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Development of a Large UHV Chamber for a Vacuum Gauge Calibration

Authors :
Masato Inoue
Masahiro Hirata
Source :
SHINKU. 40:446-448
Publication Year :
1997
Publisher :
The Vacuum Society of Japan, 1997.

Subjects

Subjects :
Physics
Optics
Calibration (statistics)
business.industry
Development (differential geometry)
Electrical and Electronic Engineering
Gauge (firearms)
Condensed Matter Physics
business
Surfaces, Coatings and Films

Details

ISSN :
18809413 and 05598516
Volume :
40
Database :
OpenAIRE
Journal :
SHINKU
Accession number :
edsair.doi...........355b298ae0f42464d975be15a685aa4e
Full Text :
https://doi.org/10.3131/jvsj.40.446
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