1. Integrated optomechanical sensing for semiconductor metrology
- Author
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Vadim Pogoretskiy, Andrea Fiore, Maurangelo Petruzzella, F. W. M. van Otten, Tianran Liu, R.W. van der Heijden, Francesco Pagliano, I. Sersic Vollenbroek, H. Sadeghian, Yuqing Jiao, Abbas Mohtashami, P.J. van Veldhoven, Federico Galeotti, and Gustav Lindgren
- Subjects
Materials science ,business.industry ,ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION ,Process (computing) ,Semiconductor laser theory ,Metrology ,Semiconductor ,Hardware_GENERAL ,Optical sensing ,Hardware_INTEGRATEDCIRCUITS ,Optoelectronics ,Integrated optics ,Photonics ,business ,Electronic circuit - Abstract
In this talk we will present recent process on the integration of nano-opto-electro-mechanical sensors with photonic circuits and optical read-out, showing a route towards fully-integrated optical sensing.
- Published
- 2021
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