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IntroductionPain is a prominent contributor to negative personal and social outcomes, including increased disability and mortality, in many rheumatic diseases. In the Biopsychosocial model of chronic pain, psychological and social factors share roles with the biology of the injury in determining each patient’s pain and suffering. The current study explored factors associated with clinical pain intensity and interference among patients with chronic secondary musculoskeletal pain in rheumatic diseases.MethodsIn total, 220 patients experiencing chronic secondary musculoskeletal pain participated. Biological factors (age, biological sex, pain condition, pain duration, pain sensitivity, and comorbidity), socio-economic factors, psychological factors (pain catastrophizing and depressive symptoms), and pain intensity and interference were measured. Descriptive, multivariable linear regression and partial correlation analyses were conducted. Subgroup analysis by sex was conducted to examine differences in how different factors affect the pain experience.ResultsThe mean age of the participants was 52.3 years (SD = 12.07) and ranged from 22 to 78. Average pain intensity was 3.01 (0–10 scale) and average total pain interference score was 21.07 (0–70 scale). Partial correlation found positive correlations between pain intensity and interference with depression (intensity: R = 0.224; p = 0.0011; interference: R = 0.351; p R = 0.520; p R = 0.464; p β = −0.249, p = 0.032) and pain catastrophizing (R = 0.480, p R = 0.519; p R = 0.536, p R = 0.228, p = 0.0077) were independently associated with pain intensity. Age (β = −0.251, p = 0.042) and pain catastrophizing (R = 0.609, p R = 0.439, p R = 0.403, p R = 0.455; p DiscussionIn this study, females were more directly affected by depressive symptoms than males, regarding pain intensity and interference. Pain catastrophizing was a significant factor influencing chronic pain for both males and females. Based on these findings, a sex-specific approach to the Biopsychosocial model should be considered in understanding and managing pain among Asians with chronic secondary musculoskeletal pain.

International audience; IIn this study, we designed a new structure based on Pd-decorated TiN-coated SnO2 nanowires (NWs) for the selective detection of H2 gas. Initially, SnO2 NWs were prepared by a simple vapor-liquid-solid growth method. Then, atomic layer deposition (ALD) was used to grow a continuous TiN layer and, subsequently, Pd nanoparticles on the NW networks. The TiN thickness was precisely set to 0.5, 1, 2, and 5 nm, while the Pd loading was adjusted by varying the number of ALD cycles (25 to 200 cycles). Various characterization techniques revealed the amorphous nature of TiN, a homogeneous dispersion of Pd NPs and the uniform morphology and single crystallinity of the SnO2 NWs. H2 gas sensing studies revealed that the sensor with a TiN thickness of 1 nm exhibited the highest response. Pd decoration further improved the response to H2 gas. Hence, the Pd-decorated gas sensor with a 1 nm-thick TiN layer showed the highest H2 sensing performance at 250 °C among all gas sensors. Due to the unique chemical reaction between Pd and hydrogen, the fabricated sensor shows excellent performance in detecting hydrogen gas. The underlying sensing mechanism is discussed in detail. The optimized sensor has a sensitivity of 8.18 for hydrogen gas, which is four times higher than that of other gas species, showing that it is suitable for detecting hydrogen gas. We believe that this new design is a highly valuable gas sensor for the real application of H2 monitoring with high selectivity.

We report the analysis of microlensing event OGLE-2017-BLG-1038, observed by the Optical Gravitational Lensing Experiment, Korean Microlensing Telescope Network, and Spitzer telescopes. The event is caused by a giant source star in the Galactic Bulge passing over a large resonant binary lens caustic. The availability of space-based data allows the full set of physical parameters to be calculated. However, there exists an eightfold degeneracy in the parallax measurement. The four best solutions correspond to very-low-mass binaries near ($M_1 = 170^{+40}_{-50} M_J$ and $M_2 = 110^{+20}_{-30} M_J$), or well below ($M_1 = 22.5^{+0.7}_{-0.4} M_J$ and $M_2 = 13.3^{+0.4}_{-0.3} M_J$) the boundary between stars and brown dwarfs. A conventional analysis, with scaled uncertainties for Spitzer data, implies a very-low-mass brown dwarf binary lens at a distance of 2 kpc. Compensating for systematic Spitzer errors using a Gaussian process model suggests that a higher mass M-dwarf binary at 6 kpc is equally likely. A Bayesian comparison based on a galactic model favors the larger-mass solutions. We demonstrate how this degeneracy can be resolved within the next ten years through infrared adaptive-optics imaging with a 40 m class telescope., Comment: 20 pages, 11 figures, 4 tables

We inspect the microlensing data of the KMTNet survey collected during the 2018--2020 seasons in order to find lensing events produced by binaries with brown-dwarf companions. In order to pick out binary-lens events with candidate BD lens companions, we conduct systematic analyses of all anomalous lensing events observed during the seasons. By applying the selection criterion with mass ratio between the lens components of $0.03\lesssim q\lesssim 0.1$, we identify four binary-lens events with candidate BD companions, including KMT-2018-BLG-0321, KMT-2018-BLG-0885, KMT-2019-BLG-0297, and KMT-2019-BLG-0335. For the individual events, we present the interpretations of the lens systems and measure the observables that can constrain the physical lens parameters. The masses of the lens companions estimated from the Bayesian analyses based on the measured observables indicate that the probabilities for the lens companions to be in the brown-dwarf mass regime are high: 59\%, 68\%, 66\%, and 66\% for the four events respectively., Comment: 10 pages, 8 figures

A synthesis of empirical research that has assessed the link between gambling-like activities (GLAs) and problem gambling and gaming behaviours. For the purpose of this project, GLAs are defined as video game loot boxes, eSports betting, and skin betting

This is a preregistration for a study examining attentional bias for financial words as a function of financially focused self-concept among people who gamble.

Introduction: Text messaging is the primary form of technology-mediated interpersonal contact and the most carried out activity on cell phones. Despite its advantages, text messaging is not exempt from risks. The present paper aimed to expand the psychometric properties of the Self-perception of Text-message Dependency Scale (STDS) in a sample of adult internet users. Methods: In this cross-sectional study, we recruited a convenience sample of Brazilian internet users aged 18 and over. A total of 1,642 (Mage =38.6, SD =13.5; 73% female) participants completed the STDS, the Mobile Phone Problem Usage Scale-27 (MPPUS), and the Problematic Internet Use Questionnaire – Short form – 9 questionnaires (PIUQ-SF-9). Results: Multigroup confirmatory factor analysis showed measurement invariance for gender and age. Internal consistency was high when accessed by both McDonalds' Omega and Cronbach's alpha. Network Analysis provided insights into the core symptoms of problematic text messaging use. Convergent validity of the STDS was demonstrated by the scale’s correlation with MPPUS and PIUQ-SF-9. Conclusion: Due to its expanded psychometric properties and brevity, the STDS can be used in more comprehensive investigations about other excessive technology-related behaviors, such as problematic smartphone and internet use, allowing a better understanding of the mechanisms involved in problematic technology use.

A synthesis of empirical research that has assessed the link between gambling-like activities (i.e., loot boxes, eSports engagement, skin betting, and token wagering) and gambling and video gaming behaviours This is an updated version of a withdrawn registration that was originally submitted in May 2021 (10.17605/OSF.IO/RU8XQ). In our original registration, we noted that any changes to our protocol would be submitted to OSF. As of creating this new registration, it is not possible to make modifications to files uploaded to an already submitted registration. Consequently, the original registration was withdrawn so that an updated registration with new files could be made available.

Systemic lupus erythematosus (SLE) affects women more frequently than men, similar to the female predilection for other autoimmune diseases. Moreover, male patients with SLE exhibit different clinical features than female patients. Sex-associated differences in SLE required special considerations for disease management such as during pregnancy or hormone replacement therapy (HRT). Sex hormones, namely, estrogen and testosterone, are known to affect immune responses and autoimmunity. While estrogen and progesterone promote type I immune response, and testosterone enhances T-helper 1 response. Sex hormones also influence Toll-like receptor pathways, and estrogen receptor signaling is involved in the activation and tolerance of immune cells. Further, the clinical features of SLE vary according to hormonal changes in female patients. Alterations in sex hormones during pregnancy can alter the disease activity of SLE, which is associated with pregnancy outcomes. Additionally, HRT may change SLE status. Sex hormones affect the pathogenesis, clinical features, and management of SLE; thus, understanding the occurrence and exacerbation of disease caused by sex hormones is necessary to improve its management.

본 연구는 학교 밖 청소년의 사회적 낙인감과 이후 초기 성인기의 우울증상 예방을 궁극적 목표로, 학교 밖 청소년이 지각한 부모지지와 또래지지, 사회적 낙인감이 이후 초기 성인기의 우울증상에 미치는 영향과 더불어 사회적 낙인감의 매개효과를 검증하였다. 본 연구는 한국청소년정책연구원의 학업중단청소년패널 1차~5차년도 조사에 참여한 776명(남아 444명)의 청소년을 분석 대상에 포함하였으며, 자료를 분석하기 위해 기술통계분석을 실시한 후 경로모형을 적용하였다. 연구결과, 첫째, 학업중단 초기 부모지지와 또래지지는 학업중단 2년 후 경험하는 사회적 낙인감에 직접적으로 부적인 영향을 미쳤으며, 이는 성인 초기 우울증상에 직접적으로 정적인 영향을 미쳤다. 둘째, 학업중단 초기 부모지지와 또래지지는 성인 초기 우울증상에 직접적인 영향을 미치지는 않았으나 학업중단 2년 후 경험한 사회적 낙인감을 매개로 하여 성인 초기 우울증상에 간접적인 영향을 미치는 것으로 나타났다. 본 연구의 결과는 학업중단 이후 학교 밖 청소년의 적응을 지원하기 위한 프로그램을 개발함에 있어 중요한 기초 자료를 제공할 것으로 기대된다.

Supplemental material, sj-docx-2-jbd-10.1177_01650254221132774 for Cross-cultural measurement of social withdrawal motivations across 10 countries using multiple-group factor analysis alignment by Julie C. Bowker, Stefania Sette, Laura L. Ooi, Sevgi Bayram-Ozdemir, Nora Braathu, Evalill Bølstad, Karen Noel Castillo, Aysun Dogan, Carolina Greco, Shanmukh Kamble, Hyoun K. Kim, Yunhee Kim, Junsheng Liu, Wonjung Oh, Ronald M. Rapee, Quincy J. J. Wong, Bowen Xiao, Antonio Zuffianò and Robert J. Coplan in International Journal of Behavioral Development

Supplemental material, sj-docx-1-jbd-10.1177_01650254221132774 for Cross-cultural measurement of social withdrawal motivations across 10 countries using multiple-group factor analysis alignment by Julie C. Bowker, Stefania Sette, Laura L. Ooi, Sevgi Bayram-Ozdemir, Nora Braathu, Evalill Bølstad, Karen Noel Castillo, Aysun Dogan, Carolina Greco, Shanmukh Kamble, Hyoun K. Kim, Yunhee Kim, Junsheng Liu, Wonjung Oh, Ronald M. Rapee, Quincy J. J. Wong, Bowen Xiao, Antonio Zuffianò and Robert J. Coplan in International Journal of Behavioral Development

We complete the analysis of all 2018 prime-field microlensing planets identified by the KMTNet AnomalyFinder. Among the 10 previously unpublished events with clear planetary solutions, 8 are either unambiguously planetary or are very likely to be planetary in nature: OGLE-2018-BLG-1126, KMT-2018-BLG-2004, OGLE-2018-BLG-1647, OGLE-2018-BLG-1367, OGLE-2018-BLG-1544, OGLE-2018-BLG-0932, OGLE-2018-BLG-1212, and KMT-2018-BLG-2718. Combined with the 4 previously published new AnomalyFinder events and 12 previously published (or in preparation) planets that were discovered by eye, thismakes a total of 24 2018 prime-field planets discovered or recovered by AnomalyFinder. Together with a paper in preparation on 2018 sub-prime planets, this work lays the basis for the first statistical analysis of the planet mass-ratio function based on planets identified in KMTNet data. By systematically applying the heuristic analysis of Hwang et al. (2022) to each event, we identify the small modification in their formalism that is needed to unify the so-called close/wide and inner/outer degeneracies, as conjectured by, Comment: 22 pages, 14 tables, 15 figures

Supplemental material, sj-docx-2-jbd-10.1177_01650254221132774 for Cross-cultural measurement of social withdrawal motivations across 10 countries using multiple-group factor analysis alignment by Julie C. Bowker, Stefania Sette, Laura L. Ooi, Sevgi Bayram-Ozdemir, Nora Braathu, Evalill Bølstad, Karen Noel Castillo, Aysun Dogan, Carolina Greco, Shanmukh Kamble, Hyoun K. Kim, Yunhee Kim, Junsheng Liu, Wonjung Oh, Ronald M. Rapee, Quincy J. J. Wong, Bowen Xiao, Antonio Zuffianò and Robert J. Coplan in International Journal of Behavioral Development

We continue our program of publishing all planets (and possible planets) found by eye in 2021 Korea Microlensing Telescope Network (KMTNet) online data. We present four planets (KMT-2021-BLG-0712Lb, KMT-2021-BLG-0909Lb, KMT-2021-BLG-2478Lb, and KMT-2021-BLG-1105Lb), with planet-to-host mass ratios in the range − 3.3 ≲ log q ≲ − 2.2 . This brings the total of secure, by-eye, 2021 KMTNet planets to 16, including 8 in this series. The by-eye sample is an important check of the completeness of semiautomated detections, which are the basis for statistical analyses. One of the planets, KMT-2021-BLG-1105Lb, is blended with a relatively bright (I, V) ∼ (18.9, 21.6) star that may be the host. This could be verified immediately by high-resolution imaging. If so, the host is an early G dwarf, and the planet could be characterized by radial velocity observations on 30 m class telescopes.

본 연구는 만 4세 때 어머니의 양육스트레스와 만 7세 때 초등학교 1학년 시기 아동의 학업수행능력 간의 관계에서 만 5세 때 가정환경자극과 만 6세 때 학교준비도의 순차적 이중매개효과를 검증하는데 목적이 있다. 연구대상은 아동 2,128명(여아 1,046명)과 아동의 어머니로 육아정책연구소의 한국아동패널(Panel Study on Korean Children, PSKC) 중 어머니 및 교사에 의해 평정된 만 0세부터 만 7세까지의 1-8차년도(2008-2015년) 자료를 사용하였고, 연구모형은 경로분석을 사용하여 분석하였다. 연구결과, 첫째, 만 5세 때 가정환경자극과 만 6세 때 학교준비도는 만 7세 때 학업수행능력에 직접적으로 긍정적인 영향을 미쳤고, 만 4세 때 어머니의 양육스트레스와 만 5세 때 가정환경자극은 만 6세 때 아동의 학교준비도에 직접적으로 각각 부정적인 영향과 긍정적인 영향을 미쳤다. 또한, 만 4세 때 어머니의 양육스트레스는 만 5세 때 가정환경자극에도 부정적인 영향을 미쳤다. 둘째, 만 4세 때 어머니의 양육스트레스와 만 7세 때 아동의 학업수행능력간의 관계에서 만 5세 때 가정환경자극과 만 6세 때 아동의 학교준비도가 순차적으로 이중매개하는 것으로 나타났다. 본 연구결과는 아동의 긍정적인 초등학교 전이를 돕는 프로그램 개발에 중요한 기초자료를 제공할 것으로 기대된다.

We apply the automated AnomalyFinder algorithm of Paper I (Zang et al. 2021b) to 2018-2019 light curves from the $\simeq 13\,{\rm deg}^2$ covered by the six KMTNet prime fields, with cadences $��\geq 2\,{\rm hr}^{-1}$. We find a total of 11 planets with mass ratios $q, 58 pages, 9 figures, 12 tables, submitted to AJ

In order to exhume the buried signatures of ``missing planetary caustics'' in the KMTNet data, we conducted a systematic anomaly search to the residuals from point-source point-lens fits, based on a modified version of the KMTNet EventFinder algorithm. This search reveals the lowest mass-ratio planetary caustic to date in the microlensing event OGLE-2019-BLG-1053, for which the planetary signal had not been noticed before. The planetary system has a planet-host mass ratio of $q = (1.25 \pm 0.13) \times 10^{-5}$. A Bayesian analysis yields estimates of the mass of the host star, $M_{\rm host} = 0.61_{-0.24}^{+0.29}~M_\odot$, the mass of its planet, $M_{\rm planet} = 2.48_{-0.98}^{+1.19}~M_{\oplus}$, the projected planet-host separation, $a_\perp = 3.4_{-0.5}^{+0.5}$ au, and the lens distance of $D_{\rm L} = 6.8_{-0.9}^{+0.6}$ kpc. The discovery of this very low mass-ratio planet illustrates the utility of our method and opens a new window for a large and homogeneous sample to study the microlensing planet-host mass-ratio function down to $q \sim 10^{-5}$., 6 figures, 3 tables, submitted to RAA

Only a few wide-orbit planets around old stars have been detected, which limits our statistical understanding of this planet population. Following the systematic search for planetary anomalies in microlensing events found by the Korea Microlensing Telescope Network (KMTNet), we present the discovery and analysis of three events that were initially thought to contain wide-orbit planets. The anomalous feature in the light curve of OGLE-2018-BLG-0383 is caused by a planet with mass ratio $q=2.1\times 10^{-4}$ and a projected separation $s=2.45$. This makes it the lowest mass-ratio microlensing planet at such wide orbits. The other two events, KMT-2018-BLG-0998 and OGLE-2018-BLG-0271, are shown to be stellar binaries ($q>0.1$) with rather close ($s, Accepted by MNRAS

We report a giant exoplanet discovery in the microlensing event OGLE-2017-BLG-1049, which is a planet-host star mass ratio of $q=9.53\pm0.39\times10^{-3}$ and has a caustic crossing feature in the Korea Microlensing Telescope Network (KMTNet) observations. The caustic crossing feature yields an angular Einstein radius of $\theta_{\rm E}=0.52 \pm 0.11\ {\rm mas}$. However, the microlens parallax is not measured because of the time scale of the event $t_{\rm E}\simeq 29\ {\rm days}$, which is not long enough in this case to determine the microlens parallax. Thus, we perform a Bayesian analysis to estimate physical quantities of the lens system. From this, we find that the lens system has a star with mass $M_{\rm h}=0.55^{+0.36}_{-0.29} \ M_{\odot}$ hosting a giant planet with $M_{\rm p}=5.53^{+3.62}_{-2.87} \ M_{\rm Jup}$, at a distance of $D_{\rm L}=5.67^{+1.11}_{-1.52}\ {\rm kpc}$. The projected star-planet separation in units of the Einstein radius $(\theta_{\rm E})$ corresponding to the total mass of the lens system is $a_{\perp}=3.92^{+1.10}_{-1.32}\ \rm{au}$. This means that the planet is located beyond the snow line of the host. The relative lens-source proper motion is $\mu_{\rm rel}\sim 7 \ \rm{mas \ yr^{-1}}$, thus the lens and source will be separated from each other within 10 years. Then the flux of the host star can be measured by a 30m class telescope with high-resolution imaging in the future, and thus its mass can be determined., Comment: 7 figures, Published in Journal of the Korean Astronomical Society(JKAS)

We analyze the very short Einstein timescale ($t_\rm E \simeq 7\,{\rm hr}$) event KMT-2019-BLG-2073. Making use of the pronounced finite-source effects generated by the clump-giant source, we measure the Einstein radius $��_\rm E \simeq 4.8\,\rm ��as$, and so infer a mass $M = 59\,M_\oplus (��_\rm{rel}/16 \,\rm ��as)^{-1}$, where $��_\rm{rel}$ is the lens-source relative parallax. We find no significant evidence for a host of this planetary mass object, though one could be present at sufficiently wide separation. If so, it would be detectable after about 10 years. This is the fourth isolated microlens with a measured Einstein radius $��_\rm{E}, 47 pages, 10 figures, 4 tables, Accepted for publication in AJ

We report the discovery and analysis of a planet in the microlensing event OGLE-2018-BLG-0799. The planetary signal was observed by several ground-based telescopes, and the planet-host mass ratio is $q = (2.65 \pm 0.16) \times 10^{-3}$. The ground-based observations yield a constraint on the angular Einstein radius $\theta_{\rm E}$, and the microlensing parallax vector $\vec{\pi}_{\rm E}$, is strongly constrained by the Spitzer data. However, the 2019 Spitzer baseline data reveal systematics in the Spitzer photometry, so there is ambiguity in the magnitude of the parallax. In our preferred interpretation, a full Bayesian analysis using a Galactic model indicates that the planetary system is composed of an $M_{\rm planet} = 0.26_{-0.11}^{+0.22}~M_{J}$ planet orbiting an $M_{\rm host} = 0.093_{-0.038}^{+0.082}~M_{\odot}$, at a distance of $D_{\rm L} = 3.71_{-1.70}^{+3.24}$ kpc. An alternate interpretation of the data shifts the localization of the minima along the arc-shaped microlens parallax constraints. This, in turn, yields a more massive host with median mass of $0.13 {M_{\odot}}$ at a distance of 6.3 kpc. This analysis demonstrates the robustness of the osculating circles formalism, but shows that further investigation is needed to assess how systematics affect the specific localization of the microlens parallax vector and, consequently, the inferred physical parameters., Comment: Published by MNRAS

In this note we give a connection between the closure of the range of block Hankel operators acting on the vector-valued Hardy space H2Cn and the left coprime factorization of its symbol. Given a subset F ? H2Cn, we also consider the smallest invariant subspace S*F of the backward shift S* that contains F.

At $q=1.81\pm 0.20 \times 10^{-5}$, KMT-2018-BLG-0029Lb has the lowest planet-host mass ratio $q$ of any microlensing planet to date by more than a factor of two. Hence, it is the first planet that probes below the apparent "pile-up" at $q=5$--10 $\times 10^{-5}$. The event was observed by {\it Spitzer}, yielding a microlens-parallax $\pi_{\rm E}$ measurement. Combined with a measurement of the Einstein radius $\theta_{\rm E}$ from finite-source effects during the caustic crossings, these measurements imply masses of the host $M_{\rm host}=1.14^{+0.10}_{-0.12}\, M_\odot$ and planet $M_{\rm planet} = 7.59^{+0.75}_{-0.69}\,M_\oplus$, system distance $D_L = 3.38^{+0.22}_{-0.26}\,\,{\rm kpc}$ and projected separation $a_\perp = 4.27^{+0.21}_{-0.23}\,{\rm au}$. The blended light, which is substantially brighter than the microlensed source, is plausibly due to the lens and could be observed at high resolution immediately., Comment: 18 pages, 10 Figures, re-submitted to JKAS

著者人数: 45名（所属. 宇宙航空研究開発機構宇宙科学研究所 (JAXA)(ISAS): 鈴木, 大介), Accepted: 2018-09-20, 資料番号: SA1180199000

Platinum is a strong candidate for an electrode material of the high dielectric capacitors in highly integrated dynamic random access memory devices. However, it is extremely difficult to etch the fine patterns of Pt due to an inherently low etch slope. This characteristic comes from the physical sputtering nature of the Pt etching process. This article reveals that the Pt etching profile depends on the change of the Ti mask layer caused by the increase of wafer temperature during etching. The Pt etching slope of 80° in 0.40 μm pitch was attained by heating the wafer substrate up to 220° with plasma-on. From the transmission electron microscopy analysis the Ti mask is considered to be deformed to TiOx layer in oxygen plasma at high wafer temperature, elevated either by high electrode temperature or plasma irradiation.

Interference check process in construction schedule management is being one of important items as well as traditional scheduling analysis in project management. For visualizing interference check process, 4D CAD viewer is being gradually used in practical construction project. However, current 4D CAD system still needs more easy functions for practical application in construction site. To make a more easy function, it is necessary to equip a simple link system between 3D object and activity schedule. The link methodologies in current 4D CAD viewer should be improved with understanding of characteristic by each project type. This study suggests an improved and useful link methodology in 4D CAD system for plant project management. Plant project usually includes a great number of detailed elements in each functional facility. In that case, it is more important how it is easy to map 3D object with schedule in link process because the 3D drawings of each element should be linked with its schedule for visualizing 4D object. This study presents a new link process that the objects can be linked based on both 3D and schedule. That is, link process can be simple and easy procedure because the priority in link process can be both 3D object or schedule object by each element type. For developing the improved link system, this study introduces a concept of interface board that visualizes the detailed link phases including all objects in link process. Finally the suggested link process is verified in a developed 4D CAD viewer.

An integrated BST capacitor with Pt electrodes and TiSiN diffusion barrier, covered by SiO/sub 2/ spacers, is fabricated. Excellent diffusion barrier and oxidation resistant properties of TiSiN, further protected from being oxidized by the SiO/sub 2/ spacer, make post annealing up to 650/spl deg/C possible. The 0.3/spl times/0.8 /spl mu/m/sup 2/ sized capacitor having 0.2 /spl mu/m height with 256 M density shows 72 fF/cell of capacitance and 1.0 fA/cell@+1.0 V of leakage current density after the post annealing at 650/spl deg/C. The capacitance corresponds to a value of 25 fF/cell of a DRAM with 0.30 /spl mu/m-pitch, which is expected to be the cell size of 1 giga-bit density DRAM.

It is necessary to use the platinum as a bottom electrode material of the BST capacitor in highly integrated deveces, however the Pt etching of the fine patterns is difficult due to the inherent non-reactivity of platinum. It is revealed that the Pt etch slope of 80° was attained by OJ Cl2 chemistry by elevating the substrate temperature up to 160° C. This result is thought to be due to the reaction of O species with TI layer and analyzed by TEM, XPS and AES.