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1. Standardization of Measurement of Performance Characteristics of Vacuum pump

Author

Masahiro Hirata and Shigeru Kaneto

Subjects
Materials science, Standardization, law, Mechanical engineering, Vacuum pump, Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films, law.invention
Abstract

Standardization of measurement of performance characteristics of vacuum pump in Japan is described. A draft of the standard was prepared based on the ISO 5302 (Vacuum technology—Turbomolecular pumps—Measurement of performance characteristics).

Published
2007

3. Monte Calro Simulation of Transmission Probability of an Orifice by Considering Specular Reflection

Author

Hitoshi Akimichi, Masanori Shiro, and Masahiro Hirata

Subjects
Speed measurement, business.industry, Chemistry, Conductance, Orifice plate, Radius, Condensed Matter Physics, Surfaces, Coatings and Films, Optics, Transmission (telecommunications), Specular reflection, Electrical and Electronic Engineering, business, Body orifice
Abstract

Some parts of gas molecules reflect in specular direction after hitting a wall. In order to determine the conductance of an orifice accurately for vacuum standard and pumping speed measurement by orifice flow method, transmission probability of an orifice was calculated by Monte Calro simulation taking account of the specular reflection of gas molecules on its inner surface. If 10% of gas molecules are assumed to suffer specular reflection on the wall, the probability increases only 0.05% for the orifice of which thickness is 0.01 of its radius, while 0.5% for 0.1. The orifice should be thin, since it is not realistic to determine the amount of specular reflection. The thickness should be measured accurately to determine probability with high accuracy. The radius should be also measured to determine the rate of incidence of gas in the orifice with high accuracy.

Published
2005

4. [Untitled]

Author

Masahiro Hirata

Subjects
Particle physics, Materials science, Calibration (statistics), Electrical and Electronic Engineering, Gauge (firearms), Condensed Matter Physics, Surfaces, Coatings and Films
Published
2005

5. [Untitled]

Author

Masahiro Hirata and Shigemi Suginuma

Subjects
Physics::Instrumentation and Detectors, Chemistry, Sensitivity coefficient, Analytical chemistry, Gauge (firearms), Condensed Matter Physics, Ion trajectory, Surfaces, Coatings and Films, Ion, Anode, Physics::Plasma Physics, Ion density, Electrode, Electrical and Electronic Engineering, Atomic physics
Abstract

The sensitivity coefficient of a commercial Bayard-Alpert gauge depends on the diameter of its ion collector electrode. The nominal value of the coefficient for the gauge of 125 μm in diameter is 1.25 times higher than that for the gauge of 50 μm, while the amount of ions generated inside the anode is almost the same by our calculation. Ion trajectory inside the anode was also calculated using a grid type anode. Ions were collected into the ion collector for the most parts, but some parts passed through the space between the grids. The products of the ion density generated inside the anode and the collection efficiency into the ion collector differed from 1.1 to 1.3 times depending on the diameter. Therefore, the difference in the coefficient by the diameter was explained by the ion collection efficiency.

Published
2002

6. Numerical Simulation of Thermal Transpiration of Capacitance Diaphragm Gauge

Author

Shin Ichi Nishizawa and Masahiro Hirata

Subjects
Chemistry, Thermodynamics, Diaphragm (mechanical device), Mechanics, Gauge (firearms), Condensed Matter Physics, Capacitance, Surfaces, Coatings and Films, law.invention, Physics::Fluid Dynamics, Pressure measurement, Free molecular flow, law, Thermal transpiration, Head (vessel), Vacuum chamber, Electrical and Electronic Engineering
Abstract

The Capacitance diaphragm gauge (CDG) is one of the most important vacuum gauges in low and middle vacuum ranges. The difference of temperature between the sensor head and the vacuum chamber gives a non-linear sensitivity of the gauge depending on the pressure due to thermal transpiration effect. Change in the sensitivity of about 4% between molecular flow regime and viscous flow regime is significant for metrological use of the gauge. In this study, by using a DSMC method, pressure distribution in the connecting tube of the gauge was obtained under the pressure range from molecular flow regime to viscous flow regime with taking account of temperature distribution along the connecting tube. It was in good agreement with the pressure dependence of sensitivity obtained by static expansion system experimentally. Furthermore, influence of gas-surface interaction on the thermal transpiration was also discussed.

Published
2002

8. [Untitled]

Author

Masahito TAGAWA, Hitoshi AKIMICHI, Chiharu MAEDA, Masahiro HIRATA, Shin-ichi NISHIZAWA, Seiji HIROKI, Sadamitsu TANZAWA, Takashi ARAI, Tetsuya ABE, Katsusuke SHIMIZU, Jyun-nosuke NAKATANI, Shizuma KURIBAYASHI, Megumi NAKAMURA, Toru SASAKI, Yoshiro SHIOKAWA, Nozomu HATTORI, Takafumi MORII, Masaaki HIRAI, Masahiko KUSAKA, Motohiro IWAMI, Zhao-Xiong XIE, Kayo IWASE, Ken-ichi TANAKA, Toshimi SUTOU, Tomohiro UMEZAWA, Daisuke ESASHIKA, Shigeru SAITO, Tetsuo SOUMURA, Shuji ISONO, Hideki YAMASAKI, Hakuto MURAKAMI, Masahiko YAMAMOTO, Takuji OYAMA, Takashi IKUNO, Jeong-Tak Ryu, Shigeharu OHKURA, Yang-Gyu Baek, Shin-ichi HONDA, Mitsuhiro KATAYAMA, Masahiko KITAGAWA, Kenjiro OURA, Keiichi FUJIMOTO, Kuei-Yi LEE, Nobuhiko OTA, Shinji SHINABE, Yuto FUKUMA, Yusuke SUETSUGU, Yao-Jane HSU, Yasunori TANIMOTO, Youichirou HORI, Ken-ichi KANAZAWA, Masanori KOBAYASHI, Masahide GOTOH, Koichi SUDOH, Hiroshi IWASAKI, Keisuke KAMETANI, Touichi HATANO, Masato KIUCHI, Katsutoshi TANAKA, Seiji TAKECHI, Satoshi SUGIMOTO, Seiichi GOTO, Tsukasa KOBAYASHI, Ryoki TOBE, Teruo YANAGIHASHI, Tetsuro OBAYASHI, Shigemi SUGINUMA, Tetsuo OGAWA, Kiyohide KOKUBUN, Takashi SEKIDO, Ichiro TAKANO, Yoshio SAWADA, Yoshiaki SAKURAI, Akio OKAMOTO, Toshikazu NOSAKA, Hiroya NAKAJIMA, Hiroshi KODA, Masaaki YOSHITAKE, Toyohito UCHIZONO, Toshiaki YASUI, Hirokazu TAHARA, Takao YOSHIKAWA, Akio SUZUKI, Jun SAKAMOTO, Takeshi MITSUHASHI, Akihito MORI, Takanori AOKI, Tatsuhiko MATSUSHITA, Masahiro OKUDA, Hiroyuki NAKANO, Hideo FURUHASHI, Toshio YOSHIKAWA, Akinori MAEDA, Yoshiyuki UCHIDA, Kenzo KOJIMA, Asao OHASHI, Shizuyasu OCHIAI, Teruyoshi MIZUTANI, Yasuharu YAMASHITA, Shu KUROKAWA, Akira SAKAI, Tomohide SASAKI, Tetsuro SHIRAO, Nobuhiro KANEKO, Keniche SHUDO, Masatoshi TANAKA, Kaoru OJIMA, Masamichi YOSHIMURA, Kazuyuki UEDA, Joselito LABIS, Akihiko OHI, Toshinori FUJIKI, Tadao TODA, Hiroshi HARIMA, Nobumasa KIWA, Yasuhito GOTOH, Hiroshi TSUJI, Junzo ISHIKAWA, Yoichiro YGI, Kiminori KAKITANI, Hiroko KAJI, Akio YOSHIMORI, Kazuhiko HASEGAWA, Wilson A. Dino, Hideaki KASAI, Ayao OKIJI, Katsuhisa CHIDA, Tetsumi TANABE, Yoshitsugu ARAKAKI, Morio YOSHIZAWA, Kouji NODA, Katsuhiro NAKAMURA, Yasushi YAMANO, Shinichi KOBAYASHI, Yoshio SAITO, Yoshihiro SATOH, Tomio KUBO, Hideharu MATSUSHIMA, Ken KASUGA, Hiroki ASARI, Norihiko IMAIZUMI, Kentarou SEKIKAWA, Masahiro SHIBUSAWA, Keisuke TAJIRI, Zenzaburo KABEYA, Yoshikazu NAKAYAMA, Shin AKIDUKI, Kazuhiro HASHIMOTO, Masamitu TAKAHASI, Jun'ichiro MIZUKI, Kazuhisa TAMURA, Toshihiro KONDO, Kohei UOSAKI, Shigeharu TAMURA, Masato YASUMOTO, Nagao KAMIJO, Yoshio SUZUKI, Mitsuhiro AWAJI, Akihisa TAKEUCHI, Hidekazu TAKANO, Hiroshi ITOH, Hidehiko NONAKA, Shingo ICHIMURA, Masahiro TOSA, Kazutaka MITSUISHI, Masaki TAKEGUCHI, Yoshio FUKUDA, Masahiro GOTO, Akira KASAHARA, Kazuo FURUYA, Kazuhiro YOSHIHARA, Kazuhiko MIMOTO, Takashi MATSUMOTO, Kunio OKIMURA, Kimiko SATO, Tsutomu TAKAHASHI, Tadashi NAKAMURA, Naohiro HORII, Akihiro INOUE, Nobuharu OHSAKO, Takeshi MIYASHITA, Kengo HIDAKA, Atsushi TANAKA, Hisahiro TANGE, Yuji TANAKA, Katsumi NISHIMURA, Takashi KOJIMA, Nozomu TAKAGI, Tatsuo WAKAIDA, Takeo HOSAKA, Akira SAKAZAKI, Takahiro OKADA, Akihiro TANAKA, Yasunori Yamamura, Yoshiyuki MIZUNO, Teiichi HOMMA, Sin'ichi INOUE, Yuhjin YAMAZAKI, Toshiaki FUJINO, Tomohisa OKUNO, Ken-ichi OHTOMI, Ken'ichi MIURA, Itsuo ISHIGAMI, Hideaki HOSHINO, Tomoyuki MIZUKOSHI, Fumihiro URATANI, Hiroshi NAKANISHI, Won-chul Moon, Tatsuo YOSHINOBU, Osamu SUEKANE, Masakazu TANAKA, Toshiko OKUI, Katsuhito ARAKAWA, Shigehiko HASEGAWA, Hisao NAKASHIMA, Miwako KUBO, Hiroshi MORIKAWA, Shizuo FUJITA, Shigeo FUJITA, Toshinari YAMAZAKI, Toshio YOSHIZAWA, Toshio KIKUTA, Shigeki HIROBAYASHI, Noriyuki NAKATANI, Tatsuo YAMABUCHI, Masatomo NISHIURA, Toru KANAJI, Makoto TANAKA, and Z. An

Subjects
Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films
Published
2001

9. Relationship between Asymmetrical Position of Electrode and the Sensitivity Coefficient of a Triode Type Ionization Gauge

Author

Shigemi Suginuma and Masahiro Hirata

Subjects
Chemistry, Ion current, Electron, Gauge (firearms), Condensed Matter Physics, Surfaces, Coatings and Films, Ion, law.invention, Triode, law, Ionization, Electrode, Hot-filament ionization gauge, Electrical and Electronic Engineering, Atomic physics
Abstract

Secondary standard ionization vacuum gauge VS-1 is a triode gauge. Simulation of the electrical potential profile of the gauge, electron trajectory emitted from a hot filament, and ion current produced by ionization of gas by the electron assuming a simple electrode geometry was done. The increase in sensitivity coefficient depending on grid potential and the decrease in that depending on filament potential agreed with experimental results by 5%. The increase in sensitivity coefficient depending on filament displacement and ion collector tilting from its regular position was also explained by simulation.

Published
2000

10. [Untitled]

Author

Michiru NISHIWAKI, Akihiro YAMAMOTO, Shigeki KATO, Yusuke SUETSUGU, Susumu KATO, Hirohisa TAKAHASHI, Tatsuo ASAMAKI, Mina YAGIHARA, Takashi ADACHI, Takao SEKI, Akio ABE, Hiroto KURIYAMA, Takato HIRAYAMA, Ichiro ARAKAWA, Teronobu MIYAZAKI, Naoto KIKUCHI, Yoshihiro SAWAHIRA, Eiji KUSANO, Hidehito NANTO, Akira KINBARA, Makoto MATSUI, Yukio INOKUTI, Kazuhiro SUZUKI, Michimasa KIKUCHI, Toshiyuki HIGASHINO, Katsuto TANAHASHI, Jiro OSAKA, Yuichi KAWAMURA, Naohisa INOUE, Yoshikazu HOMMA, Kunio TAKAYANAGI, Masahiro HIRATA, Nobuhiko OTA, Shinji SHINABE, Yuto FUKUMA, Yoshiro SHIOKAWA, Masakazu ICHIKAWA, Ken-ichi KANAZAWA, Hiromi HISAMATSU, Masayuki SHIMAMOTO, Masayuki SATO, Mitsuru SHIRAI, Osamu KONNO, Yuuki WATANABE, Shinichi KOBAYASHI, Yoshio SAITO, Kentarou SEKIKAWA, Kiyomitsu ASANO, Hiroki ASARI, Hideharu MATSUSHIMA, Hiroshi MIMA, Kazutugu MURAKAMI, Atushi KAWAHARA, Toshio MASUOKA, Soichi OGAWA, Shigemi SUGINUMA, S.S. HONG, K.H. CHUNG, Kouichi HAMADA, Masaki HESAKA, Hiroki KURISU, Setuo YAMAMOTO, Mituru MATSUURA, Yasunori YANAGISAWA, Akira KASAHARA, Masatoshi TOSA, Young-Sung Kim, Kazuhiro YOSHIHARA, Yuden TERAOKA, Akitaka YOSHIGOE, Mutsumi SANO, Hiroko KAJI, Kiminori KAKITANI, Yoichiro YAGI, Akio YOSHIMORI, Hiroshi TSUJI, Hitoshi SASAKI, Hiroko SATO, Yasuhito GOTOH, Junzo ISHIKAWA, Shunsuke KIDO, Michiko YOSHITAKE, Yarrama-Reddy APARNA, Hiroaki TANAKA, Kimio OKUNO, Minoru NAGAI, Masahiko TOMITORI, Kaoru ABE, Takayuki TSUGUEDA, Kazuya SAITO, Masamichi MATSUURA, Toshiyuki OHYA, Hiroyuki NAGAHAMA, Tetsuo SHIMOMURA, Seiichiroh YOKOYAMA, Masahiko MITSUHASHI, Seishiro OHYA, Kotaro SHINOHARA, Ichiro SENBA, Kunio OKIMURA, Tomohiro ARAKAWA, Hideaki TAKEZAWA, Tadashi NAKAMURA, Chikanori INO, Yasuhiro ARAKI, Yasuhiro IGASAKI, Nobuo SAITO, Isamu NAKAAKI, Hiromu IWATA, Sigeaki NAKAMURA, Shoji YOSHIOKA, Tomuo YAMAGUCHI, Ryuta AI, Kiyotaka WASA, Yoshiki MORIKAWA, Tetsuya NISHIGUCHI, Masaharu MIYAMOTO, Shingo ICHIMURA, Hidehiko NONAKA, Masakuni KAWADA, Hiroshi MURAKAMI, Hideo HASEGAWA, Ayako HIOKI, Kazuki NATSUKAWA, Shinichi NISHIZAWA, Kazuo MACHIDA, Akiko N. ITAKURA, Tetsuya NARUSHIMA, Masahiro KITAJIMA, Ruediger BERGER, Christoph GERBER, James K. GIMZEWSKI, Tetsu MIENO, Hiroaki ITO, Hiroki KAWADA, Miyuki YAMANE, Hiroyuki KITSUNAI, Nobuo TSUMAKI, Manabu YAMASHITA, Shinichi SUZUKI, Yoshitaka NAITOH, Yoshifumi OHSHIMA, Hiroyuki HIRAYAMA, Ken-ichi TANAKA, Masamichi IKAI, Shigehiko YAMAMOTO, Toru KANAJI, Takashi MORII, Masatomo NISHIURA, Makoto TANAKA, Yukio Yasuda, Hiroya Ikeda, Shigeaki Zaima, Yasuo KIMURA, Daisei SHOJI, Masanori SHINOHARA, Michio NIWANO, Takeshi KITAHARA, Hideki TANAKA, Hiroyuki WAKIMOTO, Goro MIZUTANI, Sukekatsu USHIODA, Koichiro MITSUKE, Makoto SAKURAI, Sin-ichi IGARASHI, Aki TOSAKA, Daisuke IGUCHI, Tomomi HIRAOKA, Shinjiro YAGYU, Takahiro KONDO, Toshiyuki IKEUCHI, Da-ling Lu, Takayoshi SAITOH, Suguru SAIKI, Kazuhiro FUKUSHIMA, Shigeru MIZUNO, Shin-ichiro TAGUCHI, Hideki SATO, Masao SASAKI, Makoto SATO, Yukito NAKAGAWA, K.Hassan Bhuiyan, Hideaki Inoue, Yoshikazu TAKAHASHI, Yoshihiro IKEDA, Masato KIUCHI, Takaomi MATSUTANI, Takae TAKEUCHI, Takashi MATSUMOTO, Kazuhiko MIMOTO, and Seiichi GOTO

Subjects
Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films
Published
2000

11. [Untitled]

Author

Satoshi KUROKOUCHI, Masayuki OKABE, Mitsuyoshi SAITO, Shinsaku MORITA, Yoshiro SHIOKAWA, Masakazu ICHIKAWA, Seiichiro KANNO, Tatehito USUI, Koichi SUDOH, Tatsuo YOSHINOBU, Hiroshi IWASAKI, Hiroaki TANAKA, Kimio OKUNO, Tadao MIURA, Touru SUMIYA, Katsuya HONDA, Shun-ichiro TANAKA, Yukio INOKUTI, Kazuhiro SUZUKI, Nastuki TAKAHASHI, Osamu OHKUBO, Yoshihiro SAWAHIRA, Akishige SATO, Naoto KIKUCHI, Eiji KUSANO, Hidehito NANTO, Akira KINBARA, Tetsuya NARUSHIMA, Akiko ITAKURA, Takaya KAWABE, Masahiro KITAJIMA, Masaru KITAGAWA, Toshiyuki OHYA, Hiroyuki NAGAHAMA, Sei-ichiroh YOKOYAMA, Ichiro ARAKAWA, Takashi ADACHI, Takato HIRAYAMA, Koichiro MITSUKE, Makoto SAKURAI, Sin-ichi IGARASHI, Yukiko ABE, Yasuo IRIE, Miyuki KAMBE, Aki TOSAKA, Satoko HAMAMATSU, Satoshi ISHII, Yoshiyuki NORIMITSU, Toshimi SUTOU, Noriyuki UBUKATA, Yoshihiro OINUMA, Shigeru SAITO, Masaaki KATOH, Kenichi TAJIMA, Daisuke HORIMOTO, Takeo OHTE, Akira KOJIMA, Seiya OHI, Takashi SHIOYA, Kazuhiko KOBAYASHI, Hidefumi NAKAJIMA, Satoshi YOKOYAMA, Hiroyuki OBARA, Hajime SAKAI, Yasuhiro OGOSHI, Takuro KOIKE, Koichiro UCHIMURA, Hitoshi TABATA, Tomoji KAWAI, Yutaka HIBINO, Guochun XU, Yasuo SUZUKI, Masao TANIHARA, Yukio IMANISHI, Shigemi SUGINUMA, Masahiro HIRATA, Hitoshi AKIMICHI, Kyoko TAKEUCHI, Yutaka TUZI, Masahiro TOSA, Akira KASAHARA, Kyung Sub LEE, Kazuhiro YOSHIHARA, Tomonari TANAKA, Tadashi SAWADA, Wataru SUGIYAMA, Koyu OTA, Daisuke YAMAUCHI, Shinobu SATO, Masatoshi TANAKA, Masaaki KISHIDA, Masahiko TOMITORI, Kiyotaka ASAKURA, Wang-Jae CHUN, Yasuhiro IWASAWA, Kiminori KAKITANI, Hiroko KAJI, Yoichiro YAGI, Akio YOSHIMORI, Akio OKAMOTO, Toshikazu NOSAKA, Masaaki YOSHITAKE, Souichi OGAWA, Shigeaki NAKAMURA, Nobuo SAITO, Shoji YOSHIOKA, Isamu NAKAAKI, Hideo HASEGAWA, Toshiyuki MIHARA, Shoichi MOCHIZUKI, Shigeharu TAMURA, Hironori KOBAYASHI, Ryoji MAKABE, Tadashi ISHIDA, Yoshiyuki SATO, Masanori ANDO, Tetsuhiko KOBAYASHI, Ayako HIOKI, Kazuki NATSUKAWA, Koji INOUE, Yoshikazu NAKAYAMA, Takayuki SATO, Shinichiro MICHIZONO, Yoshio SAITO, Shinichi KOBAYASHI, Kiyohide KOKUBUN, Yuuki WATANABE, Heizo TOKUTAKA, Kikuo FUJIMURA, Tatsuo SHIMIZU, Yasushiro NISHIOKA, Hideki TANAKA, Hiroyuki WAKIMOTO, Toshihiko MIYAZAKI, Goro MIZUTANI, Sukekatsu USHIODA, Yoshitake YAMAGUCHI, Satoru TAKAKUSAGI, Makoto KATO, Yuji SAKAI, Akira KUROKAWA, Shingo ICHIMURA, Ken NAKAMURA, Takanori AOKI, Syogo TODA, Akio SUZUKI, Tatsuhiko MATSUSHITA, Masahiro OKUDA, Kazuaki HAMAJI, Yoshiharu KAKEHI, Tsutom YOTSUYA, Norihiro MATSUOKA, Yoshitsugu TSUTSUMI, Hideki TOMIOKA, Yoshio OKAMOTO, Kensuke MURAI, Masato YASUMOTO, Norimasa UMESAKI, Hirohiko NAKANO, Toshiaki TATSUTA, Jiro MATSUO, Isao YAMADA, Hiroyuki MAGARA, Osamu TABATA, Touichi HATANO, Masatoshi KOTERA, Kiyoshi YAMAGUCHI, Naohiro HORII, Kunio OKIMURA, Akira SHIBATA, Hiroshi MURAKAMI, Ikuya KAMEYAMA, Satoru SUKENOBU, Kazuhiko MIMOTO, Takashi MATSUMOTO, Takafumi YOSHIKAWA, Masato KIUCHI, Seiichi GOTO, Masatoshi OHBA, Yoshiaki AGAWA, Kazuma SHIBUTANI, Hiroshi TSUJI, Yasuhito GOTOH, Junzo ISHIKAWA, Hiroki KAWADA, Hiroyuki KITSUNAI, Nobuo TSUMAKI, Masanori KATSUYAMA, Shinichi SUZUKI, Katsuto TANAHASHI, Yuichi KAWAMURA, Naohisa INOUE, Yoshikazu HOMMA, Michimasa KIKUCHI, Kazumasa ISHIKAWA, Teiichi HOMMA, Yoshinori SUGANUMA, Nan LI, Katsuyoshi KOBAYASHI, Nobuyoshi SAKAKIBARA, Yoshiki UENO, Masayuki AOKI, Toshiaki YASUI, Keito MORIMOTO, Hirokazu TAHARA, Takao YOSHIKAWA, Hidekazu KODERA, Masahiko UOTA, Yoshihiro SATOH, Tomio KUBO, Kozo MOCHIJI, Naoshi ITABASHI, Hiroshi SHIMIZU, Shunsuke OHTANI, Kazuhiko OKUNO, and Nobuo KOBAYASHI

Subjects
Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films
Published
1999

12. Schematics of ISO and Japanese Standards on Flange Sealing Systems and Fittings for Vacuum Equipments, and Their Correlations

Author

Masahiro Hirata, Toshio Kikuchi, Hitoshi Akimichi, and Satoshi Kurokouchi

Subjects
Flexibility (engineering), Standardization, Computer science, Gasket, Schematic, Mechanical engineering, Electrical and Electronic Engineering, Flange, Condensed Matter Physics, Surfaces, Coatings and Films
Abstract

To keep flexibility on construction of vacuum system, understanding of standardization scheme for demountable sealing system consisting of flanges and metal gasket or elastomer O-ring is highly beneficial for both suppliers and users of vacuum equipments. Here we present main contents of international and national standards of flange sealing systems and their correlation, along with some commentaries on states of conformity with standards of commercially available vacuum flanges. Outlines of standards of vacuum fittings, and recent activities for revision and establishment of standards are also reported.

Published
2007

13. [Untitled]

Author

Michio MINATO, Yoshio ITOH, Shingo ICHIMURA, Kiyohide KOKUBUN, Masahiro HIRATA, Sonoko TSUKAHARA, Kazuya SAITO, Yoshinao IKEDA, Yoshio SAITO, Kowashi WATANABE, Hiroshi SAEKI, Mitsuhiro MASAKI, Yasuaki SUZUKI, Yukiko TANIUCHI, Takashi NODA, Michio MAENO, Suck Hee BE, Haruo OHKUMA, Masahiro TOSA, Akira KASAHARA, Kazuhiro YOSHIHARA, Seiichiro KANNO, Hiroyuki KITSUNAI, Nobuo TSUMAKI, Masaaki NAKAYAMA, Hitoshi NISHIMURA, Kenji SHIRAI, Shinichi KOBAYASHI, Norio OGIWARA, Keiichi OHIRA, Takayuki SATO, Shinichiro MICHIZONO, Shigemi SUGINUMA, Migaku TAKAHASHI, Akio OKAMOTO, Toshikazu NOSAKA, Masaaki YOSHITAKE, Souichi OGAWA, Kazuhiko KOBAYASHI, Masatoshi NOGUCHI, Hidefumi NAKAJIMA, Hiroyuki OBARA, Hajime SAKAI, Yasuhiro OGOSHI, Takuro KOIKE, Hideo HASEGAWA, Yukio INOKUTI, Kazuhiro SUZUKI, Osamu OHKUBO, Natsuki TAKAHASHI, Masayuki TERAI, Norichika HASEGAWA, Masahiko OKUZAWA, Chuhei OSHIMA, Shigeki OTANI, Kenji ODAKA, Osamu SATOH, Yoshiro SHIOKAWA, Masakazu ICHIKAWA, Kenya AKAISHI, Kazuhiro EZAKI, Yusuke KUBOTA, Osamu MOTOJIMA, Masakatsu KITANI, Akira KUROKAWA, Hiroko KAJI, Kiminori KAKITANI, Yoichiro YAGI, Akio YOSHIMORI, Takanori AOKI, Shogo TODA, Kazuaki HAMAJI, Akio SUZUKI, Tatsuhiko MATSUSHITA, Masahiro OKUDA, Daisuke TANAKA, Takeshi FUJIWARA, Mituaki MAEDA, Nobuhiko TAKEHARA, Mitsutaka HIKIDA, Yasuhiro IGASAKI, Akishige SATO, Masaru KITAGAWA, Yasunobu KURODA, Eiji KUSANO, Akira KINBARA, Taizo KAWAUCHI, Katsuyuki FUKUTANI, Tatsuo OKANO, Shunji KISHIMOTO, Xiaowei ZHANG, Toyosei KAWASAKI, Daisuke SAKAI, Hiroshi ITOH, Takeo ICHINOKAWA, Toshuu AN, Hiroshi KUBO, Yasuhito GOTOH, Hiroshi TSUJI, Junzo ISHIKAWA, Youiti YAMAMOTO, Toshiaki MIYOKAWA, Nobuaki TAMURA, Tadao MIURA, Touru SUMIYA, Haruko FUJINUMA, Shun-ichiro TANAKA, Hiroyuki YOSHIKI, Teruhiko TSUTSUI, Tetsu OKAMOTO, Seiichi WATANABE, Yukio OKAMOTO, Hiroki KAWADA, Kaoru IJIMA, Seigi MIZUNO, Saburo SHIMIZU, Koh FUWA, Seiji SEKI, Kazunobu HAYAKAWA, Heizo TOKUTAKA, Kazuyuki IWAMOTO, Kikuo FUJIMURA, Toru WATANABE, Satoru KISHIDA, Ken NAKAMURA, Yoshiyuki IGARI, Shinji ISHIDZUKA, Tetsuroh MINE, Tsuyoshi TAKAOKA, Tomohide TAKAMI, Isao KUSUNOKI, Akira HAYAMA, Kazuyoshi IMOTO, Takato HIRAYAMA, Ichiro ARAKAWA, Takashi ADACHI, Koichiro MITSUKE, Makoto SAKURAI, Takashi MOMOSE, Eishuu HAYASAKA, Katsuhiro SAITOU, Katsuya NAGAYAMA, Sin'ya ABE, Kunio OKIMURA, Naoki YASUMARU, Yukiko ABE, Sin-ichi IGARASHI, Yasuo IRIE, Katsumi SUZUKI, Eiji ROKUTA, Tomohiro HAYASHI, Atsushi ITO, Toshio SAKURAI, Masuaki MATSUMOTO, Natsuo TATSUMI, Tadashi ITOYAMA, and Masaomi UMEZAWA

Subjects
Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films
Published
1998

14. Simulation Concerning about Dependence of Sensitivity Coefficient of a Nude-type Bayard-Alpert Gauge on the Diameter of an Envelope

Author

Shigemi Suginuma and Masahiro Hirata

Subjects
Physics, business.industry, High Energy Physics::Lattice, Ultra-high vacuum, Gauge (firearms), Type (model theory), Condensed Matter Physics, Surfaces, Coatings and Films, Protein filament, Distribution (mathematics), Optics, Electric potential, Electrical and Electronic Engineering, Atomic physics, business, Sensitivity (electronics), Envelope (waves)
Abstract

Sensitivity coefficient of a nude-type Bayard-Alpert gauge depends on the diameter of an envelope. In our measurement on four gauges, sensitivity coefficients of three gauges in small envelopes (inner diameter of 35, 38 mm) were higher by 2040% than those in large envelopes (54, 70 mm) for nitrogen in high vacuum 10-4 Pa. One gauge showed small dependence of the coefficient on the diameter. In order to discuss these experimental results, an electric potential distribution and an electron trajectory inside the envelope were calculated using a super-computer. And a sensitivity coefficient was estimated using the potential distribution and the electron trajectory. The estimation showed that the coefficient of a gauge with a wide gap (3 mm) between a grid and a filament has the same dependence on the diameter as those of three gauges and the coefficient of a gauge with a narrow gap (1 mm) has small dependence on the diameter. Large envelope gives small dependence of the coefficient on the gap.

Published
1998

15. Vacuum Properties of TiN/Stainless Steel for Extremely High Vacuum

Author

Masahiro Hirata, Shingo Ichimura, Sonoko Tsukahara, Kazuya Saito, Kiyohide Kokubun, and Yoshinao Ikeda

Subjects
Materials science, Hydrogen, Metallurgy, Ultra-high vacuum, chemistry.chemical_element, engineering.material, Permeation, Condensed Matter Physics, Titanium nitride, Cathode, Surfaces, Coatings and Films, law.invention, Outgassing, chemistry.chemical_compound, chemistry, Coating, law, engineering, Electrical and Electronic Engineering, Tin
Abstract

Coating of titanium nitride TiN film on stainless steel by hollow cathode discharge method under the controlled conditions has been developed and could reduce outgassing rate at the extremely high vacuum due to the hydrogen barrier effect of TiN.This paper reports 1. further reduction of hydrogen permeation constant K of TiN film, 2. application of this technique to practical chamber preparation, and 3. reduction of outgassing rate of the resulting chamber.Hydrogen permeation constant of TiN films prepared by a laboratory equipment was decreased by improving the film structure to more dense and larger grains. The minimum hydrogen permeation constant K of TiN film at 500°C was 6×10-13 Pa1/2·m2·s-1.Considering the above result, the practical condition of manufactuaring equipment was adjusted to make large samples for new XHV chambers fabricated for standard pressure measurement by Electrotechnical Laboratory in Japan.The resulting outgassing rate of a TiN coated chamber was measured by switching between two pumping paths (SPP) method at room temperature. At the ultimate pressure the outgassing rates of the stainless steel chamber was 3×10-12 Pa·m·s-1 after the prebaking of (430°C×100 h+ 500°C×100 h) and after TiN coating on the chamber it decreased to less than 1×10-13 Pa·m·s-1, the lowest value obtained for stainless steel.

Published
1998

16. Generation of a Stable Vacuum Field by Using a Micro Capillary

Author

Satoshi Akimichi, Masahiro Hirata, Hajime Yoshida, Kenta Arai, and Sakae Komatsu

Subjects
Leak, Field (physics), Chemistry, Capillary action, Dynamic range, Mass flow controller, Analytical chemistry, Mechanics, Gauge (firearms), Condensed Matter Physics, Stability (probability), Surfaces, Coatings and Films, Calibration, Electrical and Electronic Engineering
Abstract

It is necessary to generate a stable vacuum field for calibration of vacuum gauges by direct comparison with a reference gauge. According to ISO/TS 3536, it is required that the pressure indicated by the gauges shall be stable over time so that it dose not change more than 0.5% for time period of 2.5 min. In this study, three methods to generate a vacuum filed, namely, by using a variable leak valve, a mass flow controller and a combination in a capillary with a pressure controller, are evaluated from the viewpoint of both the stability and dynamic range of generated pressure. The vacuum field generated by a combination in a capillary with a pressure controller is the most stable of the three methods and satisfied the ISO/TS 3536 requirement over the range from 3.1×10-4 to 4.8 Pa. This method is effective to generate a stable vacuum field for calibration of vacuum gauge.

Published
2006

18. The Relation Between the Diameter of a Nipple and the Sensitivity Coefficient of a Nude Type Bayard-Alpert Gauge

Author

Shigemi Suginuma and Masahiro Hirata

Subjects
Rotor (electric), Chemistry, Sensitivity coefficient, Analytical chemistry, Electron, Gauge (firearms), Condensed Matter Physics, Space charge, Surfaces, Coatings and Films, Ion, law.invention, law, Electric potential, Electrical and Electronic Engineering, Atomic physics, Reference standards
Abstract

Four nude type Bayard-Alpert gauges attached in nipples of different inner diameters of 35, 38, 54 and 70 mm, were calibrated for nitrogen at the emission currents of 0.4, 1 and 4 mA using a spinning rotor gauge as a reference standard. The sensitivity coefficient of the gauges was influenced considerably by the diameter of the nipple and the emission current. All of the gauges attached in the 70 mm-diameter nipple showed a good stability of the sensitivity coefficient in the pressure region from 1×10-5 Pa to 3×10-2 Pa at the emission current of 0.4 mA. The change in the sensitivity coefficient was also discussed from the viewpoint of the distribution of the electric potential inside the nipple and the space charge effect of electrons and ions.

Published
1997

19. Seal Reliability of the Combination of ConFlat Type Bakable Knife-edge Flanges in Nominal Diameter of 305 mm Conforming to JVIS 003 and a Gasket of Compatible with ISO 3669

Author

Hitoshi Akimichi, Satoshi Kurokouchi, Toshio Kikuchi, and Masahiro Hirata

Subjects
Nominal size, Outer diameter, Materials science, Gasket, Compatibility (mechanics), Electrical and Electronic Engineering, Flange, Composite material, Condensed Matter Physics, Surfaces, Coatings and Films
Abstract

While a lot of commercially available knife-edge bakable flanges interchangeable with ConFlat type sealing system have been widely circulated and applied in UHV apparatus, their compatibility is occasionally missed in mating flanges with a nominal outer diameter of 305 mm owing to the difference of detailed dimensions between JVIS 003 and ISO 3669 standards; the dimension of gasket end in JVIS 003 is 0.3 mm larger than that of ISO 3669. In the combination of a flange of ISO 3669 with a gasket of JVIS 003, the outer rim of the gasket is larger than the gasket end on flange. On the contrary, the combination of a flange of ISO with a gasket of ISO 3669 makes a gap of approximately 0.6 mm at its maximum between the gasket end on the flange and outer rim of the gasket. Influence of this mismatching in dimensions on sealing performance was studied experimentally. While combinations required a relatively higher tightening torque, reliability in sealing was not loosed under careful tightening.

Published
2005

20. [Untitled]

Author

Kunio Okimura, Tomohiro Umezawa, Kentarou Sekikawa, Hitoshi Akimichi, Chiharu Maeda, Shigehiko Hasegawa, Asao Ohashi, Megumi Nakamura, Yao-Jane Hsu, Seiji Takechi, Tetsuro Shirao, Keiichi Fujimoto, Atsushi Tanaka, Tetsuya Abe, Tomohisa Okuno, Mitsuhiro Katayama, Satoshi Sugimoto, Shizuma Kuribayashi, Toshimi Sutou, Teiichi Homma, Masaki Takeguchi, Hisahiro Tange, Akinori Maeda, Zhao-Xiong Xie, Ken'ichi Miura, Jyun-Nosuke Nakatani, Yasushi Yamano, Masahiro Tosa, Jun'ichiro Mizuki, Hiroko Kaji, Masaaki Yoshitake, Shigeharu Ohkura, Hiroki Asari, Z. An, Akihiro Inoue, Shin-Ichi Nishizawa, Toru Sasaki, Akira Kasahara, Tetsuo Soumura, Akio Yoshimori, Nobuhiro Kaneko, Yoshio Sawada, Hideki Yamasaki, Yoshiro Shiokawa, Hiroshi Itoh, Junzo Ishikawa, Masamichi Yoshimura, Kazuhiko Mimoto, Tsutomu Takahashi, Tatsuhiko Matsushita, Kazuyuki Ueda, Takuji Oyama, Toshihiro Kondo, Tadao Toda, Yoshikazu Nakayama, Morio Yoshizawa, Kiyohide Kokubun, Ichiro Takano, Nozomu Takagi, Akira Sakai, Masahiro Shibusawa, Masatomo Nishiura, Takao Yoshikawa, Shizuyasu Ochiai, Nobuhiko Ota, Hideharu Matsushima, Masaaki Hirai, Masakazu Tanaka, Masahiko Kusaka, Akira Sakazaki, Tomoyuki Mizukoshi, Toshikazu Nosaka, Tomio Kubo, Shigeru Saito, Shuji Isono, Yuhjin Yamazaki, Sadamitsu Tanzawa, Hiroshi Iwasaki, Kazuhiro Yoshihara, Kimiko Sato, Toshinori Fujiki, Masahiro Goto, Osamu Suekane, Yasunori Yamamura, Takashi Arai, Tsukasa Kobayashi, Shigemi Suginuma, Joselito Labis, Kazuhiko Hasegawa, Jun Sakamoto, Shin-Ichi Honda, Yasuharu Yamashita, Takashi Sekido, Shu Kurokawa, Kaoru Ojima, Naohiro Horii, Keniche Shudo, Teruyoshi Mizutani, Tatsuo Yamabuchi, Masanori Kobayashi, Wilson Agerico Diño, Keisuke Tajiri, Hiroshi Koda, Masahiko Kitagawa, Kiminori Kakitani, Akihito Mori, Yusuke Suetsugu, Hirokazu Tahara, Masahito Tagawa, Takashi Matsumoto, Katsuhito Arakawa, Hiroshi Harima, Ryoki Tobe, Noriyuki Nakatani, Ken Kasuga, Kengo Hidaka, Yuto Fukuma, Fumihiro Uratani, Katsusuke Shimizu, Yoshitsugu Arakaki, Takeshi Miyashita, Seiji Hiroki, Tetsuo Ogawa, Kazuhisa Tamura, Kuei-Yi Lee, Akihiro Tanaka, Shinichi Kobayashi, Takanori Aoki, Masatoshi Tanaka, Tadashi Nakamura, Ken-Ichi Ohtomi, Akihiko Ohi, Yuji Tanaka, Takeshi Mitsuhashi, Nozomu Hattori, Teruo Yanagihashi, Sin'ichi Inoue, Koichi Sudoh, Shin Akiduki, Masato Kiuchi, Katsuhisa Chida, Toshiko Okui, Yoshio Fukuda, Jeong-Tak Ryu, Makoto Tanaka, Masahiro Hirata, Ayao Okiji, Miwako Kubo, Tomohide Sasaki, Daisuke Esashika, Tatsuo Yoshinobu, Akihisa Takeuchi, Norihiko Imaizumi, Tetsumi Tanabe, Masato Yasumoto, Hidekazu Takano, Kazuo Furuya, Kenzo Kojima, Toru Kanaji, Yoshiaki Sakurai, Touichi Hatano, Takahiro Okada, Takashi Kojima, Keisuke Kametani, Hiroshi Nakanishi, Toshio Kikuta, Shingo Ichimura, Kohei Uosaki, Itsuo Ishigami, Motohiro Iwami, Takeo Hosaka, Hidehiko Nonaka, Shigeo Fujita, Hiroyuki Nakano, Toshiaki Fujino, Kayo Iwase, Yasunori Tanimoto, Ken-ichi Kanazawa, Toyohito Uchizono, Yang-Gyu Baek, Shizuo Fujita, Yoshio Saito, Shigeharu Tamura, Shinji Shinabe, Yoichiro Ygi, Katsuhiro Nakamura, Nobumasa Kiwa, Mitsuhiro Awaji, Takashi Ikuno, Hakuto Murakami, Youichirou Hori, Toshiaki Yasui, Toshinari Yamazaki, Tetsuro Obayashi, Kazutaka Mitsuishi, Akio Okamoto, Hideaki Kasai, Takafumi Morii, Masamitu Takahasi, Yasuhito Gotoh, Hideo Furuhashi, Ken-Ichi Tanaka, Hiroya Nakajima, Masahiko Yamamoto, Hiroshi Morikawa, Hiroshi Tsuji, Zenzaburo Kabeya, Katsutoshi Tanaka, Kenjiro Oura, Katsumi Nishimura, Masahiro Okuda, Won-Chul Moon, Tatsuo Wakaida, Toshio Yoshikawa, Hisao Nakashima, Hideaki Hoshino, Nagao Kamijo, Shigeki Hirobayashi, Kouji Noda, Akio Suzuki, Yoshio Suzuki, Masahide Gotoh, Yoshihiro Satoh, Yoshiyuki Mizuno, Kazuhiro Hashimoto, Yoshiyuki Uchida, Seiichi Goto, Nobuharu Ohsako, and Toshio Yoshizawa

Subjects
Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films
Published
1995

21. Nurnerical Simulation of Thermal Transpiration in Capacitance Diaphragm Gauge

Author

Masahiro Hirata and Shin Ichi Nishizawa

Subjects
Chemistry, business.industry, Mean free path, Diaphragm (mechanical device), Mechanics, Gauge (firearms), Condensed Matter Physics, Capacitance, Surfaces, Coatings and Films, Optics, Thermal transpiration, Reflection (physics), Vacuum chamber, Sensitivity (control systems), Electrical and Electronic Engineering, business
Abstract

The Capacitance diaphragm gauge is one of the most important vacuum gauges in low and middle vacuum ranges. The difference of temperature between the sensor head and the vacuum chamber gives a non-linear sensitivity of the gauge due to thermal transpiration effect. This sensitivity depends not only on pressure but also gas species. It is supposed that under the same condition of gas-surface interaction, the sensitivity should be normalized by mean free path independently of gas species. However, the sensitivity normalized by mean free path also depends on gas species. In this study, by using DSMC method, the influence of gas-surface interaction on thermal transpiration was analyzed. In case of random reflection model, the sensitivity has non-linearity and depends on mean free path. On the other hand, in case of a perfectly elastic reflection model, the sensitivity is constant regardless mean free path. In case of complex reflection that is composed of random and elastic reflections, as increasing the elastic reflection component, the sensitivity decreases from that of random reflection to elastic reflection.

Published
2003

22. Analysis of Dispersion of Measured Values of a Spinning Rotor Gauge

Author

Masahiro Hirata

Subjects
Physics, Spectrum analyzer, Rotor (electric), Mechanics, Gauge (firearms), Condensed Matter Physics, Standard deviation, Surfaces, Coatings and Films, law.invention, Pressure measurement, Classical mechanics, law, Dispersion (optics), Calibration, Electrical and Electronic Engineering, Spinning
Abstract

Spinning rotor gauges are widely used as transfer and reference gauges for gauge calibration in high and medium vacuum. The dispersion of a spinning rotor gauge is the dominant cause of the uncertainty in pressure measurement at less than 10-2 Pa. The minimum value of the standard deviation of the dispersion of 2.6 × 10-8 Pa is calculated based on sampling interval of 30s and clock pulse frequency of 10 MHz. The rotational signal of a rotor was analyzed by a FFT analyzer. It was clarified that the disorder in the period of rotational signal due to external vibration increases the dispersion. The difference between the standard deviation values obtained from calculations and experiments was also investigated.

Published
1994

25. Influence of Dispersion of Measured Values on the Uncertainty of a Spinning Rotor Gauge

Author

Masahiro Hirata

Subjects
Physics, Offset (computer science), Rotor (electric), High Energy Physics::Lattice, High Energy Physics::Phenomenology, Mechanics, Gauge (firearms), Condensed Matter Physics, Standard deviation, Surfaces, Coatings and Films, law.invention, High Energy Physics::Theory, Classical mechanics, Pressure measurement, law, Dispersion (optics), Calibration, Electrical and Electronic Engineering, Spinning
Abstract

Spinning rotor gauges are used widely as transfer and reference gauges for gauge calibration in high and middle vacuum. Causes of error in pressure measurements by the gauge were discussed. Change in offset was measured and analyzed. A spinning rotor gauge was calibrated from 10-4 to 1 Pa using another spinning rotor gauge as a reference. The dispersion of measured values was the dominant cause of the uncertainty at pressures less than 10-2 Pa. The lowest value of the standard deviation was 3×10-7 Pa. Judging from this value, the lower limit of reliable measurement by the gauge is 3×10-5 Pa.

Published
1993

26. Intercomparison of Vacuum Standards of Japan and Italy

Author

Masahiro Hirata, Anita Calcatelli, M. Ono, G Rumiano, and M Bergoglio

Subjects
Physics, Accommodation coefficient, Meteorology, Rotor (electric), High Energy Physics::Lattice, Mechanics, Gauge (firearms), Condensed Matter Physics, Surfaces, Coatings and Films, law.invention, law, Calibration, Electrical and Electronic Engineering, Spinning
Abstract

Intercomparison of vacuum standards was carried out by using a spinning rotor gauge as a transfer gauge. The accommodation coefficient of the rotor was measured by the static expansion system at the Electrotechnical Laboratory and by the dynamic expansion system at the laboratorys Italian counterpart. The difference between coefficients measured in these two laboratories was 0.7%, which was smaller than the uncertainties of gauge calibration systems.

Published
1991

27. Development of a Large UHV Chamber for a Vacuum Gauge Calibration

Author

Masato Inoue and Masahiro Hirata

Subjects
Physics, Optics, Calibration (statistics), business.industry, Development (differential geometry), Electrical and Electronic Engineering, Gauge (firearms), Condensed Matter Physics, business, Surfaces, Coatings and Films
Published
1997

29. [Untitled]

Author

Kiyohide KOKUBUN, Shingo ICHIMURA, Hajime SHIMIZU, Hiroshi MURAKAMI, Shigeru SAITO, Tetsuo SOUMURA, Takao MAEDA, Kumetaro KANEKO, Yoichi KOBAYASHI, Masahiro HIRATA, Masatoshi ONO, Yoshitsugu TODA, Hideaki ISOGAI, Shojiro KOMAKI, Hisao HOJO, Katsumi SHIMIZU, Masakazu ABE, Naohiko MARUNO, Isao KUDO, Seiji HIROKI, Tetsuya ABE, Yoshio MURAKAMI, Satoru SUKENOBU, Moriaki FUYAMA, Fumio NAKANO, Tasao SOGA, Koji SUZUKI, Keisuke GOTO, Takeshi OHWAKI, Yasunori TAGA, Makoto SAKURAI, Tatsuo OKANO, Yutaka TUZI, Takuya HAMAMURA, Teijiro TAMURA, Yasuo IIZUKA, Tetsuro OHBAYASHI, Kazuyuki NAKAMURA, Kenjiro OBARA, Yoshijiro USHIO, Namio MATUDA, Akira KINBARA, Tsukasa Kobayashi, Hiroaki KITAHARA, Naokichi HOSOKAWA, Akira MUZUYOSHI, Hirotaka ITO, Tutomu MAEDA, Hiromasa ITO, Humio INABA, Haruo HIRANO, Yukihito KONDO, Nagamitsu YOSHIMURA, Yasushi IWASA, Harunobu MIKI, Noriyuki KOBAYASHI, Mitsugi YAMAGUCHI, Yoshio SAWADA, Isao KUSUNOKI, Yoshiyuki TERUI, Toshiaki SASAKI, Noriharu SUEMATSU, Akio NAKAJIMA, Isamu KATO, Tatsuya BANDO, Takahiro NAKAHIGASHI, Kiyoshi OGATA, Yasunori ANDO, Eiji KAMIJO, Kouji OKAMOTO, Noboru KURIYAMA, Kentaro SHIMADA, Shigeru TAKAGI, Yoshinori ITO, Naoki WATANABE, Takehiro SAKURAI, Kazuo NAKAMURA, Isao KOIKE, and Shikakichi YAMASHITA

Subjects
Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films
Published
1987

30. [Untitled]

Author

Shen Guo HUA, Nobuaki YAGI, Souji KOMIYA, Kenji YOKOKURA, Yoshimi MATSUZAKI, Takashi TANI, Kazuo KIKUCHI, Minoru KAZAWA, Kohichi HASEGAWA, Fuminori OKANO, Takanori KASHIMURA, Shigeru KONOSHIMA, Norio SUZUKI, Hideo OHTUKA, Satoru SUKENOBU, Yoshio GOMAY, Hajime MIZUNO, Gen'ichi HORIKOSHI, Kenji WADA, Hajime ISHIMARU, Hiroshi MIMA, Kunio YAGI, Futoshi KANEMATSU, Fumio WATANABE, Shigenori HIRAMATSU, Masahiro HIRATA, Masatoshi ONO, Yoshitsugu TODA, Junji TAMANO, Masao YAMADA, Katsumi YONEDA, Shinzo MORITA, Shuzo HATTORI, Haruhito ONO, Nobuhiro YOSHIOKA, Hiroyuki SAITO, Yoshio MORONUKI, Katsuya NARUSHIMA, Masanori KOBAYASHI, Hiromi WATANABE, Tetsuya ABE, Kenjiro OBARA, Tetsusan KUROKI, Yoshio MURAKAMI, Shigeru KANETO, Masashi IGUCHI, Hiroshi NAKANISHI, Kyuzo NAKAMURA, Taiki YAMADA, Yoshifumi OTA, Akio ITOH, Masao MIYAMURA, Osamu TSUKAKOSHI, Hideshi YOSHIKAWA, Masayoshi NAKANO, Hiroshi YANAGIDA, Yasuo SUGIYAMA, Saburo SHIMIZU, Kiyoshi KOMATSU, Mutsuhiro KOBAYASHI, Yoshinori MIYADA, Tomoyuki OSAKI, Ryosuke KONISHI, Susumu KATO, Masaki TANEMURA, Keisuke GOTO, Kazuo ISHIKAWA, Shigeru SAITO, Takao MAEDA, Masashi MASUDA, Katsumi NISHIMORI, Heizo TOKUTAKA, and Katsumi TAKASHIMA

Subjects
Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films
Published
1982

31. Fundamental Design of Vacuum System for ETL Storage Ring

Author

Masahiro Hirata, Fuyuhiko Sugawara, Hazime Shimizu, and Takio Tomimasu

Subjects
Materials science, business.industry, Optoelectronics, Electrical and Electronic Engineering, Condensed Matter Physics, business, Storage ring, Surfaces, Coatings and Films
Published
1981

32. [Untitled]

Author

Masahiro Hirata

Subjects
Physics, Optics, business.industry, Vacuum pumping, Electrical and Electronic Engineering, Condensed Matter Physics, Space (mathematics), business, Surfaces, Coatings and Films
Published
1981

33. [Untitled]

Author

Hiroshi MIMA, Keishi KUBO, Kunio YAGI, Futoshi KANEMATSU, Masahiro HIRATA, Kiyohide KOKUBUN, Hiroshi MURAKAMI, Yoshitsugu TODA, Masatoshi ONO, Yoshio MURAKAMI, Yasuo SHIMOMURA, Tetsuya ABE, Kenjiro OBARA, Masahiro KONO, Katsumi NISHIMORI, Heizo TOKUTAKA, Naganori ISHIHARA, Katsumi TAKASHIMA, Eichi KANDA, Toshinori SEKI, Hiroyuki YAMAKAWA, Souji KOMIYA, Takanori KOSHIKAWA, Isao KATO, Kenya AKAISHI, Motoyuki SUZUKI, Takaharu GAMO, Saburou SHIMIZU, Kenichi TAKAGI, Osamu TSUKAKOSHI, Unosuke MAKITA, Tokue MATSUMORI, Yoshiro KUSUMOTO, Toshio HAYASI, Akihiko OHSAKI, Tatsuo OKANO, Yutaka TUZI, Takashi MOMOSE, Katsuya NARUSHIMA, Hajime MIZUNO, Hiromi WATANABE, Hajime ISHIMARU, R.S. Li, Keisuke GOTO, Takashi IKUTA, Yoshinori MIYADA, Ryosuke KONISHI, Susumu KATO, Tomoyuki OSAKI, Chang-Yi LIU, Koji ITO, Gen'ichi HORIKOSHI, Atsushi SEKIGUCHI, Taiki YAMADA, Noriaki TANI, Yoshifumi OHTA, Kyuzo NAKAMURA, and Akio ITOH

Subjects
Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films
Published
1984

34. Pressure standards and gauges in vacuum

Author

Masahiro Hirata

Subjects
Materials science, Pressure measurement, law, Mechanical engineering, Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films, law.invention
Published
1987

35. [Untitled]

Author

Nagamitsu YOSHIMURA, Manami FUJIMOTO, Yasuhiro MATSUSHIMA, Toshio URANO, Toru KANAJI, Fuminori FUJIMOTO, Norio OGIWARA, Masaki MAENO, Shoji NOSHIROYA, Fumio KIMIJIMA, Yoji YOSHINARI, Hideaki ISOGAI, Masahiro HIRATA, Masatoshi ONO, Isao KUDO, Kiyohide KOKUBUN, Shingo ICHIMURA, Hiroko HASHIZUME, Hajime SHIMIZU, Yoshiro OOWADANO, Yuji MATSUMOTO, Hirotsugu TANAKA, Ryohei AIDA, Atsushi NAGATA, Haruo HIRANO, Yukihito KONDO, Junji FUKUHARA, Saburo SHIMIZU, Hiroyuki YAMAKAWA, Hiroshi MURAKAMI, Hazime SHIMIZU, Yukio ISHIBE, Hideki KOKAI, Hitoshi Oyama, Shigeki KATO, Yuichi Sakanoto, Tetsu MIENO, Rikizo HATAKEYAMA, Noriyoshi SATO, Nobuaki NODA, Tohru MIZUUCHI, Kenya AKAISHI, Osamu MOTOJIMA, Atsuo IIYOSHI, Kohji UO, Tadao HATAKEYAMA, Daisuke AONUMA, Seishi HORIGUCHI, Yoshihiro HIROTA, Naokichi HOSOKAWA, Shigeru BABA, Akira KINBARA, Koji OKAMOTO, Masayasu TANJYO, Eiji KAMIJO, Yoshitaka SETOGUCHI, Takahiro NAKAHIGASHI, Susumu AMEMIYA, Masahiro ASANO, Yukio TSURITA, Toshio MASUDA, Akihiro KANEUCHI, Toshio KATOH, Yuuichi KOKAKU, Makoto KITO, Masaie TOKAI, Hiroshi YANAGIDA, Takeshi KATAGAWA, Osamu TSUKAKOSHI, Souji KOMIYA, and Takeo ICHINOKAWA

Subjects
Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films
Published
1988

37. Quartz friction vacuum gauge and the theory of a viscosity vacuum gauge

Author

Yoshitsugu Toda, Hiroshi Murakami, Masahiro Hirata, M. Ono, and Kiyohide Kokubun

Subjects
Viscosity, Materials science, Electrical and Electronic Engineering, Composite material, Gauge (firearms), Condensed Matter Physics, Quartz, Surfaces, Coatings and Films
Published
1987

38. [Untitled]

Author

Ichiro ARAKAWA, Yutaka TUZI, Masahiro HIRATA, Masatoshi ONO, Hiroshi MURAKAMI, Yoshitsugu TODA, Kiyohide KOKUBUN, Takashi MOMOSE, Katsuya NARUSHIMA, Hajime MIZUNO, Hiromi WATANABE, Hajime ISHIMARU, Toru KANAJI, Akio ARAI, Tatsuro HONDA, Toshio URANO, G. Grosse, G. Messer, D. Wandrey, Fumio WATANABE, Shigenori HIRAMATSU, Muntaek KIM, Hiroshi MIMA, Kunio YAGI, Futoshi KANEMATSU, Kenji OISHI, Seiji USAMI, Mitsugu OKAMOTO, Masatoshi GOTOH, Keiichi NISHIDA, Shigeru SAITO, Tetsuo SOUMURA, Takao MAEDA, Kazunori KOMORITA, Hidenori HASHIMOTO, Hideki NISHIMURA, Katsumi TAKIGUCHI, Soichi OGAWA, Yuzuru TAKAHASHI, Tadayoshi SHIOYAMA, Kazuyuki NAKAMURA, Yoshio MURAKAMI, Shunji SAITO, Yukio SUZUKI, Akira MISUMI, Masanori KOBAYASHI, Hideo KITAMURA, Gen'ichi HORIKOSHI, Hiroshi YAMAGUCHI, Tomio KUBO, Takaaki FURUYA, Hiroshi NAKANISHI, Masao HASHIBA, Toru SATAKE, Mamoru MOHRI, Toshiro YAMASHINA, Hisashi OIKAWA, Sigeru KANETO, Toshio SHIGEHARA, Tokishige KINOSHITA, Tohru SATAKE, Dennis M. Manos, Robert BUDNY, Sam A. COHEN, Masatsugu KITADA, Kazuyuki KOMAGATA, Osamu TSUKAKOSHI, Souji KOMIYA, Shingo ICHIMURA, Hiroshi TANINO, Koichiro HOH, Nobufumi ATODA, Hideo ONUKI, Kiyoshi KOMATSU, Toshio HAYASHI, Masashi KIKUCHI, Toshiaki FUJIOKA, Taiki YAMADA, Yoshifumi OHTA, Kyuzo NAKAMURA, Akio ITOH, Tsutom YOTSUYA, Junya YAMAMOTO, Atsushi SHIBUKAWA, Hideo SUGIURA, and Masafumi YAMAGUCHI

Subjects
Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films
Published
1983

39. [Untitled]

Author

Hisao HOJO, Hideaki KYOUGOKU, Fujio TAMURA, Masahiro YAMAMOTO, Masatoshi ONO, Masahiro HIRATA, Kiyohide KOKUBUN, Hiroshi MURAKAMI, Yoshitsugu TODA, Hideaki ISOGAI, Masakazu ABE, Hiroshi MIMA, Susumu AMEMIYA, Eiji OBATA, Kazuyuki ISHIKAWA, Toshio KATOH, Akihiro KANEUCHI, Toshio MASUDA, Yukio TSURITA, Fumio WATANABE, Sigenori HIRAMATSU, Hajime ISHIMARU, Masanori KOBAYASHI, Kenya AKAISHI, Yuske KUBOTA, Toshiaki IWATA, Kazuo MACHIDA, Masakuni KAWADA, Yasuo KURITA, Toshio HONDA, Kenichi ICHIMURA, Atsushi SEKIGUCHI, Kouji NOMA, Hideo MITO, Koichi TAMAGAWA, Toshio HAYASHI, Souji KOMIYA, Moriaki FUYAMA, Ken-ichi ONISAWA, Katsumi TAMURA, Kazuo TAGUCHI, Takahiro NAKAYAMA, Yoshimasa Ono, Tsunemi OHIWA, Shuichi WADA, Akira KAWAKAMI, Toshikatsu MANABE, Hyunwoo KIM, Kimio OKUNO, Mitsuhiro FUJII, Toshio SAKURAI, Seiji HIROKI, Tetsuya ABE, Yoshio MURAKAMI, Kenjiro OBARA, Masaaki SUZUKI, Katsumasa YABE, Toshiro YAMASHINA, Hiroyuki YAMAKAWA, Tetsuzi KIYOTA, Ikutaka KOUNO, Toshio YOKOKAWA, Naokichi HOSOKAWA, Kimiaki HIRAMA, Junro SAKAI, Shunichi MURAKAMI, Tetsuo ISHIDA, Yasunari NAKAYAMA, Fumiya SHOJI, Kenjiro OURA, Teruo HANAWA, Hazime SHIMIZU, Singo ICHIMURA, Toshio SIGEHARA, and Hiroshi AGARI

Subjects
Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films
Published
1986

40. Analysis of the change in an offset pressure just after starting the operation of a spinning rotor gauge

Author

Masahiro Hirata, Kiyohide Kokubun, Hideaki Isogai, and M. Ono

Subjects
Offset (computer science), Materials science, Rotor (electric), Mechanics, Radiation, Gauge (firearms), Condensed Matter Physics, Surfaces, Coatings and Films, law.invention, law, Heat exchanger, Personal computer, Emissivity, Electrical and Electronic Engineering, Spinning
Abstract

Just after starting the operation of a spinning rotor gauge at pressure less than 2 × 10-6 Pa (nitrogen equivalent), its offset pressure changed by 3 × 10-5 Pa from its final value. A simulation using a personal computer, based on a heat exchange by radiation between a rotor and a rotor tube of the gauge, is carried out to reveal the change in the offset pressure. The result of the simulation showed a good agreement with the time chart of the offset pressure measured experimentally. Influence of parameters, such as linear expansion coefficient, density, specific heat, emissivity of the rotor etc., on the time variation is also studied by the simulation.

Published
1987

42. Development of Vacuum Test Facility with FRP

Author

Moritada Kubo, Tatsuo Sasaki, Shoji Sakakibara, Takashi Inui, and Masahiro Hirata

Subjects
Engineering, Test facility, business.industry, Structural engineering, Electrical and Electronic Engineering, Fibre-reinforced plastic, Condensed Matter Physics, business, Surfaces, Coatings and Films
Published
1981

43. [Untitled]

Author

Masahiro Hirata, Masatoshi Ono, Yoshitsugu Toda, and Katsuya Nakayama

Subjects
business.industry, Chemistry, High Energy Physics::Lattice, High Energy Physics::Phenomenology, McLeod gauge, Gauge (firearms), Condensed Matter Physics, Displacement (vector), Surfaces, Coatings and Films, law.invention, High Energy Physics::Theory, Optics, law, Primary standard, Ionization, Electrode, Electrical and Electronic Engineering, business, Sensitivity (electronics)
Abstract

Secondary standard ionization gauges (VS-1) have been calibrated by using the primary standard McLeod gauge at ETL for about twenty years. The average value of the sensitivities is 0.137 Pa-1. About 85% of the gauges have sensitivities with less than ± 10% deviation from the average. It was confirmed by the X- ray photograph of the gauge and the experiment of a nude type gauge with movable electrodes that the spread of the sensitivities are mainly caused by the electrode displacement. It is also discussed that the technical problems connected with the use of the gauge as a transfer gauge for the international comparison of vacuum standards.

Published
1982

44. [Untitled]

Author

Kazuho SONE, Souji KOMIYA, Masahiro HIRATA, Yoshitsugu TODA, Kazuo MACHIDA, Isao KUDO, Hiroshi MURAKAMI, Hazime ISHIMARU, Gen'ichi HORIKOSHI, Kazuyuki MINOWA, Hisao HOJO, Masatoshi ONO, Katsuya NAKAYAMA, Ichiro ARAKAWA, Masanori KOBAYASHI, Yutaka TUZI, Takashi ITOH, Shinsaku MORITA, Akira ODAGIRI, Yasuo SUGIYAMA, Teruo HANAWA, Hajime MIZUNO, Hirohi YAMAGUCHI, Katsumi NISHIMORI, Heizo TOKUTAKA, Katsumi TAKASHIMA, Hiroshi KAWANO, Keisuke GOTO, Kazuo ISHIKAWA, Katsuhiko ISHIGURO, Teiichi HOMMA, Akihiro TANAKA, Mitsuchika SAITOH, Fumiya SHOJI, Kenjiro OURA, Touichi HATANO, Kousu SAKAGUCHI, Kenji UCHIDA, Hideshi YOSHIKAWA, Masashi KIRIYA, Osamu NITTONO, Saburo SHIMIZU, Tadashi NARUSAWA, Soichi OGAWA, Katsumi TAKIGUCHI, Tadayoshi SIOYAMA, Hiromi MATUDA, Teiji UEMURA, Hisao SHIBATA, Hiroaki MIYANAGA, Kaoru TAKEDA, Eiji TSUNASAWA, Kenichiro INAGAKI, Kyuhiko YAMANAKA, Katsuhiro SAKAI, Akira SUZUKI, Masami NAKASONE, Yasushi KAWASHIMO, Kazuo SUNAHARA, Akira MISUMI, and Itsuo ISHIGAMI

Subjects
Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films
Published
1979

45. Influence of operating conditions on the accuracy of a spinning rotor gauge

Author

Hideaki Isogai, Ono Masatoshi, Masahiro Hirata, and Kiyohide Kokubun

Subjects
Physics, Offset (computer science), Rotor (electric), High Energy Physics::Lattice, High Energy Physics::Phenomenology, Diaphragm (mechanical device), Mechanics, Gauge (firearms), Condensed Matter Physics, Surfaces, Coatings and Films, law.invention, Vibration, High Energy Physics::Theory, Classical mechanics, law, Thermal, Head (vessel), Electrical and Electronic Engineering, Spinning
Abstract

The influence of operational conditions of a spinning rotor gauge on its accuracy was studied in order to clarify the performance of the gauge as a transfer standard gauge or a secondary standard gauge. The lower limit of measuring pressure of the gauge was affected by its offset pressure resulting from setting angle of the sensor, external vibration and thermal effects. One of the thermal effects on the offset pressure, which was evident just after starting of operation, was explained from the temperature change of the sensor head. The gauge sensitivity in high pressure region was measured by using a diaphragm gauge as a reference gauge. It was confirmed that the accuracy of the spinning rotor gauge was kept 1% between 10-3 to 10 Pa for long term.

Published
1985

46. [Untitled]

Author

Masahiro Hirata, Shingo Ichimura, and Hazime Shimizu

Subjects
Photoexcitation, Physics, Photon, Electrical and Electronic Engineering, Atomic physics, Condensed Matter Physics, Excitation, Surfaces, Coatings and Films
Published
1984

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