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The application of combined chromatic and spherical aberration correction in high-resolution transmission electron microscopy enables a significant improvement of the spatial resolution down to 50 pm. We demonstrate that such a resolution can be achieved in practice at 200kV. Diffractograms of images of gold nanoparticles on amorphous carbon demonstrate corresponding information transfer. The Y atom pairs in [010] oriented yttrium orthoaluminate are successfully imaged together with the Al and the O atoms. Although the 57 pm pair separation is well demonstrated separations between 55 pm and 80 pm are measured. This observation is tentatively attributed to structural relaxations and surface reconstruction in the very thin samples used. Quantification of the resolution limiting effective image spread is achieved based on an absolute match between experimental and simulated image intensity distributions.

The performance of a direct detection camera (DDC) is evaluated in the context of off-axis electron holographic experiments in a transmission electron microscope. Its performance is also compared directly with that of a conventional charge-coupled device (CCD) camera. The DDC evaluated here can be operated either by the detection of individual electron events (counting mode) or by the effective integration of many such events during a given exposure time (linear mode). It is demonstrated that the improved modulation transfer functions and detective quantum efficiencies of both modes of the DDC give rise to significant benefits over the conventional CCD cameras, specifically, a significant improvement in the visibility of the holographic fringes and a reduction of the statistical error in the phase of the reconstructed electron wave function. The DDC's linear mode, which can handle higher dose rates, allows optimisation of the dose rate to achieve the best phase resolution for a wide variety of experimental conditions. For suitable conditions, the counting mode can potentially utilise a significantly lower dose to achieve a phase resolution that is comparable to that achieved using the linear mode. The use of multiple holograms and correlation techniques to increase the total dose in counting mode is also demonstrated.

In a recent article [1] we examined the influence of the applied electron dose rate on the magnitude of the image contrast in high-resolution transmission electron microscopy (HRTEM). We concluded that the magnitude of the image contrast is not substantially affected by the applied electron dose rate. This result is in obvious contradiction to numerous earlier publications by Kisielowski and coworkers [2-7], who commented our recent article due to this contradiction. The present short communication is a response to the comment of Kisielowski and coworkers on our recent article, where we provide additional arguments supporting our initial findings and conclusions on the magnitude of the image contrast in HRTEM.

This paper addresses a novel approach to atomic resolution elemental mapping, demonstrating a method that produces elemental maps with a similar resolution to the established method of electron energy-loss spectroscopy in scanning transmission electron microscopy. Dubbed energy-filtered imaging scanning transmission electron microscopy (EFISTEM) this mode of imaging is, by the quantum mechanical principle of reciprocity, equivalent to tilting the probe in energy-filtered transmission electron microscopy (EFTEM) through a cone and incoherently averaging the results. In this paper we present a proof-of-principle EFISTEM experimental study on strontium titanate. The present approach, made possible by chromatic aberration correction, has the advantage that it provides elemental maps which are immune to spatial incoherence in the electron source, coherent aberrations in the probe-forming lens and probe jitter. The veracity of the experiment is supported by quantum mechanical image simulations, which provide an insight into the image-forming process. Elemental maps obtained in EFTEM suffer from the effect known as preservation of elastic contrast, which, for example, can lead to a given atomic species appearing to be in atomic columns where it is not to be found. EFISTEM very substantially reduces the preservation of elastic contrast and yields images which show stability of contrast with changing thickness. The experimental application is demonstrated in a proof-of-principle study on strontium titanate.

The application of combined chromatic and spherical aberration correction in high-resolution transmission electron microscopy enables a significant improvement of the spatial resolution down to 50 pm. We demonstrate that such a resolution can be achieved in practice at 200kV. Diffractograms of images of gold nanoparticles on amorphous carbon demonstrate corresponding information transfer. The Y atom pairs in [010] oriented yttrium orthoaluminate are successfully imaged together with the Al and the O atoms. Although the 57 pm pair separation is well demonstrated separations between 55 pm and 80 pm are measured. This observation is tentatively attributed to structural relaxations and surface reconstruction in the very thin samples used. Quantification of the resolution limiting effective image spread is achieved based on an absolute match between experimental and simulated image intensity distributions.

We investigate a possible dependence between the applied electron dose-rate and the magnitude of the resulting image contrast in HRTEM of inorganic crystalline objects. The present study is focussed on the question whether electron irradiation can induce excessively strong atom vibrations or displacements, which in turn could significantly reduce the resulting image contrast. For this purpose, high-resolution images of MgO, Ge, and Au samples were acquired with varying dose rates using a C S -corrected FEI Titan 80–300 microscope operated at 300 kV accelerating voltage. This investigation shows that the magnitude of the signal contrast is independent from the dose rates occurring in conventional HRTEM experiments and that excessively strong vibrations or displacements of bulk atoms are not induced by the applied electron irradiation.

The phase and amplitude of the electron wavefunction that has passed through ultra-thin flakes of WSe

The precise characterisation of the instrumental imaging properties in the form of aberration parameters constitutes an almost universal necessity in quantitative HRTEM, and is underlying most hardware and software techniques established in this field. We focus in this paper on the numerical analysis of individual diffractograms as a first preparatory step for further publications on HRTEM aberration measurement. The extraction of the defocus and the 2-fold astigmatism from a diffractogram is a classical pattern recognition problem, which we believe to have solved in a near-optimum way concerning precision, speed, and robustness. The newly gained measurement precision allows us to resolve fluctuations of the defocus and the 2-fold astigmatism and to assess thereby the optical stability of electron microscopes. Quantitative stability criteria are elaborated, which may serve as helpful guidelines for daily work as well as for microscope acceptance tests.

The precise characterisation of the instrumental imaging properties in the form of aberration parameters constitutes an almost universal necessity in quantitative HRTEM, and is underlying most hardware and software techniques established in this field. We focus in this paper on the numerical analysis of individual diffractograms as a first preparatory step for further publications on HRTEM aberration measurement. The extraction of the defocus and the 2-fold astigmatism from a diffractogram is a classical pattern recognition problem, which we believe to have solved in a near-optimum way concerning precision, speed, and robustness. The newly gained measurement precision allows us to resolve fluctuations of the defocus and the 2-fold astigmatism and to assess thereby the optical stability of electron microscopes. Quantitative stability criteria are elaborated, which may serve as helpful guidelines for daily work as well as for microscope acceptance tests.

Employing an aberration corrector in a high-resolution transmission electron microscope, the spherical aberration C S can be tuned to negative values, resulting in a novel imaging technique, which is called the negative C S imaging (NCSI) technique. The image contrast obtained with the NCSI technique is compared quantitatively with the image contrast formed with the traditional positive C S imaging (PCSI) technique. For the case of thin objects negative C S images are superior to positive C S images concerning the magnitude of the obtained contrast, which is due to constructive rather than destructive superposition of fundamental contrast contributions. As a consequence, the image signal obtained with a negative spherical aberration is significantly more robust against noise caused by amorphous surface layers, resulting in a measurement precision of atomic positions which is by a factor of 2–3 better at an identical noise level. The quantitative comparison of the two alternative C S -corrected imaging modes shows that the NCSI mode yields significantly more precise results in quantitative high-resolution transmission electron microscopy of thin objects than the traditional PCSI mode.

In the recent two decades the technique of high-resolution transmission electron microscopy experienced an unprecedented progress through the introduction of hardware aberration correctors and by the improvement of the achievable resolution to the sub-Angstrom level. The important aspect that aberration correction at a given resolution requires also a well defined amount of optical stability has received little attention so far. Therefore we investigate the qualification of a variety of high-resolution electron microscopes to maintain an aberration corrected optical state in terms of an optical lifetime. We develop a comprehensive statistical framework for the estimation of the optical lifetime and find remarkably low values between tens of seconds and a couple of minutes. Probability curves are introduced, which inform the operator about the chance to work still in the fully aberration corrected state.

A technique capable of producing monolayer resolved electron energy loss (EEL) spectroscopy data along one direction in crystal structures is introduced. Unambiguous assignment of EEL spectra to atomic planes is possible via the execution of high angle annular dark-field (HAADF) imaging and EEL spectrum acquisition in parallel. The recording of instrumental instabilities in the HAADF image during the measurement enables a proper quantification by virtue of post-acquisition correction. Compared to the conventional line profile technique a dose reduction by several orders of magnitude can be achieved. The technique is applied to bulk SrTiO(3) and ZnO:In(2)O(3) in order to explore its capabilities and limits. Monolayer resolution was achieved for the Ti-L(23) and In-M(45) core-losses. Multislice calculations were carried out for the purpose of assessing the residual delocalisation of the inelastic signal. Fundamental limits to the resolution are imposed by dynamical dispersion of the electron wave in the crystal combined with the extension of the inelastic potential. In the present case, owing to the requirement of a high beam current, the geometrical probe size cannot be neglected when compared to the width of an inelastic scattering potential.