1. High-Tolerance Grating Couplers for Vertical Backside Coupling
- Author
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Jui-Hung Chen, Arthur D. Bouamra, Chia-Ling Wu, Andrea Fiore, and Shuo-Yen Tseng
- Subjects
grating coupler ,optical fiber sensors ,photonic integrated circuits ,Technology ,Engineering (General). Civil engineering (General) ,TA1-2040 ,Biology (General) ,QH301-705.5 ,Physics ,QC1-999 ,Chemistry ,QD1-999 - Abstract
To facilitate convenient packaging of photonic integrated circuits on a fiber tip, a silicon grating coupler designed for vertical backside coupling has been developed. In order to comply with foundry capabilities and streamline the fabrication processes, the grating coupler features a minimum feature size larger than 200 nm and a single-etched structure on silicon. By inverse design-based optimization, the vertical backside grating coupler achieves a coupling efficiency of nearly 40% (−3.97 dB), while showcasing high fabrication and misalignment tolerance.
- Published
- 2024
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