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Your search keyword '"Seeley, Andrew"' showing total 2 results
Start Over Author "Seeley, Andrew" Journal solid state technology
2 results on '"Seeley, Andrew"'

1. Addressing the challenges of LP-epi exhaust management

Author

Takahashi, Katsunori, Seeley, Andrew, and Mawle, Peter

Subjects
Semiconductor production equipment, Semiconductor production equipment industry, Semiconductor production equipment industry -- Product information, Semiconductor production equipment -- Product information
Abstract

OVERVIEW Alternating high flows of acid vapors and hydrogen with additional toxic and pyrophoric gases presents a new challenge for exhaust treatment. These processes can be sensitive to exhaust pressure […]

Published
2001

2. LP-epi exhaust management.

Author

Takahashi, Katsunori, Seeley, Andrew, and Mawle, Peter

Subjects
*EXHAUST systems, *CLEANING machinery & appliances, *MANAGEMENT
Abstract

Discusses issues concerning low-pressure epitaxial exhaust management. Problems in exhaust management; Combustion of hydrogen; Abatement of acid gases.

Published
2001

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