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Silicon photonic MEMS for efficient scaling of programmable integrated optics

Authors :
Quack, Niels
Takabayashi, Alain
Sattari, Hamed
Edinger, Pierre
Jo, Gaehun
Bleiker, Simon J.
Errando-Herranz, Carlos
Gylfason, Kristinn B.
Niklaus, Frank
Khan, Umar
Verheyen, Peter
Mallik, Arun Kumar
Lee, Jun Su
Jezzini, Moises
Talli, Giuseppe
Antony, Cleitus
O'Brien, Peter
Bogaerts, Wim
Source :
Micro and Nano Engineering Conference, Abstracts
Publication Year :
2022

Subjects

Subjects :
Technology and Engineering

Details

Language :
English
Database :
OpenAIRE
Journal :
Micro and Nano Engineering Conference, Abstracts
Accession number :
edsair.od.......330..f20f74b091d449470beb07908d14a459

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Authors Abstract Subjects Details