS phase shifters, tunable couplers, switches, and optomechanical resonators. In contrast to conventional SiO2-clad Si photonics, photonic MEMS and optomechanics have suspended and movable parts that need to be protected from environmental influence and contamination during operation. Wafer-level hermetic sealing can be a cost-efficient solution, but Si photonic MEMS that are hermetically sealed inside cavities with optical and electrical feedthroughs have not been demonstrated to date, to our knowledge. Here, we demonstrate wafer-level vacuum sealing of Si photonic MEMS inside cavities with ultra-thin caps featuring optical and electrical feedthroughs that connect the photonic MEMS on the inside to optical grating couplers and electrical bond pads on the outside. We used Si photonic MEMS devices built on foundry wafers from the iSiPP50G Si photonics platform of IMEC, Belgium. Vacuum confinement inside the sealed cavities was confirmed by an observed increase of the cutoff frequency of the electro-mechanical response of the encapsulated photonic MEMS phase shifters, due to reduction of air damping. The sealing caps are extremely thin, have a small footprint, and are compatible with subsequent flip-chip bonding onto interposers or printed circuit boards. Thus, our approach for sealing of integrated Si photonic MEMS clears a significant hurdle for their application in high-performance Si photonic circuits., QC 20220303, MORPHIC, AEOLUS, ULISSES, ZeroAMP

Published
2022
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10. Wafer-level Hermetic Sealing of Silicon Photonic MEMS by Direct Metal-to-Metal Bonding

Author

Jo, Gaehun, Edinger, Pierre, Bleiker, Simon J., Wang, Xiaojing, Takabayashi, Alain Yuji, Sattari, Hamed, Quack, Niels, Jezzini, Moises, Lee, Jun Su, Malik, Arun Kumar, Verheyen, Peter, Zand, Iman, Khan, Umar, Bogaerts, Wim, Stemme, Göran, Gylfason, Kristinn, Niklaus, Frank, Jo, Gaehun, Edinger, Pierre, Bleiker, Simon J., Wang, Xiaojing, Takabayashi, Alain Yuji, Sattari, Hamed, Quack, Niels, Jezzini, Moises, Lee, Jun Su, Malik, Arun Kumar, Verheyen, Peter, Zand, Iman, Khan, Umar, Bogaerts, Wim, Stemme, Göran, Gylfason, Kristinn, and Niklaus, Frank

Abstract

The field of silicon (Si) photonic micro-electromechanical system (MEMS) for photonic integrated circuits (PICs) has evolved rapidly. Thanks to the ultra-low power consumption of Si photonic MEMS, it enables a wide range of high-performance photonic devices such as integrated optical MEMS phase shifters, tunable couplers and switches. However, photonic MEMS have suspended and movable parts which need to be protected from environmental influences, such as exposure to dust and humidity. Therefore, a packaging solution is needed for reliable operation over long periods. Here, we demonstrate wafer-level vacuum sealing of Si photonic MEMS inside cavities with ultra-thin Si caps., QC 20221214, MORPHIC (EU, H2020), ZeroAMP (EU, H2020), ULISSES (EU, H2020), AEOLUS (EU, H2020)

Published
2022

11. MORPHIC : MEMS enhanced silicon photonics for programmable photonics

Author

Khan, Umar, Zand, Iman, Edinger, Pierre, Jo, Gaehun, Bleiker, Simon J., Takabayashi, Alain Yuji, Antony, Cleitus, Jezzini, Moises, Talli, Giuseppe, Sattari, Hamed, Lee, Jun Su, Mallik, Arun Kumar, Verheyen, Peter, Kumar, Saurav, Arce, Cristina Lerma, Garcia, Marco, Jonuzi, Tigers, Watte, Jan, Quack, Niels, Niklaus, Frank, Gylfason, Kristinn, Bogaerts, Wim, Khan, Umar, Zand, Iman, Edinger, Pierre, Jo, Gaehun, Bleiker, Simon J., Takabayashi, Alain Yuji, Antony, Cleitus, Jezzini, Moises, Talli, Giuseppe, Sattari, Hamed, Lee, Jun Su, Mallik, Arun Kumar, Verheyen, Peter, Kumar, Saurav, Arce, Cristina Lerma, Garcia, Marco, Jonuzi, Tigers, Watte, Jan, Quack, Niels, Niklaus, Frank, Gylfason, Kristinn, and Bogaerts, Wim

Abstract

We present our work in the European project MORPHIC to extend an established silicon photonics platform with low-power and non-volatile micro-electromechanical (MEMS) actuators to demonstrate large-scale programmable photonic integrated circuits (PICs)., Part of proceedings: ISBN 978-1-5106-5173-9; 978-1-5106-5172-2, QC 20220906

Published
2022
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12. Programmable silicon photonic circuits powered by MEMS

Author

Bogaerts, Wim, Takabayashi, Alain Yuji, Edinger, Pierre, Jo, Gaehun, Zand, Iman, Verheyen, Peter, Jezzini, Moises, Sattari, Hamed, Talli, Giuseppe, Antony, Cleitus, Saei, Mehrdad, Arce, Cristina Lerma, Lee, Jun Su, Mallik, Arun Kumar, Kumar, Saurav, Garcia, Marco, Jonuzi, Tigers, Gylfason, Kristinn, Quack, Niels, Niklaus, Frank, Khan, Umar, Bogaerts, Wim, Takabayashi, Alain Yuji, Edinger, Pierre, Jo, Gaehun, Zand, Iman, Verheyen, Peter, Jezzini, Moises, Sattari, Hamed, Talli, Giuseppe, Antony, Cleitus, Saei, Mehrdad, Arce, Cristina Lerma, Lee, Jun Su, Mallik, Arun Kumar, Kumar, Saurav, Garcia, Marco, Jonuzi, Tigers, Gylfason, Kristinn, Quack, Niels, Niklaus, Frank, and Khan, Umar

Abstract

We present our work to extend silicon photonics with MEMS actuators to enable low-power, large scale programmable photonic circuits. For this, we start from the existing iSiPP50G silicon photonics platform of IMEC, where we add free-standing movable waveguides using a few post-processing steps. This allows us to implement phase shifters and tunable couplers using electrostatically actuated MEMS, while at the same time maintaining all the original functionality of the silicon photonics platform. The MEMS devices are protected using a wafer-level sealing approach and interfaced with custom multi-channel driver and readout electronics., Part of proceedings: ISBN 978-1-5106-4881-4QC 20220818

Published
2022
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13. Programmable Photonic Circuits powered by Silicon Photonic MEMS Technology

Author

Bogaerts, Wim, Takabayashi, Alain Yuji, Edinger, Pierre, Jo, Gaehun, Mallik, Arun Kumar, Antony, Cleituis, Zand, Iman, Jonuzi, Tigers, Chen, Xiangfeng, Sattari, Hamed, Lee, Junsu, Jezzini, Moises A., Talli, Giuseppe, Arce, Cristina Lerma, Kumar, Saurav, Verheyen, Peter, Quack, Niels, Gylfason, Kristinn, Niklaus, Frank, Khan, Umar, Bogaerts, Wim, Takabayashi, Alain Yuji, Edinger, Pierre, Jo, Gaehun, Mallik, Arun Kumar, Antony, Cleituis, Zand, Iman, Jonuzi, Tigers, Chen, Xiangfeng, Sattari, Hamed, Lee, Junsu, Jezzini, Moises A., Talli, Giuseppe, Arce, Cristina Lerma, Kumar, Saurav, Verheyen, Peter, Quack, Niels, Gylfason, Kristinn, Niklaus, Frank, and Khan, Umar

Abstract

Programmable photonic chips allow flexible reconfiguration of on-chip optical connections, controlled through electronics and software. We will present the recent progress of such complex photonic circuits powered by silicon photonic MEMS actuators., Part of ISBN 9781557528209QC 20230801

Published
2022

14. Multi-channel 400 kHz 840nm swept-source OCT system based on a photonic-electronic integrated circuit

Author

Richter, Stefan, primary, Krause, Arno M., additional, Rank, Elisabet A., additional, Nevlacsil, Stefan, additional, Kempe, Michael, additional, Muellner, Paul, additional, Hainberger, Rainer, additional, Gloor, Stefan, additional, Duelk, Marcus, additional, Verwaal, Nanko, additional, Klein, Leonhard, additional, Sagmeister, Martin, additional, Meinhardt, Gerald, additional, Kraft, Jochen, additional, Jezzini, Moises, additional, Carey, Daniel, additional, and Drexler, Wolfgang, additional

Published
2022
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15. In vivo retinal swept source optical coherence tomography using photonic integrated circuits centered at 840 nm

Author

Rank, Elisabet A., primary, Nevlacsil, Stefan, additional, Richter, Stefan, additional, Krause, Arno, additional, Kempe, Michael, additional, Muellner, Paul, additional, Hainberger, Rainer, additional, Gloor, Stefan, additional, Duelk, Marcus, additional, Verwaal, Nanko, additional, Klein, Leonhard, additional, Sagmeister, Martin, additional, Rist, Desiree, additional, Meinhardt, Gerald, additional, Kraft, Jochen, additional, Bundalo, Ivan-Lazar, additional, Jezzini, Moises, additional, Salas, Matthias, additional, Leitgeb, Rainer A., additional, and Drexler, Wolfgang, additional

Published
2022
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16. Interfacing photonic building blocks for silicon nitride photonic-integrated circuit-based sensing devices

Author

Hainberger, Rainer, primary, Muellner, Paul, additional, Nevlacsil, Stefan, additional, Eggeling, Moritz, additional, Vogelbacher, Florian, additional, Sagmeister, Martin, additional, Meinhardt, Gerald, additional, Rohracher, Karl, additional, Jessenig, Stefan, additional, Rist, Desiree, additional, Morecroft, Deborah, additional, Kraft, Jochen, additional, Verwaal, Nanko, additional, Klein, Leonhard, additional, Voelker, Matthias, additional, Jezzini, Moises, additional, Morrissey, Padraic, additional, O'Brien, Peter, additional, Gloor, Stefan, additional, Duelk, Marcus, additional, Richter, Stefan, additional, Kempe, Michael, additional, Rank, Elisabet, additional, and Drexler, Wolfgang, additional

Published
2022
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17. Programmable silicon photonic circuits powered by MEMS

Author

Bogaerts, Wim, primary, Takabayashi, Alain Yuji, additional, Edinger, Pierre, additional, Jo, Gaehun, additional, Zand, Iman, additional, Verheyen, Peter, additional, Jezzini, Moises, additional, Sattari, Hamed, additional, Talli, Giuseppe, additional, Antony, Cleitus, additional, Saei, Mehrdad, additional, Lerma Arce, Cristina, additional, Lee, Junsu, additional, Mallik, Arun Kumar, additional, Kumar, Saurav, additional, Garcia, Marco, additional, Jonuzi, Tigers, additional, Gylfason, Kristinn B., additional, Quack, Niels, additional, Niklaus, Frank, additional, and Khan, Umar, additional

Published
2022
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18. Silicon photonic MEMS for efficient scaling of programmable integrated optics

Author

Quack, Niels, Takabayashi, Alain, Sattari, Hamed, Edinger, Pierre, Jo, Gaehun, Bleiker, Simon J., Errando-Herranz, Carlos, Gylfason, Kristinn B., Niklaus, Frank, Khan, Umar, Verheyen, Peter, Mallik, Arun Kumar, Lee, Jun Su, Jezzini, Moises, Talli, Giuseppe, Antony, Cleitus, O'Brien, Peter, and Bogaerts, Wim

Subjects
Technology and Engineering
Published
2022

19. Wafer-level hermetically sealed silicon photonic MEMS

Author

Jo, Gaehun, primary, Edinger, Pierre, additional, Bleiker, Simon J., additional, Wang, Xiaojing, additional, Takabayashi, Alain Yuji, additional, Sattari, Hamed, additional, Quack, Niels, additional, Jezzini, Moises, additional, Lee, Jun Su, additional, Verheyen, Peter, additional, Zand, Iman, additional, Khan, Umar, additional, Bogaerts, Wim, additional, Stemme, Göran, additional, Gylfason, Kristinn B., additional, and Niklaus, Frank, additional

Published
2022
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20. Programmable Photonic Circuits powered by Silicon Photonic MEMS Technology

Author

Bogaerts, Wim, primary, Takabayashi, Alain Yuji, additional, Edinger, Pierre, additional, Jo, Gaehun, additional, Mallik, Arun Kumar, additional, Antony, Cleituis, additional, Zand, Iman, additional, Jonuzi, Tigers, additional, Chen, Xiangfeng, additional, Sattari, Hamed, additional, Lee, Junsu, additional, Jezzini, Moises A., additional, Talli, Giuseppe, additional, Arce, Cristina Lerma, additional, Kumar, Saurav, additional, Verheyen, Peter, additional, Quack, Niels, additional, Gylfason, Kristinn B., additional, Niklaus, Frank, additional, and Khan, Umar, additional

Published
2022
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21. Low-power actuators for programmable photonic processors

Author

Jalali, Bahram, Kitayama, Ken-ichi, Khan, Umar, Zand, Iman, Van Iseghem, Lukas, Edinger, Pierre, Jo, Gaehun, Bleiker, Simon J., Takabayashi, Alain Yuji, Antony, Cleitus, Jezzini, Moises, Talli, Giuseppe, Sattari, Hamed, Lee, Jun Su, Mallik, Arun Kumar, Verheyen, Peter, Arce, Cristina Lerma, Garcia, Marco, Jonuzi, Tigers, Picavet, Ewout, Nagarjun, K. P., Watté, Jan, Quack, Niels, Niklaus, Frank, Gylfason, Kristinn B., De Buysser, Klaartje, Beeckman, Jeroen, and Bogaerts, Wim

Published
2023
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22. MORPHIC: MEMS enhanced silicon photonics for programmable photonics

Author

Baets, Roel G., O'Brien, Peter, Vivien, Laurent, Khan, Umar, Zand, Iman, Edinger, Pierre, Jo, Gaehun, Bleiker, Simon J., Takabayashi, Alain Yuji, Antony, Cleitus, Jezzini, Moises, Talli, Giuseppe, Sattari, Hamed, Lee, Jun Su, Mallik, Arun Kumar, Verheyen, Peter, Kumar, Saurav, Arce, Cristina Lerma, Garcia, Marco, Jonuzi, Tigers, Watte, Jan, Quack, Niels, Niklaus, Frank, Gylfason, Kristinn B., and Bogaerts, Wim

Published
2022
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23. Scaling programmable silicon photonics circuits

Author

Reed, Graham T., Knights, Andrew P., Bogaerts, Wim, Nagarjun, K. P., Van Iseghem, Lukas, Chen, Xiangfeng, Deng, Hong, Zand, Iman, Zhang, Yu, Liu, Yichen, Takabayashi, Alain Yuji, Sattari, Hamed, Quack, Niels, Edinger, Pierre, Jo, Gaehun, Bleiker, Simon, Gylfason, Kristinn B., Niklaus, Frank, Mallik, Arun Kumar, Jezzini, Moises, Antony, Cleitus, Talli, Giuseppe, Verheyen, Peter, Beeckman, Jeroen, and Khan, Umar

Published
2023
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24. Programmable silicon photonic circuits powered by MEMS

Author

He, Sailing, Vivien, Laurent, Bogaerts, Wim, Takabayashi, Alain Yuji, Edinger, Pierre, Jo, Gaehun, Zand, Iman, Verheyen, Peter, Jezzini, Moises, Sattari, Hamed, Talli, Giuseppe, Antony, Cleitus, Saei, Mehrdad, Lerma Arce, Cristina, Lee, Jun Su, Mallik, Arun Kumar, Kumar, Saurav, Garcia, Marco, Jonuzi, Tigers, Gylfason, Kristinn B., Quack, Niels, Niklaus, Frank, and Khan, Umar

Published
2022
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