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Deformation and Viscouse Flow in Nano-Imprinting

Authors :
RUSSIAN ACADEMY OF SCIENCES CHERNOGOLOVKA (RUSSIA) INST OF MICROELECTRONICS TECHNOLOGY
Chukalina, M. V.
Matveev, V. N.
Sirotkin, V. V.
Svintsov, A. A.
Zaitsev, S. SI.
RUSSIAN ACADEMY OF SCIENCES CHERNOGOLOVKA (RUSSIA) INST OF MICROELECTRONICS TECHNOLOGY
Chukalina, M. V.
Matveev, V. N.
Sirotkin, V. V.
Svintsov, A. A.
Zaitsev, S. SI.
Source :
DTIC
Publication Year :
2000

Abstract

The paper is concentrated on the theoretical consideration of imprinting process and of polymer flow during embossing of the master. Another activity was related to development of experimental techniques for performing imprinting.<br />Pres: 8th Int Symp Nanostructures: Physics and Technology, St Petersburg, Russia, 19-23 Jun 2000, p121-124. This article is from ADA407315 Nanostructures: Physics and Technology International Symposium (8th) Held in St. Petersburg, Russia on June 19-23, 2000 Proceedings

Details

Database :
OAIster
Journal :
DTIC
Notes :
text/html, English
Publication Type :
Electronic Resource
Accession number :
edsoai.ocn834240607
Document Type :
Electronic Resource