Author: "Le, Q." / Language: dutch; flemish - Searchworks@Jio Institute Digital Library Search Results

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Start Over Author "Le, Q." Language dutch; flemish

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1. Sealing of porous low-k dielectric materials: UV-O3 oxidised CVD silicon oxycarbide films

Author: Whelan, C. M., Cecchet, F., Le, Q. C., Satta, A., Pireaux, J. J., Maex, K., Petra Rudolf, and Rijksuniversiteit Groningen
Published: 2002

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