1. Intracavity and extracavity-contacted 980-nm oxide-confined VCSELs for optical interconnects and integration
- Author
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Patrycja Śpiewak, Marcin Gębski, Michał Wasiak, Holger Schmeckebier, Philip Moser, Ricardo Rosales, and James A. Lott
- Subjects
Materials science ,Silicon ,business.industry ,Bandwidth (signal processing) ,Oxide ,chemistry.chemical_element ,02 engineering and technology ,Epitaxy ,Vertical-cavity surface-emitting laser ,chemistry.chemical_compound ,020210 optoelectronics & photonics ,Optics ,chemistry ,Oxide aperture ,0202 electrical engineering, electronic engineering, information engineering ,Optical data transmission ,Optoelectronics ,Wafer ,business - Abstract
Record-large modulation bandwidths of 30 GHz and larger have been achieved with state-of-the art directly and indirectly modulated VCSELs and VCSEL arrays. One next big challenge is to make VCSELs viable for integration onto silicon while maintaining large bandwidth values. Various integration schemes of VCSELs might require process variations potentially detrimental for large modulation bandwidths. We present and compare directly modulated oxide-confined top-emitting 980-nm VCSELs processed from one single epitaxial wafer design into four different extracavity and intracavity contact variations.
- Published
- 2017