Author: "Minamiguchi S" / Language: undetermined - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Minamiguchi S"' showing total 2 results

Start Over Author "Minamiguchi S" Language undetermined

2 results on '"Minamiguchi S"'

1. Development of residual layer thickness measurement system for nano-imprint lithography based on near-field optics

Author: Satoru Takahashi, Nagao, T., Minamiguchi, S., Usuki, S., and Takamasu, K.

2. Thin film thickness measurement for evaluation of residual layer of nano-imprint lithography using near-field optics

Author: Minamiguchi, S., Usuki, S., Takahashi, S., and Kiyoshi Takamasu

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