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Integrated optomechanical sensing for semiconductor metrology

Authors :
Vadim Pogoretskiy
Andrea Fiore
Maurangelo Petruzzella
F. W. M. van Otten
Tianran Liu
R.W. van der Heijden
Francesco Pagliano
I. Sersic Vollenbroek
H. Sadeghian
Yuqing Jiao
Abbas Mohtashami
P.J. van Veldhoven
Federico Galeotti
Gustav Lindgren
Source :
Conference on Lasers and Electro-Optics.
Publication Year :
2021
Publisher :
Optica Publishing Group, 2021.

Abstract

In this talk we will present recent process on the integration of nano-opto-electro-mechanical sensors with photonic circuits and optical read-out, showing a route towards fully-integrated optical sensing.

Subjects

Subjects :
Materials science
business.industry
ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION
Process (computing)
Semiconductor laser theory
Metrology
Semiconductor
Hardware_GENERAL
Optical sensing
Hardware_INTEGRATEDCIRCUITS
Optoelectronics
Integrated optics
Photonics
business
Electronic circuit

Details

Database :
OpenAIRE
Journal :
Conference on Lasers and Electro-Optics
Accession number :
edsair.doi...........8f0adf8c2d3d77738d03749e04fdd089
Full Text :
https://doi.org/10.1364/cleo_at.2021.jtu1i.4
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