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Advancements in ultrafast electron microscopy have allowed elucidation of spatially selective structural dynamics. However, as the spatial resolution and imaging capabilities have made progress, quantitative characterization of the electron pulse trains has not been reported at the same rate. In fact, inexperienced users have difficulty replicating the technique because only a few dedicated microscopes have been characterized thoroughly. Systems replacing laser driven photoexcitation with electrically driven deflectors especially suffer from a lack of quantified characterization because of the limited quantity. The primary advantages to electrically driven systems are broader frequency ranges, ease of use and simple synchronization to electrical pumping. Here, we characterize the technical parameters for electrically driven UEM including the shape, size and duration of the electron pulses using low and high frequency chopping methods. At high frequencies, pulses are generated by sweeping the electron beam across a chopping aperture. For low frequencies, the beam is continuously forced off the optic axis by a DC potential, then momentarily aligned by a countering pulse. Using both methods, we present examples that measure probe durations of 2 ns and 10 ps for the low and high frequency techniques, respectively. We also discuss how the implementation of a pulsed probe affects STEM imaging conditions by adjusting the first condenser lens., Competing Interests: Declaration of Competing Interest The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper., (Published by Elsevier B.V.)

Spherical aberration correctors using hexapole fields are widely used and are pivotal in atomic-resolution imaging. Although hexapole-field correctors increase the aberration-free angular range, the angular range is limited by higher-order aberrations, such as six-fold astigmatism or sixth-order three-lobe aberration. Here, we propose two types of spherical aberration correctors to compensate for geometrical aberrations up to the sixth order. The first is a four-hexapole corrector, while the second is a two-hexapole corrector, where each hexapole has a nonuniform magnetic field. The four-hexapole corrector can increase the aberration-free angle up to almost 100 mrad. The two-hexapole corrector with a nonuniform magnetic field has a smaller aberration-free angle than that of the four-hexapole corrector, but it is more compact. The dominant residual aberration in these correctors is seventh-order spherical aberration or chaplet aberration, which is seventh-order geometrical aberration., (Copyright © 2022. Published by Elsevier B.V.)

Ultimate resolution in scanning transmission electron microscopy (STEM) with state-of-the-art aberration correctors requires careful tuning of the experimental parameters. The optimum aperture semi-angle depends on the chosen high tension, the chromatic aberration and the energy width of the source as well as on potentially limiting intrinsic residual aberrations. In this paper we derive simple expressions and criteria for choosing the aperture semi-angle and for counterbalancing the intrinsic sixth-order three-lobe aberration of two-hexapole aberration correctors by means of the fourth-order three-lobe aberration. It is noteworthy that for such an optimally adjusted electron probe the so-called flat area of the Ronchigram is explicitly not maximized. The above considerations are validated by experiments with a CEOS ASCOR in a C-FEG-equipped JEOL NEOARM operated at 60 kV. Sub-Angstrom resolution is demonstrated for a Si[112] single crystal as well as for a single-layered MoS 2 crystalline film. Lattice reflections of 73 pm for silicon and 93 pm for molybdenum disulfide are visible in the Fourier transform of the images, respectively. Moreover, single sulfur vacancies can be clearly identified in the MoS 2 ., (Copyright © 2021. Published by Elsevier B.V.)

Depth resolution in scanning transmission electron microscopy (STEM) is physically limited by the illumination angle. In recent notable progress on aberration correction technology, the illumination angle is significantly improved to be larger than 60 milliradians, which is 2 or 3 times larger than those in the previous generation. However, for three-dimensional depth sectioning with the large illumination angles, it is prerequisite to ultimately minimize lower orders of aberrations such as 2- and 3-fold astigmatisms and axial coma. Here, we demonstrate a live aberration correction using atomic-resolution STEM images rather than Ronchigram images. The present method could save the required time for aberration correction, and moreover, it is possible to build up a fully automated program. We demonstrate the method should be useful not only for axial depth sectioning but also phase imaging in STEM including differential phase-contrast imaging., (Copyright © 2021 Elsevier B.V. All rights reserved.)

Depth resolution in scanning transmission electron microscopy (STEM) is physically limited by the illumination angle. In recent notable progress on aberration correction technology, the illumination angle is significantly improved to be larger than 60 milliradians, which is 2 or 3 times larger than those in the previous generation. However, for three-dimensional depth sectioning with the large illumination angles, it is prerequisite to ultimately minimize lower orders of aberrations such as 2- and 3-fold astigmatisms and axial coma. Here, we demonstrate a live aberration correction using atomic-resolution STEM images rather than Ronchigram images. The present method could save the required time for aberration correction, and moreover, it is possible to build up a fully automated program. We demonstrate the method should be useful not only for axial depth sectioning but also phase imaging in STEM including differential phase-contrast imaging., (Copyright © 2021 Elsevier B.V. All rights reserved.)

The geometric and chromatic aberration coefficients of the probe-forming system in an aberration corrected transmission electron microscope have been measured using a Ronchigram recorded from monolayer graphene. The geometric deformations within individual local angular sub-regions of the Ronchigram were analysed using an auto-correlation function and the aberration coefficients for the probe forming lens were calculated. This approach only requires the acquisition of a single Ronchigram allowing rapid measurement of the aberration coefficients. Moreover, the measurement precision for defocus and two-fold astigmatism is improved over that which can be achieved from analysis of Ronchigrams recorded from amorphous films. This technique can also be applied to aberration corrected STEM imaging of any hexagonal two-dimensional material., (Copyright © 2017 Elsevier B.V. All rights reserved.)

Ray tracing is used to find improved set-ups of the projector system of a JEOL ARM 200CF TEM/STEM for use in coupling it to a Gatan 965 Quantum ER EELS system and to explain their performance. The system has a probe aberration corrector but no image corrector. With the latter, the problem would be more challenging. The agreement between the calculated performance and that found experimentally is excellent. At 200kV and using the 2.5mm Quantum entrance aperture, the energy range over which the collection angle changes by a maximum of 5% from that at zero loss has been increased from 1.2keV to 4.7keV. At lower accelerating voltages, these energy ranges are lower e.g. at 80kV they are 0.5keV and 2.0keV respectively. The key factors giving the improvement are an increase in the energy-loss at which the projector cross-over goes to infinity and a reduction of the combination aberrations that occur in a lens stack. As well as improving the energy-loss range, the new set-ups reduce spectrum artefacts and minimise the motion of the diffraction pattern at low STEM magnification for electrons that have lost energy. Even if making the pivot points conjugate with the film plane gives no motion for zero-loss electrons, there will be motion for those electrons that have lost energy, leading to a false sense of security when performing spectrum imaging at low magnifications. De-scanning of the probe after the objective lens is a better way of dealing with this problem., (Copyright © 2017 Elsevier B.V. All rights reserved.)

The performance of aberration-corrected (scanning) transmission electron microscopy (S/TEM) at an accelerating voltage of 15kV was evaluated in a low-voltage microscope equipped with a cold-field emission gun and a higher-order aberration corrector. Aberrations up to the fifth order were corrected by the aberration measurement and auto-correction system using the diffractogram tableau method in TEM and Ronchigram analysis in STEM. TEM observation of nanometer-sized particles demonstrated that aberrations up to an angle of 50mrad were compensated. A TEM image of Si[110] exhibited lattice fringes with a spacing of 0.192nm, and the power spectrum of the image showed spots corresponding to distances of 0.111nm. An annular dark-field STEM image of Si[110] showed lattice fringes of (111) and (22¯0) planes corresponding to lattice distances of 0.314nm and 0.192nm, respectively. At an accelerating voltage of 15kV, the developed low-voltage microscope achieved atomic-resolution imaging with a small chromatic aberration and a large uniform phase., (Copyright © 2014 Elsevier B.V. All rights reserved.)

We report the development of a monochromator for an intermediate-voltage aberration-corrected electron microscope suitable for operation in both STEM and TEM imaging modes. The monochromator consists of two Wien filters with a variable energy selecting slit located between them and is located prior to the accelerator. The second filter cancels the energy dispersion produced by the first filter and after energy selection forms a round monochromated, achromatic probe at the specimen plane. The ultimate achievable energy resolution has been measured as 36 meV at 200 kV and 26 meV at 80 kV. High-resolution Annular Dark Field STEM images recorded using a monochromated probe resolve Si-Si spacings of 135.8 pm using energy spreads of 218 meV at 200 kV and 217 meV at 80 kV respectively. In TEM mode an improvement in non-linear spatial resolution to 64 pm due to the reduction in the effects of partial temporal coherence has been demonstrated using broad beam illumination with an energy spread of 134 meV at 200 kV., (Copyright © 2014 Elsevier B.V. All rights reserved.)

A generic method to determine the aberration center is established, which can be utilized for aberration calculation and axis alignment for aberration corrected electron microscopes. In this method, decentering induced secondary aberrations from inherent primary aberrations are minimized to find the appropriate axis center. The fitness function to find the optimal decentering vector for the axis was defined as a sum of decentering induced secondary aberrations with properly distributed weight values according to the aberration order. Since the appropriate decentering vector is determined from the aberration values calculated at an arbitrary center axis, only one aberration measurement is in principle required to find the center, resulting in /very fast center search. This approach was tested for the Ronchigram based aberration calculation method for aberration corrected scanning transmission electron microscopy. Both in simulation and in experiments, the center search was confirmed to work well although the convergence to find the best axis becomes slower with larger primary aberrations. Such aberration center determination is expected to fully automatize the aberration correction procedures, which used to require pre-alignment of experienced users. This approach is also applicable to automated aperture positioning., (Copyright © 2013 Elsevier B.V. All rights reserved.)

We evaluate the temporal partial coherence of transmission electron microscopy (TEM) using the three-dimensional (3D) Fourier transform (FT) of through-focus images. Young's fringe method often indicates the unexpected high-frequency information due to non-linear imaging terms. We have already used the 3D FT of axial (non-tilted) through-focus images to reduce the effect of non-linear terms on the linear imaging term, and demonstrated the improvement of monochromated lower-voltage TEM performance [Kimoto et al., Ultramicroscopy 121 (2012) 31-39]. Here we apply the 3D FT method with intentionally tilted incidence to normalize various factors associated with a TEM specimen and an imaging device. The temporal partial coherence of two microscopes operated at 30, 60 and 80 kV is evaluated. Our method is applicable to such cases where the non-linear terms become more significant in lower acceleration voltage or aberration-corrected high spatial resolution TEM., (© 2013 The Authors. Published by Elsevier B.V. All rights reserved.)

Boron nitride nanosheets prepared by an exfoliation technique were observed by aberration corrected transmission electron microscopy at 300 kV acceleration voltage. Single boron and nitrogen atoms in a monolayer region were imaged with different image contrast; a boron atom gave 16% less intensity reduction than a nitrogen atom. The number of atoms at each hexagonal ring site was determined by the image intensity that changed discretely with a 0.25-0.30 intensity difference. A double BN sheet was found to have a boron vacancy layer, and a triple BN layer has also a boron deficient layer on the incident surface resulting from the electron beam thinning process. The high sensitivity for atomic species was achieved by the high resolution and a small information limit due to the use of a cold field emission electron source., (Copyright © 2012 Elsevier B.V. All rights reserved.)