1. Deformation and Viscouse Flow in Nano-Imprinting
- Author
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RUSSIAN ACADEMY OF SCIENCES CHERNOGOLOVKA (RUSSIA) INST OF MICROELECTRONICS TECHNOLOGY, Chukalina, M. V., Matveev, V. N., Sirotkin, V. V., Svintsov, A. A., Zaitsev, S. SI., RUSSIAN ACADEMY OF SCIENCES CHERNOGOLOVKA (RUSSIA) INST OF MICROELECTRONICS TECHNOLOGY, Chukalina, M. V., Matveev, V. N., Sirotkin, V. V., Svintsov, A. A., and Zaitsev, S. SI.
- Abstract
The paper is concentrated on the theoretical consideration of imprinting process and of polymer flow during embossing of the master. Another activity was related to development of experimental techniques for performing imprinting., Pres: 8th Int Symp Nanostructures: Physics and Technology, St Petersburg, Russia, 19-23 Jun 2000, p121-124. This article is from ADA407315 Nanostructures: Physics and Technology International Symposium (8th) Held in St. Petersburg, Russia on June 19-23, 2000 Proceedings
- Published
- 2000